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Polishing method and electropolishing apparatus Grant 7,255,784 - Sato , et al. August 14, 2 | 2007-08-14 |
Method for producing semiconductor device, polishing apparatus, and polishing method Grant 7,232,760 - Nogami , et al. June 19, 2 | 2007-06-19 |
Electropolishing liquid, electropolishing method, and method for fabricating semiconductor device App 20070051638 - Sato; Shuzo ;   et al. | 2007-03-08 |
Polishing method, polishing apparatus, plating method, and plating apparatus App 20070051632 - Sato; Shuzo ;   et al. | 2007-03-08 |
Methods of producing and polishing semiconductor device and polishing apparatus Grant 7,186,322 - Sato , et al. March 6, 2 | 2007-03-06 |
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Polishing method, polishing apparatus, and method of manufacturing semiconductor device Grant 7,141,501 - Horikoshi , et al. November 28, 2 | 2006-11-28 |
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Polishing method, polishing device, and method of manufacturing semiconductor equipment App 20050178672 - Sato, Shuzo ;   et al. | 2005-08-18 |
Method of producing metallic film Grant 6,911,396 - Sato , et al. June 28, 2 | 2005-06-28 |
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Electro-chemical machining apparatus App 20040188244 - Sato, Shuzo ;   et al. | 2004-09-30 |
Methods of producing and polishing semiconductor device and polishing apparatus Grant 6,797,623 - Sato , et al. September 28, 2 | 2004-09-28 |
Polishing method, polishing apparatus, plating method, and plating apparatus App 20040182720 - Sato, Shuzo ;   et al. | 2004-09-23 |
Electrolytic polishing liquid, electrolytic polishing method and method for fabricating semiconductor device App 20040159557 - Sato, Shuzo ;   et al. | 2004-08-19 |
Electropolishing apparatus and polishing method App 20040149592 - Komai, Naoki ;   et al. | 2004-08-05 |
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Method of producing metal film App 20040097070 - Sato, Shuzo ;   et al. | 2004-05-20 |
Polishing method and polishing apparatus App 20040092110 - Sato, Shuzo ;   et al. | 2004-05-13 |
Polishing system, polishing method, polishing pad, and method of forming polishing pad Grant 6,722,962 - Sato , et al. April 20, 2 | 2004-04-20 |
Polishing method and polishing apparatus Grant 6,695,682 - Sato , et al. February 24, 2 | 2004-02-24 |
Method for producing semiconductor device polishing apparatus, and polishing method Grant 6,693,036 - Nogami , et al. February 17, 2 | 2004-02-17 |
Method of electroless plating and electroless plating apparatus Grant 6,638,564 - Segawa , et al. October 28, 2 | 2003-10-28 |
Methods of producing and polishing semiconductor device and polishing apparatus App 20030114004 - Sato, Shuzo ;   et al. | 2003-06-19 |
Polishing method and electropolishing apparatus App 20030104762 - Sato, Shuzo ;   et al. | 2003-06-05 |
Electro-chemical machining apparatus App 20020160698 - Sato, Shuzo ;   et al. | 2002-10-31 |
Polishing apparatus Grant 6,428,389 - Sato , et al. August 6, 2 | 2002-08-06 |
Polishing method and polishing apparatus App 20020072309 - Sato, Shuzo ;   et al. | 2002-06-13 |
Polishing method, polishing apparatus, plating method, and plating apparatus App 20020070126 - Sato, Shuzo ;   et al. | 2002-06-13 |
Flattening polishing device and flattening polishing method Grant 6,386,956 - Sato , et al. May 14, 2 | 2002-05-14 |
Method of electroless plating and electroless plating apparatus App 20020036143 - Segawa, Yuji ;   et al. | 2002-03-28 |
Polishing method and polishing apparatus App 20020022438 - Sato, Shuzo ;   et al. | 2002-02-21 |
Methods of producing and polishing semiconductor device and polishing apparatus App 20010036746 - Sato, Shuzo ;   et al. | 2001-11-01 |
Polishing apparatus App 20010034186 - Sato, Shuzo ;   et al. | 2001-10-25 |
Polishing apparatus Grant 6,280,292 - Sato , et al. August 28, 2 | 2001-08-28 |
Polishing method, abrasive material, and polishing apparatus Grant 6,039,631 - Sato , et al. March 21, 2 | 2000-03-21 |
Apparatus for correcting and holding front surface of sheet Grant 5,812,407 - Sato , et al. September 22, 1 | 1998-09-22 |
Optical pick-up and light detecting cover therefor Grant 5,727,111 - Kume , et al. March 10, 1 | 1998-03-10 |