SATO; Mitsugu
Patent Applications and Registrations
Patent applications and USPTO patent grants for SATO; Mitsugu.The latest application filed is for "cooling device".
Company Profile
2.122.116
- SATO; Mitsugu - Ehime JP
- Sato; Mitsugu - Tokyo JP
- Sato; Mitsugu - Hitachinaka N/A JP
- Sato; Mitsugu - Fukushima JP
- Sato; Mitsugu - Hitachinaka-shi JP
- Sato; Mitsugu - Katsuta JP
Patent Activity
| Patent | Date |
|---|---|
| Cooling Device App 20210199357 - NISHIMURA; Takumi ; et al. | 2021-07-01 |
| Charged particle beam device, sample observation method, sample platform, observation system, and light emitting member Grant 10,241,062 - Ominami , et al. | 2019-03-26 |
| Method for adjusting charged particle beam device and adjusting beam aperture based on a selected emission condition and charged particle beam device for same Grant 10,176,968 - Shigeto , et al. J | 2019-01-08 |
| Charged particle beam apparatus, specimen observation system and operation program Grant 10,020,163 - Konishi , et al. July 10, 2 | 2018-07-10 |
| Charged particle beam apparatus, specimen observation system and operation program Grant 9,792,832 - Konishi , et al. October 17, 2 | 2017-10-17 |
| Charged Particle Beam Apparatus, Specimen Observation System And Operation Program App 20160343542 - KONISHI; Yayoi ; et al. | 2016-11-24 |
| Charged particle beam apparatus, specimen observation system and operation program Grant 9,443,694 - Konishi , et al. September 13, 2 | 2016-09-13 |
| Charged Particle Beam Device and Method for Adjusting Charged Particle Beam Device App 20160118218 - SHIGETO; Kunji ; et al. | 2016-04-28 |
| Charged Particle Beam Device, Sample Observation Method, Sample Platform, Observation System, and Light Emitting Member App 20160025659 - OMINAMI; Yusuke ; et al. | 2016-01-28 |
| Charged particle beam apparatus Grant 9,208,995 - Ominami , et al. December 8, 2 | 2015-12-08 |
| Charged particle radiation device with bandpass detection Grant 9,202,667 - Hatano , et al. December 1, 2 | 2015-12-01 |
| Device for correcting diffraction aberration of electron beam Grant 9,123,501 - Fukuda , et al. September 1, 2 | 2015-09-01 |
| Charged particle beam apparatus Grant 9,058,957 - Shigeto , et al. June 16, 2 | 2015-06-16 |
| Scanning electron microscope Grant 9,040,911 - Ogashiwa , et al. May 26, 2 | 2015-05-26 |
| Scanning Electron Microscope App 20150108351 - Ogashiwa; Takeshi ; et al. | 2015-04-23 |
| Charged Particle Beam Apparatus, Specimen Observation System And Operation Program App 20150076348 - Konishi; Yayoi ; et al. | 2015-03-19 |
| Charged Particle Beam Apparatus, Specimen Observation System And Operation Program App 20150074523 - Konishi; Yayoi ; et al. | 2015-03-12 |
| Charged Particle Beam Apparatus App 20150014530 - Ominami; Yusuke ; et al. | 2015-01-15 |
| Charged Particle Beam Apparatus App 20140131590 - Shigeto; Kunji ; et al. | 2014-05-15 |
| Device For Correcting Diffraction Aberration Of Electron Beam App 20140124664 - Fukuda; Muneyuki ; et al. | 2014-05-08 |
| Charged particle beam apparatus Grant 8,629,395 - Morishita , et al. January 14, 2 | 2014-01-14 |
| Method and an apparatus of an inspection system using an electron beam Grant 8,604,430 - Iwabuchi , et al. December 10, 2 | 2013-12-10 |
| Electron beam apparatus and electron beam inspection method Grant 8,431,893 - Fukuda , et al. April 30, 2 | 2013-04-30 |
