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Patent applications and USPTO patent grants for SASAKI; Nobutaka.The latest application filed is for "substrate support and substrate processing apparatus".
Patent | Date |
---|---|
Substrate Support And Substrate Processing Apparatus App 20220122816 - SASAKI; Nobutaka ;   et al. | 2022-04-21 |
Substrate Processing Apparatus And Gas Switching Method For Substrate Processing Apparatus App 20220059323 - SASAKI; Nobutaka | 2022-02-24 |
Substrate Processing Apparatus And Method Of Driving Relay Member App 20220037125 - SASAKI; Nobutaka ;   et al. | 2022-02-03 |
Shutter Mechanism And Substrate Processing Apparatus App 20210027994 - MOTEGI; Suguru ;   et al. | 2021-01-28 |
Plasma Processing Apparatus App 20200098550 - TAKAHASHI; Shuichi ;   et al. | 2020-03-26 |
Plasma processing apparatus and method for processing object Grant 10,264,630 - Yoshida , et al. | 2019-04-16 |
Substrate processing apparatus Grant 10,249,478 - Sasaki , et al. | 2019-04-02 |
Plasma processing method Grant 9,818,582 - Murakami , et al. November 14, 2 | 2017-11-14 |
Plasma Processing Method App 20160372308 - MURAKAMI; Hiraku ;   et al. | 2016-12-22 |
Plasma Processing Apparatus And Method For Processing Object App 20150245460 - YOSHIDA; Ryoichi ;   et al. | 2015-08-27 |
Plasma Processing Apparatus App 20150228462 - Yoshimura; Akihiro ;   et al. | 2015-08-13 |
Substrate Processing Apparatus App 20150179415 - SASAKI; Nobutaka ;   et al. | 2015-06-25 |
Substance including natural organic substance fine powder Grant 5,718,954 - Sano , et al. February 17, 1 | 1998-02-17 |
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