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Sato; Tetsuji Patent Filings

Sato; Tetsuji

Patent Applications and Registrations

Patent applications and USPTO patent grants for Sato; Tetsuji.The latest application filed is for "plasma processing method and plasma processing apparatus".

Company Profile
4.25.25
  • Sato; Tetsuji - Miyagi JP
  • Sato; Tetsuji - Kurokawa-gun JP
  • Sato; Tetsuji - Yamanashi N/A JP
  • Sato; Tetsuji - Nirasaki JP
  • Sato; Tetsuji - Kawasaki JP
  • SATO; Tetsuji - Nirasaki City JP
  • Sato; Tetsuji - Nirasaki-shi JP
  • Sato; Tetsuji - Hyogo JP
  • Sato; Tetsuji - Yokohama JP
  • Sato; Tetsuji - Ashiya JP
  • Sato; Tetsuji - Mishima JP
  • Sato; Tetsuji - Shizuoka-ken JP
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
Annular member, plasma processing apparatus and plasma etching method
Grant 11,257,662 - Kitamura , et al. February 22, 2
2022-02-22
Plasma Processing Method And Plasma Processing Apparatus
App 20210272781 - YAHATA; Shojiro ;   et al.
2021-09-02
Plasma Processing Apparatus And Plasma Processing Method
App 20210267042 - Uchida; Yohei ;   et al.
2021-08-26
Plasma Processing Apparatus And Plasma Processing Method
App 20210249231 - SATO; Tetsuji
2021-08-12
Edge Ring And Substrate Processing Apparatus
App 20210183685 - LEE; Sungjae ;   et al.
2021-06-17
Plasma processing apparatus and plasma processing method
Grant 11,032,899 - Uchida , et al. June 8, 2
2021-06-08
Plasma processing apparatus and plasma processing method
Grant 10,847,348 - Tsukahara , et al. November 24, 2
2020-11-24
Plasma Processing Apparatus And Plasma Processing Method
App 20200176226 - Tsukahara; Toshiya ;   et al.
2020-06-04
Plasma Processing Apparatus And Plasma Processing Method
App 20200107429 - Uchida; Yohei ;   et al.
2020-04-02
Annular Member, Plasma Processing Apparatus And Plasma Etching Method
App 20200066496 - KITAMURA; Shingo ;   et al.
2020-02-27
Substrate processing apparatus
Grant 9,455,125 - Yoshimura , et al. September 27, 2
2016-09-27
Focusing ring
Grant D709,536 - Yoshimura , et al. July 22, 2
2014-07-22
Reflecting device, communicating pipe, exhausting pump, exhaust system, method for cleaning the system, storage medium storing program for implementing the method, substrate processing apparatus, and particle capturing component
Grant 8,727,708 - Moriya , et al. May 20, 2
2014-05-20
Substrate mounting table of substrate processing apparatus
Grant 8,687,343 - Sato , et al. April 1, 2
2014-04-01
Heat-transfer structure and substrate processing apparatus
Grant 8,524,005 - Miyagawa , et al. September 3, 2
2013-09-03
Plasma processing method and apparatus
Grant 8,173,036 - Honda , et al. May 8, 2
2012-05-08
Plasma processing apparatus and the upper electrode unit
Grant 8,083,891 - Sato December 27, 2
2011-12-27
Data transmission and reception module, and method of adjusting reception threshold value thereof
Grant 8,077,761 - Sato December 13, 2
2011-12-13
Substrate Processing Apparatus
App 20110240224 - YOSHIMURA; Akihiro ;   et al.
2011-10-06
Reflecting Device, Communicating Pipe, Exhausting Pump, Exhaust System, Method For Cleaning The System, Storage Medium Storing Program For Implementing The Method, Substrate Processing Apparatus, And Particle Capturing Component
App 20110162678 - MORIYA; Tsuyoshi ;   et al.
2011-07-07
Substrate Mounting Table Of Substrate Processing Apparatus
App 20110116207 - SATO; Tetsuji ;   et al.
2011-05-19
Reflecting device, communicating pipe, exhausting pump, exhaust system, method for cleaning the system, storage medium storing program for implementing the method, substrate processing apparatus, and particle capturing component
Grant 7,927,066 - Moriya , et al. April 19, 2
2011-04-19
Communication System
App 20110064417 - Sato; Tetsuji
2011-03-17
Plasma Processing Apparatus and the Upper Electrode Unit
App 20110030898 - SATO; Tetsuji
2011-02-10
Exhaust system and exhausting pump connected to a processing chamber of a substrate processing apparatus
Grant 7,837,432 - Moriya , et al. November 23, 2
2010-11-23
Plasma processing apparatus
Grant 7,815,767 - Sato October 19, 2
2010-10-19
Linear actuator
Grant 7,707,924 - Yamanouchi , et al. May 4, 2
2010-05-04
Plasma Processing Apparatus and the Upper Electrode Unit
App 20090255631 - Sato; Tetsuji
2009-10-15
Plasma Processing Apparatus And Method, And Baffle Plate Of The Plasma Processing Apparatus
App 20090206055 - SATO; Tetsuji ;   et al.
2009-08-20
Exhaust System And Exhausting Pump Connected To A Processing Chamber Of A Substrate Processing Apparatus
App 20090136336 - Moriya; Tsuyoshi ;   et al.
2009-05-28
Reservoir built-in type actuator
Grant 7,513,112 - Sato , et al. April 7, 2
2009-04-07
Plasma processing apparatus and plasma processing method
Grant 7,438,783 - Miyata , et al. October 21, 2
2008-10-21
Data transmission and reception module, and method of adjusting reception threshold value thereof
App 20080175341 - Sato; Tetsuji
2008-07-24
Identification level control method and optical receiver
Grant 7,382,987 - Misaizu , et al. June 3, 2
2008-06-03
Heat-transfer Structure And Substrate Processing Apparatus
App 20080006207 - Miyagawa; Masaaki ;   et al.
2008-01-10
Reservoir built-in type actuator
App 20070209357 - Sato; Tetsuji ;   et al.
2007-09-13
Reflecting device, communicating pipe, exhausting pump, exhaust system, method for cleaning the system, storage medium storing program for implementing the method, substrate processing apparatus, and particle capturing component
App 20060257243 - Moriya; Tsuyoshi ;   et al.
2006-11-16
Plasma processing method and apparatus
App 20060196847 - Honda; Masanobu ;   et al.
2006-09-07
Plasma processing apparatus and plasma processing method
App 20060081559 - Miyata; Koji ;   et al.
2006-04-20
Linear actuator
App 20050207910 - Yamanouchi, Hiroshi ;   et al.
2005-09-22
Identification level control method and optical receiver
App 20050078966 - Misaizu, Setsuo ;   et al.
2005-04-14
Plasma processing apparatus
App 20040261712 - Hayashi, Daisuke ;   et al.
2004-12-30
Plasma processing apparatus
App 20040182515 - Sato, Tetsuji
2004-09-23
India ink container
Grant D495,008 - Sato August 24, 2
2004-08-24
India ink container
Grant D493,489 - Sato July 27, 2
2004-07-27

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