Patent | Date |
---|
Temperature setting method of heat processing plate, temperature setting apparatus of heat processing plate, program, and computer-readable recording medium recording program thereon Grant 8,874,254 - Iwanaga , et al. October 28, 2 | 2014-10-28 |
Temperature Setting Method Of Heat Processing Plate, Temperature Setting Apparatus Of Heat Processing Plate, Program, And Computer-readable Recording Medium Recording Program Thereon App 20110270465 - Iwanaga; Shuji ;   et al. | 2011-11-03 |
Temperature setting method of heat processing plate, temperature setting apparatus of heat processing plate, program, and computer-readable recording medium recording program thereon Grant 8,014,895 - Iwanaga , et al. September 6, 2 | 2011-09-06 |
Temperature measuring device using oscillating frequency signals Grant 7,977,609 - Sata , et al. July 12, 2 | 2011-07-12 |
Temperature Setting Method Of Heat Processing Plate, Temperature Setting Apparatus Of Heat Processing Plate, Program, And Computer-readable Recording Medium Recording Program Thereon App 20090254226 - Iwanaga; Shuji ;   et al. | 2009-10-08 |
Heat treatment apparatus Grant RE40,052 - Shirakawa , et al. February 12, 2 | 2008-02-12 |
Liquid processing apparatus processing a substrate surface with a processing liquid, liquid processing method, and liquid condition detection apparatus detecting fluctuation of the processing liquid Grant 7,316,515 - Terada , et al. January 8, 2 | 2008-01-08 |
Heat treatment apparatus and heat treatment method Grant 7,241,633 - Sata July 10, 2 | 2007-07-10 |
Substrate processing apparatus and substrate processing method Grant 7,049,553 - Shigetomi , et al. May 23, 2 | 2006-05-23 |
Liquid processing apparatus processing a substrate surface with a processing liquid, liquid processing method, and liquid condition detection apparatus detecting fluctuation of the processing liquid App 20060029388 - Terada; Shouichi ;   et al. | 2006-02-09 |
Heat treatment apparatus and heat treatment method App 20040266222 - Sata, Nobuyuki | 2004-12-30 |
Substrate processing apparatus and substrate processing method App 20040250762 - Shigetomi, Kenichi ;   et al. | 2004-12-16 |
Miniature motor App 20040007929 - Wakita, Tadayuki ;   et al. | 2004-01-15 |
Heat treatment apparatus Grant 6,450,803 - Shirakawa , et al. September 17, 2 | 2002-09-17 |
Heat treatment apparatus and substrate processing system Grant 6,380,518 - Shirakawa , et al. April 30, 2 | 2002-04-30 |
Heat treatment apparatus and substrate processing system App 20020000432 - Shirakawa, Eiichi ;   et al. | 2002-01-03 |
Heat treatment apparatus and substrate processing system Grant 6,291,800 - Shirakawa , et al. September 18, 2 | 2001-09-18 |
Heat treatment apparatus App 20010011653 - Shirakawa, Eiichi ;   et al. | 2001-08-09 |
Heat treatment apparatus Grant 6,222,161 - Shirakawa , et al. April 24, 2 | 2001-04-24 |
Heat treating apparatus Grant 6,191,394 - Shirakawa , et al. February 20, 2 | 2001-02-20 |
Miniature motor having a frequency generator Grant 5,070,269 - Tamaki , et al. December 3, 1 | 1991-12-03 |
Method and apparatus for controlling a group of elevators using fuzzy rules Grant 5,022,498 - Sasaki , et al. June 11, 1 | 1991-06-11 |