| Charged Particle Radiation Device App 20130043388 - Hatano; Michio ; et al. | 2013-02-21 |
| Charged Particle Beam Apparatus App 20120298864 - Morishita; Hideo ; et al. | 2012-11-29 |
| Defect inspection and charged particle beam apparatus Grant 8,304,723 - Agemura , et al. November 6, 2 | 2012-11-06 |
| Charged particle beam equipment and charged particle microscopy Grant 8,304,722 - Inada , et al. November 6, 2 | 2012-11-06 |
| Battery charger Grant 8,299,760 - Sato October 30, 2 | 2012-10-30 |
| Electron Beam Apparatus and Electron Beam Inspection Method App 20120261574 - Fukuda; Muneyuki ; et al. | 2012-10-18 |
| Scanning electron microscope and method of imaging an object by using the scanning electron microscope Grant 8,222,601 - Tachibana , et al. July 17, 2 | 2012-07-17 |
| Scanning electron microscope Grant 8,217,363 - Hatano , et al. July 10, 2 | 2012-07-10 |
| Electron beam apparatus and electron beam inspection method Grant 8,207,498 - Fukuda , et al. June 26, 2 | 2012-06-26 |
| Charged particle beam apparatus and methods for capturing images using the same Grant 8,207,512 - Shishido , et al. June 26, 2 | 2012-06-26 |
| Method And An Apparatus Of An Inspection System Using An Electron Beam App 20120132801 - IWABUCHI; Yuko ; et al. | 2012-05-31 |
| Inspection method and inspection system using charged particle beam Grant 8,153,969 - Fukada , et al. April 10, 2 | 2012-04-10 |
| Scanning electron microscope Grant 8,153,970 - Kitsuki , et al. April 10, 2 | 2012-04-10 |
| Method and apparatus of an inspection system using an electron beam Grant 8,134,125 - Iwabuchi , et al. March 13, 2 | 2012-03-13 |
| Charged particle beam apparatus and dimension measuring method Grant 8,030,614 - Sato , et al. October 4, 2 | 2011-10-04 |
| Charged particle beam apparatus and method for charged particle beam adjustment Grant 8,026,491 - Ogashiwa , et al. September 27, 2 | 2011-09-27 |
| Charged particle beam apparatus and dimension measuring method Grant 7,973,282 - Sato , et al. July 5, 2 | 2011-07-05 |
| Charged particle beam device Grant 7,964,845 - Tanba , et al. June 21, 2 | 2011-06-21 |
| Charged Particel Beam Apparatus And Methods For Capturing Images Using The Same App 20110133080 - SHISHIDO; Chie ; et al. | 2011-06-09 |
| Charged particle beam apparatus for forming a specimen image Grant 7,956,324 - Takahashi , et al. June 7, 2 | 2011-06-07 |
| Electron Beam Apparatus And Electron Beam Inspection Method App 20110101223 - Fukuda; Muneyuki ; et al. | 2011-05-05 |
| Scanning Electron Microscope And Method Of Imaging An Object By Using The Scanning Electron Microscope App 20110095184 - TACHIBANA; Ichiro ; et al. | 2011-04-28 |
| Charged particle beam apparatus and sample manufacturing method Grant 7,928,377 - Ishitani , et al. April 19, 2 | 2011-04-19 |
| Charged particle beam equipment Grant 7,923,701 - Inada , et al. April 12, 2 | 2011-04-12 |
| Scanning electron microscope and method of imaging an object by using the scanning electron microscope Grant 7,888,640 - Tachibana , et al. February 15, 2 | 2011-02-15 |
| Electron beam apparatus and electron beam inspection method Grant 7,875,849 - Fukuda , et al. January 25, 2 | 2011-01-25 |
| Scanning Electron Microscope App 20100320385 - KITSUKI; Hirohiko ; et al. | 2010-12-23 |
| Monochromator and scanning electron microscope using the same Grant 7,838,827 - Ose , et al. November 23, 2 | 2010-11-23 |
