Patent | Date |
---|
Optical Interference Measuring Apparatus And Optical Interference Measuring Method App 20220228850 - MOMIYAMA; Homare ;   et al. | 2022-07-21 |
Optical Interference Measuring Apparatus And Optical Interference Measuring Method App 20220221266 - MOMIYAMA; Homare ;   et al. | 2022-07-14 |
Composition For Improving Renal Function In Renal Diseases Containing Molecular Hydrogen App 20210275575 - SATOH; Fumitake ;   et al. | 2021-09-09 |
Substrate Processing Apparatus And Substrate Processing Method App 20200344850 - YAMAGUCHI; Hirofumi ;   et al. | 2020-10-29 |
Substrate processing apparatus and method of transferring substrate Grant 10,720,356 - Nagakubo , et al. | 2020-07-21 |
Cooling mechanism and processing system Grant 10,256,128 - Kumagai , et al. | 2019-04-09 |
Substrate Processing Apparatus, Substrate Processing Method, And Computer Storage Medium App 20190096702 - SAKAI; Toshimitsu ;   et al. | 2019-03-28 |
Substrate Processing Apparatus And Method Of Transferring Substrate App 20180082881 - NAGAKUBO; Keiichi ;   et al. | 2018-03-22 |
Method for positioning a transfer unit, method for calculating positional deviation amount of an object to be processed, and method for correcting teaching data of the transfer unit Grant 9,541,920 - Kubodera , et al. January 10, 2 | 2017-01-10 |
Leakage Determining Method, Substrate Processing Apparatus And Storage Medium App 20160169766 - ISHIBASHI; Seiji ;   et al. | 2016-06-16 |
Cooling Mechanism And Processing System App 20150133044 - Kumagai; Keita ;   et al. | 2015-05-14 |
Method For Positioning A Transfer Unit, Method For Calculating Positional Deviation Amount Of An Object To Be Processed, And Method For Correcting Teaching Data Of The Transfer Unit App 20140107825 - KUBODERA; Masato ;   et al. | 2014-04-17 |
Film position adjusting method, memory medium and substrate processing system Grant 8,318,238 - Sasaki , et al. November 27, 2 | 2012-11-27 |
Load-lock Apparatus And Substrate Cooling Method App 20100326637 - Sasaki; Yoshiaki ;   et al. | 2010-12-30 |
Enclosure inspection method and apparatus thereof Grant 7,697,745 - Otani , et al. April 13, 2 | 2010-04-13 |
Film Position Adjusting Method, Memory Medium And Substrate Processing System App 20090087542 - Sasaki; Yoshiaki ;   et al. | 2009-04-02 |
Port structure in semiconductor processing system Grant 7,279,067 - Yoshida , et al. October 9, 2 | 2007-10-09 |
Enclosure inspection method and apparatus thereof App 20070009085 - Otani; Chiko ;   et al. | 2007-01-11 |
Substrate processing apparatus App 20060219171 - Sasaki; Yoshiaki ;   et al. | 2006-10-05 |
Mounting/demounting device for wafer carrier lid Grant 6,984,097 - Saeki , et al. January 10, 2 | 2006-01-10 |
Port structure in semiconductor processing system App 20050103270 - Yoshida, Tetsuo ;   et al. | 2005-05-19 |
Method for aligning conveying position of object processing system, and object processing system Grant 6,742,980 - Sasaki June 1, 2 | 2004-06-01 |
Device for attaching target substrate transfer container to semiconductor processing apparatus Grant 6,676,356 - Saeki , et al. January 13, 2 | 2004-01-13 |
Method for aligning conveying position of object processing system, and object processing system App 20020136629 - Sasaki, Yoshiaki | 2002-09-26 |
Device for attaching target substrate transfer container to semiconductor processing apparatus App 20020051701 - Saeki, Hiroaki ;   et al. | 2002-05-02 |
Semiconductor processing system and transfer apparatus for the same App 20020006323 - Yoshida, Tetsuo ;   et al. | 2002-01-17 |
Cart for mounting/demounting wafer transfer robot App 20010048871 - Sasaki, Yoshiaki ;   et al. | 2001-12-06 |
Controlling gas in a multichamber processing system Grant 6,224,679 - Sasaki , et al. May 1, 2 | 2001-05-01 |
Pouring repair material for mortar or the like wall Grant 4,482,382 - Kanayama , et al. November 13, 1 | 1984-11-13 |