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Tunable Stressed Polycrystalline Silicon on Dielectrics in an Integrated Circuit
App 20150318394 - Hierlemann; Matthias ; et al. | 2015-11-05 |
Metal Oxide Nanoparticles And Photoresist Compositions
App 20150234272 - SARMA; Chandrasekhar ; et al. | 2015-08-20 |
Tunable stressed polycrystalline silicon on dielectrics in an integrated circuit
Grant 9,105,747 - Hierlemann , et al. August 11, 2 | 2015-08-11 |
Transistor level routing
Grant 8,846,462 - Ostermayr , et al. September 30, 2 | 2014-09-30 |
Lithography systems and methods of manufacturing using thereof
Grant 8,715,909 - Gutmann , et al. May 6, 2 | 2014-05-06 |
Method of forming a pattern of an array of shapes including a blocked region
Grant 8,492,079 - Chen , et al. July 23, 2 | 2013-07-23 |
Metrology systems and methods for lithography processes
Grant 8,394,574 - Sarma , et al. March 12, 2 | 2013-03-12 |
Alignment marks for polarized light lithography and method for use thereof
Grant 8,377,800 - Marokkey , et al. February 19, 2 | 2013-02-19 |
System and method for semiconductor device fabrication using modeling
Grant 8,359,562 - Sarma , et al. January 22, 2 | 2013-01-22 |
Semiconductor devices and methods of manufacturing thereof
Grant 8,349,528 - Lipinski , et al. January 8, 2 | 2013-01-08 |
Alignment Marks for Polarized Light Lithography and Method for Use Thereof
App 20120208341 - Marokkey; Sajan ; et al. | 2012-08-16 |
System and Method for Semiconductor Device Fabrication Using Modeling
App 20120179282 - Sarma; Chandrasekhar ; et al. | 2012-07-12 |
Alignment marks for polarized light lithography and method for use thereof
Grant 8,183,129 - Marokkey , et al. May 22, 2 | 2012-05-22 |
Transistor Level Routing
App 20120083108 - Ostermayr; Martin ; et al. | 2012-04-05 |
Metrology Systems and Methods for Lithography Processes
App 20120013884 - Sarma; Chandrasekhar ; et al. | 2012-01-19 |
Lithography masks and methods of manufacture thereof
Grant 8,071,261 - Gutmann , et al. December 6, 2 | 2011-12-06 |
Metrology systems and methods for lithography processes
Grant 8,067,135 - Sarma , et al. November 29, 2 | 2011-11-29 |
Semiconductor device having a polysilicon layer with a non-constant doping profile
Grant 8,063,406 - Zhuang , et al. November 22, 2 | 2011-11-22 |
Semiconductor Devices and Methods of Manufacturing Thereof
App 20110250530 - Lipinski; Matthias ; et al. | 2011-10-13 |
Semiconductor devices and methods of manufacturing thereof
Grant 8,007,985 - Lipinski , et al. August 30, 2 | 2011-08-30 |
Lithography masks and methods of manufacture thereof
Grant 7,947,431 - Sarma , et al. May 24, 2 | 2011-05-24 |
Tunable Stressed Polycrystalline Silicon on Dielectrics in an Integrated Circuit
App 20110089501 - Hierlemann; Matthias ; et al. | 2011-04-21 |
Method for Manufacturing a Semiconductor Device Having Doped and Undoped Polysilicon Layers
App 20110031563 - Zhuang; Haoren ; et al. | 2011-02-10 |
Tunable stressed polycrystalline silicon on dielectrics in an integrated circuit
Grant 7,863,130 - Hierlemann , et al. January 4, 2 | 2011-01-04 |
Method for manufacturing a semiconductor device having doped and undoped polysilicon layers
Grant 7,842,579 - Zhuang , et al. November 30, 2 | 2010-11-30 |
Lithography Masks and Methods of Manufacture Thereof
App 20100297398 - Sarma; Chandrasekhar ; et al. | 2010-11-25 |
Metrology Systems and Methods for Lithography Processes