| Charged particle beam apparatus and specimen holder Grant 7,812,310 - Tanaka , et al. October 12, 2 | 2010-10-12 |
| Charged particle beam apparatus and methods for capturing images using the same Grant 7,807,980 - Shishido , et al. October 5, 2 | 2010-10-05 |
| Scanning electron microscope Grant 7,807,966 - Kitsuki , et al. October 5, 2 | 2010-10-05 |
| Image evaluation method and microscope Grant 7,805,023 - Ishitani , et al. September 28, 2 | 2010-09-28 |
| Method of forming a sample image and charged particle beam apparatus Grant 7,800,059 - Sato , et al. September 21, 2 | 2010-09-21 |
| Battery Charger App 20100225281 - Sato; Mitsugu | 2010-09-09 |
| Defect Inspection And Charged Particle Beam Apparatus App 20100187416 - AGEMURA; Toshihide ; et al. | 2010-07-29 |
| Electron lens and charged particle beam apparatus Grant 7,759,652 - Ohshima , et al. July 20, 2 | 2010-07-20 |
| Substrate Processing Apparatus App 20100168909 - Sato; Mitsugu ; et al. | 2010-07-01 |
| Electron beam device Grant 7,745,787 - Kamiya , et al. June 29, 2 | 2010-06-29 |
| Charged particle beam apparatus Grant 7,718,976 - Kawasaki , et al. May 18, 2 | 2010-05-18 |
| Charged particle beam apparatus Grant 7,714,289 - Sasaki , et al. May 11, 2 | 2010-05-11 |
| Defect inspection and charged particle beam apparatus Grant 7,705,303 - Agemura , et al. April 27, 2 | 2010-04-27 |
| Method and apparatus for scanning and measurement by electron beam Grant 7,655,906 - Cheng , et al. February 2, 2 | 2010-02-02 |
| Charged particle beam apparatus Grant 7,642,514 - Takane , et al. January 5, 2 | 2010-01-05 |
| Charged Particle Beam Apparatus And Dimension Measuring Method App 20090314938 - Sato; Mitsugu ; et al. | 2009-12-24 |
| Charged particle beam apparatus Grant 7,633,063 - Takane , et al. December 15, 2 | 2009-12-15 |
| Charged particle beam apparatus Grant 7,615,765 - Katagiri , et al. November 10, 2 | 2009-11-10 |
| Charged particle beam alignment method and charged particle beam apparatus Grant 7,605,381 - Sato , et al. October 20, 2 | 2009-10-20 |
| Charged particle beam equipment App 20090242794 - Inada; Hiromi ; et al. | 2009-10-01 |
| Charged particle beam apparatus Grant 7,582,885 - Katagiri , et al. September 1, 2 | 2009-09-01 |
| Inspection Method And Inspection System Using Charged Particle Beam App 20090184255 - FUKADA; Atsuko ; et al. | 2009-07-23 |
| Charged Particle Application Apparatus App 20090101817 - OHSHIMA; Takashi ; et al. | 2009-04-23 |
| Charged Particle Beam Equipment And Charged Particle Microscopy App 20090084955 - Inada; Hiromi ; et al. | 2009-04-02 |
| Scanning electron microscope and apparatus for detecting defect Grant 7,504,626 - Tachibana , et al. March 17, 2 | 2009-03-17 |
| Electron microscope application apparatus and sample inspection method Grant 7,501,625 - Koyama , et al. March 10, 2 | 2009-03-10 |
| Method And Apparatus Of An Inspection System Using An Electron Beam App 20090057556 - Iwabuchi; Yuko ; et al. | 2009-03-05 |
| Charged particle beam device App 20090050803 - Tanba; Yuusuke ; et al. | 2009-02-26 |
| Scanning Electron Microscope App 20090050805 - Kitsuki; Hirohiko ; et al. | 2009-02-26 |
| Electron beam apparatus Grant 7,491,933 - Sato , et al. February 17, 2 | 2009-02-17 |
| Charged particle beam apparatus and specimen holder App 20080315097 - Tanaka; Hiroyuki ; et al. | 2008-12-25 |
