Patent | Date |
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Optical system for detection and characterization of abnormal tissue and cells Grant 9,566,030 - Sarfaty , et al. February 14, 2 | 2017-02-14 |
Methods for optical identification and characterization of abnormal tissue and cells Grant 9,554,743 - Sarfaty , et al. January 31, 2 | 2017-01-31 |
Methods for detection and characterization of abnormal tissue and cells using an electrical system Grant 8,865,076 - Sarfaty , et al. October 21, 2 | 2014-10-21 |
Methods For Detection And Characterization Of Abnormal Tissue And Cells Using An Electrical System App 20130230883 - SARFATY; Moshe ;   et al. | 2013-09-05 |
Electrical methods for detection and characterization of abnormal tissue and cells Grant 8,437,845 - Sarfaty , et al. May 7, 2 | 2013-05-07 |
Electrical systems for detection and characterization of abnormal tissue and cells Grant 8,417,328 - Sarfaty , et al. April 9, 2 | 2013-04-09 |
Method, system and medium for controlling manufacturing process using adaptive models based on empirical data Grant 7,970,588 - Kokotov , et al. June 28, 2 | 2011-06-28 |
Optical System For Detection And Characterization Of Abnormal Tissue And Cells App 20100179436 - Sarfaty; Moshe ;   et al. | 2010-07-15 |
Electrical Systems For Detection And Characterization Of Abnormal Tissue And Cells App 20100121173 - Sarfaty; Moshe ;   et al. | 2010-05-13 |
Electrical Methods For Detection And Characterization Of Abnormal Tissue And Cells App 20100106047 - Sarfaty; Moshe ;   et al. | 2010-04-29 |
Methods For Optical Identification And Characterization Of Abnormal Tissue And Cells App 20100106025 - Sarfaty; Moshe ;   et al. | 2010-04-29 |
Method, system and medium for controlling manufacturing process using adaptive models based on empirical data Grant 7,668,702 - Kokotov , et al. February 23, 2 | 2010-02-23 |
Method, system and medium for controlling manufacturing process using adaptive models based on empirical data App 20080177408 - Kokotov; Yuri ;   et al. | 2008-07-24 |
Material composition analysis system and method Grant 7,358,494 - Gao , et al. April 15, 2 | 2008-04-15 |
Integrated equipment set for forming a low K dielectric interconnect on a substrate App 20060246683 - Pan; Judon Tony ;   et al. | 2006-11-02 |
Direct non contact measurement Grant 7,046,019 - Sarfaty , et al. May 16, 2 | 2006-05-16 |
Eddy-optic sensor for object inspection Grant 7,042,558 - Sarfaty , et al. May 9, 2 | 2006-05-09 |
Method and apparatus for process monitoring Grant 6,936,842 - Rengarajan , et al. August 30, 2 | 2005-08-30 |
Method and apparatus for monitoring a process by employing principal component analysis Grant 6,896,763 - Balasubramhanya , et al. May 24, 2 | 2005-05-24 |
In-situ film thickness measurement using spectral interference at grazing incidence Grant 6,888,639 - Goebel , et al. May 3, 2 | 2005-05-03 |
Current leakage measurement Grant 6,855,569 - Sarfaty February 15, 2 | 2005-02-15 |
Detecting chemiluminescent radiation in the cleaning of a substrate processing chamber Grant 6,843,881 - Kim , et al. January 18, 2 | 2005-01-18 |
Eddy current-capacitance sensor for conducting film characterization App 20040207395 - Sarfaty, Moshe ;   et al. | 2004-10-21 |
Detection of process endpoint through monitoring fluctuation of output data Grant 6,745,095 - Ben-Dov , et al. June 1, 2 | 2004-06-01 |
Differential measurement method using eddy-current sensing to resolve a stack of conducting films on substrates App 20040070393 - Sarfaty, Moshe ;   et al. | 2004-04-15 |
Method, system and medium for controlling manufacturing process using adaptive models based on empirical data App 20040015335 - Kokotov, Yuri ;   et al. | 2004-01-22 |
Integrated equipment set for forming a low K dielectric interconnect on a substrate App 20040007325 - Pan, Judon Tony ;   et al. | 2004-01-15 |
Monitoring of film characteristics during plasma-based semi-conductor processing using optical emission spectroscopy Grant 6,633,391 - Oluseyi , et al. October 14, 2 | 2003-10-14 |
Detecting chemiluminescent radiation in the cleaning of a substrate processing chamber App 20030185966 - Kim, Bok Hoen ;   et al. | 2003-10-02 |
Situ measurement of film nitridation using optical emission spectroscopy Grant 6,627,463 - Sarfaty September 30, 2 | 2003-09-30 |
Eddy-optic sensor for object inspection Grant 6,608,495 - Sarfaty , et al. August 19, 2 | 2003-08-19 |
Method and apparatus employing optical emission spectroscopy to detect a fault in process conditions of a semiconductor processing system Grant 6,603,538 - Oluseyi , et al. August 5, 2 | 2003-08-05 |
Method and apparatus for monitoring a process by employing principal component analysis App 20030136511 - Balasubramhanya, Lalitha ;   et al. | 2003-07-24 |
Spectral reflectance for in-situ film characteristic measurements App 20030133126 - Sarfaty, Moshe ;   et al. | 2003-07-17 |
Film thickness control using spectral interferometry Grant 6,589,869 - Sarfaty , et al. July 8, 2 | 2003-07-08 |
In-situ film thickness measurement using spectral interference at grazing incidence App 20030090676 - Goebel, Andreas ;   et al. | 2003-05-15 |
Method and apparatus for monitoring a process by employing principal component analysis Grant 6,521,080 - Balasubramhanya , et al. February 18, 2 | 2003-02-18 |
Method and apparatus for process monitoring App 20030032207 - Rengarajan, Suraj ;   et al. | 2003-02-13 |
Method and apparatus for monitoring the process state of a semiconductor device fabrication process Grant 6,455,437 - Davidow , et al. September 24, 2 | 2002-09-24 |
Eddy-optic sensor for object inspection App 20020130651 - Sarfaty, Moshe ;   et al. | 2002-09-19 |
Film thickness control using spectral interferometry App 20020119660 - Sarfaty, Moshe ;   et al. | 2002-08-29 |
Film thickness control using spectral interferometry Grant 6,413,867 - Sarfaty , et al. July 2, 2 | 2002-07-02 |
Method and apparatus for monitoring a process by employing principal component analysis App 20020055259 - Balasubramhanya, Lalitha ;   et al. | 2002-05-09 |
Method and apparatus for monitoring a process by employing principal component analysis Grant 6,368,975 - Balasubramhanya , et al. April 9, 2 | 2002-04-09 |