| Patent | Date |
|---|
Shallow Trench Isolation Filling Structure In Semiconductor Device
App 20220293454 - Sato; Nobuyoshi | 2022-09-15 |
Method for manufacturing imprinting template substrate, imprinting template substrate, imprinting template, and method for manufacturing semiconductor apparatus
Grant 10,816,896 - Sato October 27, 2 | 2020-10-27 |
Imprinting template substrate, method for manufacturing the same, imprinting template substrate manufacturing apparatus, and method for manufacturing semiconductor apparatus
Grant 10,359,697 - Sato July 23, 2 | 2019-07-23 |
Method for processing substrate including forming a film on a silicon-containing surface of the substrate to prevent resist from extruding from the substrate during an imprinting process
Grant 10,249,545 - Sato | 2019-04-02 |
Substrate Processing Device And Shielding Plate
App 20190062905 - SATO; Nobuyoshi | 2019-02-28 |
Method For Manufacturing Imprinting Template Substrate, Imprinting Template Substrate, Imprinting Template, And Method For Manufacturing Semiconductor Apparatus
App 20170038677 - SATO; Nobuyoshi | 2017-02-09 |
Method For Processing Substrate
App 20170040231 - SATO; Nobuyoshi | 2017-02-09 |
Imprinting Template Substrate, Method For Manufacturing The Same, Imprinting Template Substrate Manufacturing Apparatus, And Method For Manufacturing Semiconductor Apparatus
App 20170040161 - SATO; Nobuyoshi | 2017-02-09 |
Equipment And Method For Producing Crystal By Vertical Boat Method
App 20140109825 - SASABE; Hiroshi ; et al. | 2014-04-24 |
Thin film forming apparatus and method
Grant 8,435,353 - Sato May 7, 2 | 2013-05-07 |
Method For Improving The Quality Of Bread, Etc.
App 20130108736 - Ishihara; Eisuke ; et al. | 2013-05-02 |
Substrate Processing Apparatus And Film Forming System
App 20120137973 - SATO; Nobuyoshi | 2012-06-07 |
Thin Film Forming Apparatus And Method
App 20110306217 - SATO; Nobuyoshi | 2011-12-15 |
Etching Method, Method For Manufacturing Microstructure, And Etching Apparatus
App 20110143549 - TANGE; Makiko ; et al. | 2011-06-16 |
Method for treating the surface of object and apparatus thereof
Grant 7,857,952 - Yoshida , et al. December 28, 2 | 2010-12-28 |
Thickness measuring device for vessel steel plate
Grant 7,854,168 - Sato , et al. December 21, 2 | 2010-12-21 |
Method for activating surface of base material and apparatus thereof
Grant 7,736,442 - Yoshida , et al. June 15, 2 | 2010-06-15 |
Thickness measuring device for vessel steel plate
App 20090114025 - Sato; Nobuyoshi ; et al. | 2009-05-07 |
Device for measuring thickness of vessel steel plate
Grant 7,513,161 - Sato , et al. April 7, 2 | 2009-04-07 |
Method for activating surface of base material and apparatus thereof
App 20080251103 - Yoshida; Hideo ; et al. | 2008-10-16 |
Method for treating the surface of object and apparatus thereof
App 20080210554 - Yoshida; Hideo ; et al. | 2008-09-04 |
Substrate Laser Marking
App 20080135981 - Yamamoto; Haruhiko ; et al. | 2008-06-12 |
Substrate laser marking
Grant 7,371,659 - Yamamoto , et al. May 13, 2 | 2008-05-13 |
Method for treating the surface of object and apparatus thereof
Grant 7,323,096 - Yoshida , et al. January 29, 2 | 2008-01-29 |
Method for activating surface of base material and apparatus thereof
Grant 7,300,527 - Yoshida , et al. November 27, 2 | 2007-11-27 |
System for diagnosing facility apparatus, managing apparatus and diagnostic apparatus
Grant 7,143,011 - Yoshie , et al. November 28, 2 | 2006-11-28 |
System for diagnosing facility apparatus, managing apparatus and diagnostic apparatus
Grant 7,139,681 - Yoshie , et al. November 21, 2 | 2006-11-21 |
Device for measuring thickness of vessel steel plate
App 20060169022 - Sato; Nobuyoshi ; et al. | 2006-08-03 |
Apparatus, system, and method for reducing integrated circuit peeling
App 20060170076 - Sato; Nobuyoshi | 2006-08-03 |
System for diagnosing a facility apparatus
Grant 7,085,684 - Yoshie , et al. August 1, 2 | 2006-08-01 |
System for diagnosing facility apparatus, managing apparatus and diagnostic apparatus
App 20060129358 - Yoshie; Osamu ; et al. | 2006-06-15 |
System for diagnosing facility apparatus, managing apparatus and diagnostic apparatus
App 20060116836 - Yoshie; Osamu ; et al. | 2006-06-01 |
Method of manufacturing superconducting quantum interference type magnetic fluxmeter
Grant 6,830,775 - Kawachi , et al. December 14, 2 | 2004-12-14 |
Method Of Manufacturing Superconducting Quantum Interference Type Magnetic Fluxmeter
App 20040234680 - Kawachi, Masaharu ; et al. | 2004-11-25 |
Method for treating the surface of object and apparatus thereof
App 20040045837 - Yoshida, Hideo ; et al. | 2004-03-11 |
Thickness measuring device for cylindrical tank bottom plate
Grant 6,691,576 - Sato , et al. February 17, 2 | 2004-02-17 |
Method for activating surface of base material and apparatus thereof
App 20040011658 - Yoshida, Hideo ; et al. | 2004-01-22 |
System for diagnosing facility apparatus, managing apparatus and diagnostic apparatus
App 20030135349 - Yoshie, Osamu ; et al. | 2003-07-17 |
Method of manufacturing insulating film of semiconductor device and apparatus for carrying out the same
Grant 5,605,867 - Sato , et al. February 25, 1 | 1997-02-25 |
Method of chemical mechanical polishing planarization of an insulating film using an etching stop
Grant 5,532,191 - Nakano , et al. July 2, 1 | 1996-07-02 |
Method of forming interlayer-insulating film using ozone and organic silanes at a pressure above atmospheric
Grant 5,290,736 - Sato , et al. March 1, 1 | 1994-03-01 |
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