| Scanning Electron Microscope And Method Of Imaging An Object By Using The Scanning Electron Microscope App 20080310704 - TACHIBANA; Ichiro ; et al. | 2008-12-18 |
| Charged particle beam apparatus App 20080302962 - Takahashi; Noritsugu ; et al. | 2008-12-11 |
| Inspection method and inspection system using charged particle beam Grant 7,462,828 - Fukada , et al. December 9, 2 | 2008-12-09 |
| Charged particle beam device with DF-STEM image valuation method Grant 7,459,683 - Araki , et al. December 2, 2 | 2008-12-02 |
| Electron beam device App 20080290275 - Kamiya; Chisato ; et al. | 2008-11-27 |
| Charged particle beam device Grant 7,456,403 - Tanba , et al. November 25, 2 | 2008-11-25 |
| Inspection method and inspection apparatus using charged particle beam Grant 7,449,690 - Nishiyama , et al. November 11, 2 | 2008-11-11 |
| Charged particle beam apparatus App 20080272300 - Sasaki; Yuko ; et al. | 2008-11-06 |
| Scanning electron microscope Grant 7,442,929 - Kitsuki , et al. October 28, 2 | 2008-10-28 |
| Method and an apparatus of an inspection system using an electron beam Grant 7,439,506 - Iwabuchi , et al. October 21, 2 | 2008-10-21 |
| Charged particle beam equipment and charged particle microscopy Grant 7,435,957 - Inada , et al. October 14, 2 | 2008-10-14 |
| Scanning electron microscope App 20080237465 - Hatano; Michio ; et al. | 2008-10-02 |
| Monochromator and scanning electron microscope using the same App 20080237463 - Ose; Yoichi ; et al. | 2008-10-02 |
| Charged particle beam apparatus Grant 7,425,702 - Sasaki , et al. September 16, 2 | 2008-09-16 |
| Method of forming a sample image and charged particle beam apparatus App 20080217535 - Sato; Mitsugu ; et al. | 2008-09-11 |
| Charged particle beam apparatus and charged particle beam irradiation method Grant 7,408,172 - Sato , et al. August 5, 2 | 2008-08-05 |
| Changed particle beam emitting device and method for adjusting the optical axis App 20080179536 - Sato; Mitsugu ; et al. | 2008-07-31 |
| Defect inspection and charged particle beam apparatus App 20080142712 - Agemura; Toshihide ; et al. | 2008-06-19 |
| Method and scanning electron microscope for measuring width of material on sample Grant 7,385,196 - Shimoma , et al. June 10, 2 | 2008-06-10 |
| Charged particle beam apparatus and specimen holder Grant 7,381,968 - Tanaka , et al. June 3, 2 | 2008-06-03 |
| Charged particle beam apparatus App 20080116376 - Takane; Atsushi ; et al. | 2008-05-22 |
| Charged particle beam equipment Grant 7,375,330 - Inada , et al. May 20, 2 | 2008-05-20 |
| Charged particle system and a method for measuring image magnification Grant 7,372,047 - Sato , et al. May 13, 2 | 2008-05-13 |
| Electron Beam Apparatus and Electron Beam Inspection Method App 20080099673 - Fukuda; Muneyuki ; et al. | 2008-05-01 |
| Charged particle beam apparatus and dimension measuring method App 20080100832 - Sato; Mitsugu ; et al. | 2008-05-01 |
| Method of forming a sample image and charged particle beam apparatus Grant 7,361,894 - Sato , et al. April 22, 2 | 2008-04-22 |
| Charged particle beam emitting device and method for adjusting the optical axis Grant 7,355,174 - Sato , et al. April 8, 2 | 2008-04-08 |
| Electron beam device Grant 7,355,177 - Kamiya , et al. April 8, 2 | 2008-04-08 |
| Defect inspection and charged particle beam apparatus Grant 7,348,559 - Agemura , et al. March 25, 2 | 2008-03-25 |
