Sato; Mitsuya

Patent Applications and Registrations

Patent applications and USPTO patent grants for Sato; Mitsuya.The latest application filed is for "position detector and exposure apparatus".

Company Profile

0.24.17

Sato; Mitsuya - Yokohama JP
Sato; Mitsuya - Yokohama-shi JP
Sato; Mitsuya - Kanagawa JP
Sato; Mitsuya - Tokyo JP
Sato, Mitsuya - Kanagawa-ken JP
Sato; Mitsuya - Kokubunji JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Position detector and exposure apparatus Grant 8,278,616 - Sato October 2, 2	2012-10-02
Planar motor and stage using the same Grant 7,898,119 - Sato March 1, 2	2011-03-01
Position Detector And Exposure Apparatus App 20100227263 - Sato; Mitsuya	2010-09-09
Planar pulse motor, exposure apparatus, and device manufacturing method Grant 7,772,727 - Sato August 10, 2	2010-08-10
Exposure Apparatus And Method Of Manufacturing Device App 20090310108 - Sato; Mitsuya	2009-12-17
Pulse Motor, Positioning Apparatus, Exposure Apparatus, And Device Manufacturing Method App 20090290138 - Sato; Mitsuya	2009-11-26
Planar Motor, Positioning Apparatus, Exposure Apparatus, And Device Manufacturing Method App 20090268191 - Sato; Mitsuya	2009-10-29
Exposure apparatus Grant 7,551,264 - Sato June 23, 2	2009-06-23
Planar Motor And Stage Using The Same App 20090140582 - Sato; Mitsuya	2009-06-04
Planar Pulse Motor, Exposure Apparatus, And Device Manufacturing Method App 20090033158 - Sato; Mitsuya	2009-02-05
Exposure Apparatus App 20070291242 - SATO; Mitsuya	2007-12-20
Exposure apparatus Grant 7,245,349 - Sato July 17, 2	2007-07-17
Information storage output system and information storage output service Grant 7,228,339 - Yamamoto , et al. June 5, 2	2007-06-05
Exposure apparatus App 20060227313 - Sato; Mitsuya	2006-10-12
Exposure apparatus Grant 7,079,222 - Sato July 18, 2	2006-07-18
Exposure Apparatus App 20060126051 - Sato; Mitsuya	2006-06-15
Exposure apparatus Grant 7,050,153 - Sato May 23, 2	2006-05-23
Exposure apparatus Grant 7,009,683 - Sato March 7, 2	2006-03-07
Exposure Apparatus App 20060017897 - Sato; Mitsuya	2006-01-26
Exposure apparatus and exposure method Grant 6,888,618 - Sato May 3, 2	2005-05-03
Light source, light source generation control method, exposure apparatus and maintenance method therefor, and semiconductor device manufacturing method and semiconductor production facility Grant 6,862,079 - Sato March 1, 2	2005-03-01
Exposure apparatus App 20040227925 - Sato, Mitsuya	2004-11-18
Exposure apparatus and method, device manufacturing method, and discharge lamp Grant 6,771,353 - Sato August 3, 2	2004-08-03
Information storage input system, information storage input service and screen display system App 20030217103 - Yamamoto, Hiroshi ; et al.	2003-11-20
Membership information integrated management system, and membership information integrated management service App 20030154145 - Yamamoto, Hiroshi ; et al.	2003-08-14
Information storage output system and information storage output service App 20030093490 - Yamamoto, Hiroshi ; et al.	2003-05-15
Light source, light source generation control method, exposure apparatus and maintenance method therefor, and semiconductor device manufacturing method and semiconductor production facility App 20030090643 - Sato, Mitsuya	2003-05-15
Exposure Apparatus And Exposure Method App 20030002021 - SATO, MITSUYA	2003-01-02
Exposure apparatus and method, device manufacturing method, and discharge lamp App 20020024649 - Sato, Mitsuya	2002-02-28
Interlocking apparatus Grant 6,166,505 - Sato December 26, 2	2000-12-26
Scanning type exposure apparatus and method and device manufacturing method Grant 5,608,492 - Sato March 4, 1	1997-03-04
Alignment method in a wafer prober Grant 4,934,064 - Yamaguchi , et al. June 19, 1	1990-06-19
Wafer prober Grant 4,929,893 - Sato , et al. May 29, 1	1990-05-29
Alignment method Grant 4,870,288 - Abuku , et al. September 26, 1	1989-09-26
Wafer prober Grant 4,864,227 - Sato September 5, 1	1989-09-05
Wafer handling apparatus and method Grant 4,789,294 - Sato , et al. December 6, 1	1988-12-06
Wafer prober and a probe card to be used therewith Grant 4,755,747 - Sato July 5, 1	1988-07-05
Wafer prober Grant 4,677,474 - Sato , et al. June 30, 1	1987-06-30
I.sup.2 L circuitry having operating current supplied by higher-voltage circuitry fabricated on same chip Grant 4,543,499 - Kaneko , et al. September 24, 1	1985-09-24
Projection exposure apparatus Grant 4,496,239 - Isohata , et al. January 29, 1	1985-01-29
Synchronizing detector circuit Grant 3,961,360 - Sato , et al. June 1, 1	1976-06-01

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