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Method of manufacturing an electronic component Grant 9,735,340 - Oishibashi , et al. August 15, 2 | 2017-08-15 |
Substrate processing apparatus, semiconductor device manufacturing method, substrate processing method, and recording medium Grant 9,543,220 - Sato January 10, 2 | 2017-01-10 |
Method for manufacturing piezoelectric vibration device Grant 9,479,135 - Sato , et al. October 25, 2 | 2016-10-25 |
Signal switching apparatus Grant 9,054,784 - Sato , et al. June 9, 2 | 2015-06-09 |
Substrate Processing Apparatus, Semiconductor Device Manufacturing Method, Substrate Processing Method, And Recording Medium App 20140370628 - SATO; Takeo | 2014-12-18 |
Electronic Component And Manufacturing Method For The Electronic Component App 20140028155 - Oishibashi; Hidekazu ;   et al. | 2014-01-30 |
Substrate Processing Apparatus, Substrate Transfer Method And Method For Manufacturing Semiconductor Device App 20130102159 - KOTANI; Hiroshi ;   et al. | 2013-04-25 |
Signal Switching Apparatus App 20120314712 - Sato; Takeo ;   et al. | 2012-12-13 |
Method for Manufacturing Piezoelectric Vibration Device App 20120174360 - Sato; Takeo ;   et al. | 2012-07-12 |
Wireless communication method and information processing apparatus storing different wireless modules in same apparatus App 20070066360 - Sato; Takeo ;   et al. | 2007-03-22 |
Chemoradiotherapy with TS-1/camptothecins App 20070036717 - Watanabe; Masahiko ;   et al. | 2007-02-15 |
Electric motor vehicle Grant 6,054,818 - Tabata , et al. April 25, 2 | 2000-04-25 |
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Lighting assembly, exposure apparatus and exposure method employing the lighting assembly Grant 5,748,288 - Nagano , et al. May 5, 1 | 1998-05-05 |
Method of detecting focus position of object from variable gray level image of object Grant 5,621,822 - Yukawa , et al. April 15, 1 | 1997-04-15 |
Exposure system Grant 5,227,838 - Nakanishi , et al. July 13, 1 | 1993-07-13 |
Method and apparatus for applying a uniform adhesive coat to a resin-coated mandrel Grant 5,201,952 - Yahagi , et al. April 13, 1 | 1993-04-13 |
Sealed-type aquarium device Grant 5,174,239 - Sato December 29, 1 | 1992-12-29 |
Apparatus for evaluating a lens Grant 5,062,705 - Sato , et al. November 5, 1 | 1991-11-05 |
Optical projection system Grant 4,948,238 - Araki , et al. August 14, 1 | 1990-08-14 |
Apparatus for controlling relation in position between a photomask and a wafer Grant 4,870,289 - Sato , et al. September 26, 1 | 1989-09-26 |
Projection optical system for use in precise copy Grant 4,861,148 - Sato , et al. August 29, 1 | 1989-08-29 |
Scanning type projection exposure system Grant 4,844,568 - Suzuki , et al. July 4, 1 | 1989-07-04 |
Projection optical system Grant 4,757,354 - Sato , et al. July 12, 1 | 1988-07-12 |
Cathode-ray tube for projector having heat conduction and radiating means Grant 4,484,100 - Sato November 20, 1 | 1984-11-20 |
Compatible AM-FM frequency discriminator Grant 4,160,955 - Sato July 10, 1 | 1979-07-10 |