| Electron Lens and Charged Particle Beam Apparatus App 20080067396 - Ohshima; Takashi ; et al. | 2008-03-20 |
| Charged Particle Beam Apparatus App 20080067378 - Kawasaki; Takeshi ; et al. | 2008-03-20 |
| Image evaluation method and microscope Grant 7,340,111 - Ishitani , et al. March 4, 2 | 2008-03-04 |
| Charged particle beam apparatus Grant 7,339,167 - Ohshima , et al. March 4, 2 | 2008-03-04 |
| Charged Particle Beam Apparatus And Charged Particle Beam Irradiation Method App 20080042074 - SATO; MITSUGU ; et al. | 2008-02-21 |
| Charged particle beam apparatus Grant 7,329,868 - Takane , et al. February 12, 2 | 2008-02-12 |
| Monochromator and scanning electron microscope using the same Grant 7,315,024 - Ose , et al. January 1, 2 | 2008-01-01 |
| Charged particle beam apparatus and method for charged particle beam adjustment App 20070284542 - Ogashiwa; Takeshi ; et al. | 2007-12-13 |
| Image evaluation method and microscope App 20070280559 - Ishitani; Tohru ; et al. | 2007-12-06 |
| Charged particle beam apparatus and charged particle beam irradiation method Grant 7,282,722 - Sato , et al. October 16, 2 | 2007-10-16 |
| Charged particle beam device App 20070235645 - Tanba; Yuusuke ; et al. | 2007-10-11 |
| Method and an apparatus of an inspection system using an electron beam App 20070215803 - Iwabuchi; Yuko ; et al. | 2007-09-20 |
| Scanning electron microscope and apparatus for detecting defect App 20070187598 - Tachibana; Ichiro ; et al. | 2007-08-16 |
| Charged particle beam apparatus and methods for capturing images using the same App 20070164219 - Shishido; Chie ; et al. | 2007-07-19 |
| Image evaluation method and microscope Grant 7,236,651 - Ishitani , et al. June 26, 2 | 2007-06-26 |
| Method and an apparatus of an inspection system using an electron beam Grant 7,232,996 - Iwabuchi , et al. June 19, 2 | 2007-06-19 |
| Charged particle beam apparatus App 20070120065 - Takane; Atsushi ; et al. | 2007-05-31 |
| Charged particle beam apparatus App 20070102650 - Katagiri; Souichi ; et al. | 2007-05-10 |
| Charged particle beam apparatus and dimension measuring method Grant 7,214,936 - Sato , et al. May 8, 2 | 2007-05-08 |
| Charged particle beam device with DF-STEM image valuation method App 20070085007 - Araki; Mine ; et al. | 2007-04-19 |
| Scanning charged-particle microscope Grant 7,186,975 - Ishitani , et al. March 6, 2 | 2007-03-06 |
| Method and apparatus for scanning and measurement by electron beam App 20070040118 - Cheng; Zhaohui ; et al. | 2007-02-22 |
| Method of forming a sample image and charged particle beam apparatus App 20070029478 - Sato; Mitsugu ; et al. | 2007-02-08 |
| Charged particle beam apparatus App 20070023657 - Takane; Atsushi ; et al. | 2007-02-01 |
| Method of forming a sample image and charged particle beam apparatus Grant 7,164,126 - Sato , et al. January 16, 2 | 2007-01-16 |
| Electron microscope application apparatus and sample inspection method App 20060289755 - Koyama; Hikaru ; et al. | 2006-12-28 |
| Defect inspection and changed particle beam apparatus App 20060284087 - Agemura; Toshihide ; et al. | 2006-12-21 |
| Electron beam device App 20060284093 - Kamiya; Chisato ; et al. | 2006-12-21 |
| Inspection method and inspection system using charged particle beam App 20060243906 - Fukada; Atsuko ; et al. | 2006-11-02 |
| Charged particle beam apparatus App 20060231773 - Katagiri; Souichi ; et al. | 2006-10-19 |
