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Patent applications and USPTO patent grants for Sasaki; Sumio.The latest application filed is for "apparatus and method for measuring energy spectrum of backscattered electrons".
Patent | Date |
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Apparatus and method for measuring energy spectrum of backscattered electrons Grant 11,322,332 - Kato , et al. May 3, 2 | 2022-05-03 |
Apparatus And Method For Measuring Energy Spectrum Of Backscattered Electrons App 20210012999 - KATO; Makoto ;   et al. | 2021-01-14 |
Secondary particle detection system of scanning electron microscope Grant 10,515,778 - Sasaki , et al. Dec | 2019-12-24 |
Method Of Detecting Defect Of Contact Hole App 20180330494 - TANAKA; Kazuto ;   et al. | 2018-11-15 |
Secondary Particle Detection System Of Scanning Electron Microscope App 20170271124 - SASAKI; Sumio ;   et al. | 2017-09-21 |
Mold structure and bumper Grant 9,039,052 - Seto , et al. May 26, 2 | 2015-05-26 |
Mold Structure And Bumper App 20120200097 - Seto; Hideyuki ;   et al. | 2012-08-09 |
Charged particle beam apparatus Grant 7,592,604 - Koike , et al. September 22, 2 | 2009-09-22 |
Charged particle beam apparatus App 20070246651 - Koike; Hirotami ;   et al. | 2007-10-25 |
Apparatus for repairing a pattern film Grant 4,851,097 - Hattori , et al. July 25, 1 | 1989-07-25 |
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