App 20100283052 - Sarma; Chandrasekhar ; et al. | 2010-11-11 |
Method Of Forming A Pattern Of An Array Of Shapes Including A Blocked Region
App 20100272967 - Chen; Chia-Chen ; et al. | 2010-10-28 |
Lithography masks and methods of manufacture thereof
Grant 7,799,486 - Sarma , et al. September 21, 2 | 2010-09-21 |
Metrology systems and methods for lithography processes
Grant 7,794,903 - Sarma , et al. September 14, 2 | 2010-09-14 |
Alignment Marks for Polarized Light Lithography and Method for Use Thereof
App 20100128270 - Marokkey; Sajan ; et al. | 2010-05-27 |
Feature Dimension Control in a Manufacturing Process
App 20100120177 - Zhuang; Haoren ; et al. | 2010-05-13 |
Small feature integrated circuit fabrication
Grant 7,713,824 - Sarma , et al. May 11, 2 | 2010-05-11 |
Alignment marks for polarized light lithography and method for use thereof
Grant 7,687,925 - Marokkey , et al. March 30, 2 | 2010-03-30 |
Feature dimension control in a manufacturing process
Grant 7,674,350 - Zhuang , et al. March 9, 2 | 2010-03-09 |
Feature patterning methods
Grant 7,666,800 - Marokkey , et al. February 23, 2 | 2010-02-23 |
Feature Patterning Methods
App 20090200583 - Marokkey; Sajan ; et al. | 2009-08-13 |
Lithography Systems and Methods of Manufacturing Using Thereof
App 20090091729 - Marokkey; Sajan ; et al. | 2009-04-09 |
Lithography Systems and Methods of Manufacturing Using Thereof
App 20090092926 - Gutmann; Alois ; et al. | 2009-04-09 |
Lithography Masks and Methods of Manufacture Thereof
App 20090023078 - Gutmann; Alois ; et al. | 2009-01-22 |
Tunable stressed polycrystalline silicon on dielectrics in an integrated circuit
App 20080283927 - Hierlemann; Matthias ; et al. | 2008-11-20 |
Deep alignment marks on edge chips for subsequent alignment of opaque layers
Grant 7,442,624 - Sarma , et al. October 28, 2 | 2008-10-28 |
Small Feature Integrated Circuit Fabrication
App 20080199784 - Sarma; Chandrasekhar ; et al. | 2008-08-21 |
Semiconductor Device with Pre-Anneal Sandwich Gate Structure, and Method of Manufacturing
App 20080173958 - Zhuang; Haoren ; et al. | 2008-07-24 |
Feature Dimension Control in a Manufacturing Process
App 20080176344 - Zhuang; Haoren ; et al. | 2008-07-24 |
Lithography masks and methods of manufacture thereof
App 20080119048 - Sarma; Chandrasekhar ; et al. | 2008-05-22 |
Metrology systems and methods for lithography processes
App 20080044741 - Sarma; Chandrasekhar ; et al. | 2008-02-21 |
Process control systems and methods
App 20070239305 - Zhuang; Haoren ; et al. | 2007-10-11 |
Semiconductor devices and methods of manufacturing thereof
App 20070178388 - Lipinski; Matthias ; et al. | 2007-08-02 |
Alignment of MTJ stack to conductive lines in the absence of topography
Grant 7,223,612 - Sarma May 29, 2 | 2007-05-29 |
Alignment marks for polarized light lithography and method for use thereof
App 20070052113 - Marokkey; Sajan ; et al. | 2007-03-08 |
Deep alignment marks on edge chips for subsequent alignment of opaque layers
App 20060024923 - Sarma; Chandrasekhar ; et al. | 2006-02-02 |
Alignment of MTJ stack to conductive lines in the absence of topography
App 20060017180 - Sarma; Chandrasekhar | 2006-01-26 |
Method for improved alignment of magnetic tunnel junction elements
Grant 6,933,204 - Sarma , et al. August 23, 2 | 2005-08-23 |
Method For Improved Alignment Of Magnetic Tunnel Junction Elements
App 20050079683 - Sarma, Chandrasekhar ; et al. | 2005-04-14 |
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