| Scanning electron microscope App 20060226362 - Kitsuki; Hirohiko ; et al. | 2006-10-12 |
| Charged particle beam equipment App 20060219908 - Inada; Hiromi ; et al. | 2006-10-05 |
| Monochromator and scanning electron microscope using the same App 20060219910 - Ose; Yoichi ; et al. | 2006-10-05 |
| Charged particle beam apparatus, method of displaying sample image, and method of measuring image shift sensitivity App 20060219907 - Ogashiwa; Takeshi ; et al. | 2006-10-05 |
| Defect inspection and charged particle beam apparatus Grant 7,112,792 - Agemura , et al. September 26, 2 | 2006-09-26 |
| Charged particle beam apparatus Grant 7,109,485 - Takane , et al. September 19, 2 | 2006-09-19 |
| Electron beam device Grant 7,105,816 - Kamiya , et al. September 12, 2 | 2006-09-12 |
| Inspection method and inspection apparatus using charged particle beam App 20060186351 - Nishiyama; Hidetoshi ; et al. | 2006-08-24 |
| Charged particle beam equipment and charged particle microscopy App 20060151697 - Inada; Hiromi ; et al. | 2006-07-13 |
| Method and an apparatus of an inspection system using an electron beam App 20060151699 - Iwabuchi; Yuko ; et al. | 2006-07-13 |
| Scanning electron microscope Grant 7,075,078 - Ose , et al. July 11, 2 | 2006-07-11 |
| Charged particle beam apparatus and sample manufacturing method App 20060097166 - Ishitani; Tohru ; et al. | 2006-05-11 |
| Method of forming a sample image and charged particle beam apparatus Grant 7,034,296 - Sato , et al. April 25, 2 | 2006-04-25 |
| Charged particle beam apparatus App 20060076489 - Ohshima; Takashi ; et al. | 2006-04-13 |
| Charged particle beam apparatus and dimension measuring method App 20060071166 - Sato; Mitsugu ; et al. | 2006-04-06 |
| Monochromator and scanning electron microscope using the same Grant 7,022,983 - Ose , et al. April 4, 2 | 2006-04-04 |
| Method and an apparatus of an inspection system using an electron beam Grant 7,012,252 - Iwabuchi , et al. March 14, 2 | 2006-03-14 |
| Electron beam apparatus App 20060016992 - Sato; Mitsugu ; et al. | 2006-01-26 |
| Method and an apparatus of an inspection system using an electron beam Grant 6,987,265 - Iwabuchi , et al. January 17, 2 | 2006-01-17 |
| Charged particle beam emitting device and method for adjusting the optical axis App 20050285036 - Sato, Mitsugu ; et al. | 2005-12-29 |
| Scanning electron microscope Grant 6,979,821 - Suzuki , et al. December 27, 2 | 2005-12-27 |
| Defect inspection and charged particle beam apparatus App 20050263702 - Agemura, Toshihide ; et al. | 2005-12-01 |
| Charged particle beam apparatus and charged particle beam irradiation method App 20050253083 - Sato, Mitsugu ; et al. | 2005-11-17 |
| Scanning electron microscope and sample observing method using it Grant 6,963,067 - Takeuchi , et al. November 8, 2 | 2005-11-08 |
| Charged particle beam device Grant 6,963,069 - Tanba , et al. November 8, 2 | 2005-11-08 |
| Charged particle beam apparatus and specimen holder App 20050230636 - Tanaka, Hiroyuki ; et al. | 2005-10-20 |
| Charged particle beam apparatus and charged particle beam irradiation method Grant 6,956,211 - Sato , et al. October 18, 2 | 2005-10-18 |
| Method and an apparatus of an inspection system using an electron beam App 20050205782 - Iwabuchi, Yuko ; et al. | 2005-09-22 |
| Image evaluation method and microscope App 20050199811 - Ishitani, Tohru ; et al. | 2005-09-15 |
| Charged particle system and a method for measuring image magnification App 20050189501 - Sato, Mitsugu ; et al. | 2005-09-01 |
| Charged particle beam apparatus Grant 6,936,818 - Takane , et al. August 30, 2 | 2005-08-30 |
| Charged particle beam apparatus App 20050184237 - Takane, Atsushi ; et al. | 2005-08-25 |
| Scanning electron microscope App 20050139773 - Ose, Yoichi ; et al. | 2005-06-30 |
| Scanning electron microscope Grant 6,885,001 - Ose , et al. April 26, 2 | 2005-04-26 |
| Bio electron microscope and observation method of specimen Grant 6,875,984 - Kakibayashi , et al. April 5, 2 | 2005-04-05 |
| Charged particle beam alignment method and charged particle beam apparatus Grant 6,864,493 - Sato , et al. March 8, 2 | 2005-03-08 |
| Electron beam apparatus Grant 6,864,482 - Sato , et al. March 8, 2 | 2005-03-08 |
| Scanning electron microscope and sample observation method using the same Grant 6,855,931 - Sawahata , et al. February 15, 2 | 2005-02-15 |
| Method and scanning electron microscope for measuring width of material on sample App 20050006581 - Shimoma, Goroku ; et al. | 2005-01-13 |
| Method and apparatus for charged particle beam microscopy Grant 6,838,667 - Tsuneta , et al. January 4, 2 | 2005-01-04 |
| Charged particle beam device App 20040238752 - Tanba, Yuusuke ; et al. | 2004-12-02 |
| Electron beam apparatus App 20040227081 - Sato, Mitsugu ; et al. | 2004-11-18 |
| Charged particle beam apparatus App 20040222376 - Sasaki, Yuko ; et al. | 2004-11-11 |
| Scanning electron microscope App 20040188612 - Ose, Yoichi ; et al. | 2004-09-30 |
| Monochromator and scanning electron microscope using the same App 20040188607 - Ose, Yoichi ; et al. | 2004-09-30 |
| Scanning electron microscope and sample observing method using it App 20040188611 - Takeuchi, Shuichi ; et al. | 2004-09-30 |
| Scanning electron microscope and sample observation method using the same App 20040183016 - Sawahata, Tetsuya ; et al. | 2004-09-23 |
| Electron beam device App 20040183017 - Kamiya, Chisato ; et al. | 2004-09-23 |
| Method and scanning electron microscope for measuring dimension of material on sample Grant 6,791,084 - Shimoma , et al. September 14, 2 | 2004-09-14 |
| Scanning electron microscope Grant 6,787,772 - Ose , et al. September 7, 2 | 2004-09-07 |
| Bio electron microscope and observation method of specimen App 20040135083 - Kakibayashi, Hiroshi ; et al. | 2004-07-15 |
| Charged particle beam alignment method and charged particle beam apparatus App 20040124364 - Sato, Mitsugu ; et al. | 2004-07-01 |
| Charged particle beam apparatus and charged particle beam irradiation method App 20040119022 - Sato, Mitsugu ; et al. | 2004-06-24 |
| Scanning electron microscope App 20040113074 - Suzuki, Naomasa ; et al. | 2004-06-17 |
| Scanning electron microscope and sample observation method using the same Grant 6,740,877 - Sawahata , et al. May 25, 2 | 2004-05-25 |
| Charged particle beam apparatus App 20040069956 - Takane, Atsushi ; et al. | 2004-04-15 |
| Scanning electron microscope Grant 6,657,193 - Dan , et al. December 2, 2 | 2003-12-02 |
| Charged particle beam apparatus Grant 6,653,633 - Takane , et al. November 25, 2 | 2003-11-25 |
| Scanning electron microscope and sample observation method using the same App 20030189172 - Sawahata, Tetsuya ; et al. | 2003-10-09 |
| Apparatus and method for observing sample using electron beam Grant 6,627,889 - Ochiai , et al. September 30, 2 | 2003-09-30 |
| Method of forming a sample image and charged particle beam apparatus App 20030141451 - Sato, Mitsugu ; et al. | 2003-07-31 |
| Charged particle beam apparatus App 20030136907 - Takane, Atsushi ; et al. | 2003-07-24 |
| Scanning electron microscope App 20030122074 - Suzuki, Naomasa ; et al. | 2003-07-03 |
| Method of forming a sample image and charged particle beam apparatus App 20030111602 - Sato, Mitsugu ; et al. | 2003-06-19 |
| Apparatus and method for observing sample using electron beam App 20030089852 - Ochiai, Isao ; et al. | 2003-05-15 |
| Scanning electron microscope App 20030080293 - Dan, Yukari ; et al. | 2003-05-01 |
| Scanning electron microscope Grant 6,555,819 - Suzuki , et al. April 29, 2 | 2003-04-29 |
| Method and scanning electron microscope for measuring width of material on sample App 20030071214 - Shimoma, Goroku ; et al. | 2003-04-17 |
| Image-formation apparatus using charged particle beams under various focus conditions Grant 6,538,249 - Takane , et al. March 25, 2 | 2003-03-25 |
| Image evaluation method and microscope App 20030039386 - Ishitani, Tohru ; et al. | 2003-02-27 |
| Method and apparatus for inspecting patterns of a semiconductor device with an electron beam Grant 6,512,227 - Iwabuchi , et al. January 28, 2 | 2003-01-28 |
| Scanning electron microscope Grant 6,501,077 - Sawahata , et al. December 31, 2 | 2002-12-31 |
| Charged particle beam alignment method and charged particle beam apparatus App 20020179851 - Sato, Mitsugu ; et al. | 2002-12-05 |
| Method and an apparatus of an inspection system using an electron beam Grant 6,452,178 - Iwabuchi , et al. September 17, 2 | 2002-09-17 |
| Method and an apparatus of an inspection system using an electron beam App 20020092986 - Iwabuchi, Yuko ; et al. | 2002-07-18 |
| Scanning charged-particle microscope App 20020079448 - Ishitani, Tohru ; et al. | 2002-06-27 |
| Method and apparatus for charged particle beam microscopy App 20020056808 - Tsuneta, Ruriko ; et al. | 2002-05-16 |
| Method and apparatus for inspecting patterns of a semiconductor device with an electron beam App 20020024021 - Iwabuchi, Yuko ; et al. | 2002-02-28 |
| Method and an apparatus of an inspection system using an electron beam Grant 6,348,690 - Iwabuchi , et al. February 19, 2 | 2002-02-19 |
| Method and an apparatus of an inspection system using an electron beam App 20010030294 - Iwabuchi, Yuko ; et al. | 2001-10-18 |
| Scanning electron microscope App 20010010357 - Ose, Yoichi ; et al. | 2001-08-02 |
| Scanning electron microscope App 20010002698 - Iwabuchi, Yuko ; et al. | 2001-06-07 |
| Scanning electron microscope Grant 6,225,628 - Iwabuchi , et al. May 1, 2 | 2001-05-01 |
| Resolving power evaluation method and specimen for electron microscope Grant 6,166,380 - Kitagawa , et al. December 26, 2 | 2000-12-26 |
| Scanning electron microscope Grant 6,025,593 - Suzuki , et al. February 15, 2 | 2000-02-15 |
| Scanning electron microscope and its analogous device Grant 5,894,124 - Iwabuchi , et al. April 13, 1 | 1999-04-13 |
| Scanning electron microscope and speciman observation method thereby Grant 5,670,782 - Sato September 23, 1 | 1997-09-23 |
| Scanning electron microscope Grant 4,983,832 - Sato January 8, 1 | 1991-01-08 |
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