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Patent applications and USPTO patent grants for Sansoni; Steven.The latest application filed is for "batch wafer degas chamber and integration into factory interface and vacuum-based mainframe".
Patent | Date |
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Batch Wafer Degas Chamber And Integration Into Factory Interface And Vacuum-based Mainframe App 20210398824 - Hruzek; Dean C. ;   et al. | 2021-12-23 |
Substrate carrier having hard mask Grant 11,047,039 - Lerner , et al. June 29, 2 | 2021-06-29 |
Base plate for a processing chamber substrate support Grant D893,441 - Rao , et al. A | 2020-08-18 |
Substrate Carrier Having Hard Mask App 20190211442 - LERNER; ALEXANDER ;   et al. | 2019-07-11 |
Method and apparatus for reducing thermal gradients within a substrate support Grant 6,469,283 - Burkhart , et al. October 22, 2 | 2002-10-22 |
Electrostatic chuck with improved spacing mask and workpiece detection device Grant D425,919 - Burkhart , et al. May 30, 2 | 2000-05-30 |
Electrostatic chuck with improved spacing and charge migration reduction mask Grant D420,022 - Burkhart , et al. February 1, 2 | 2000-02-01 |
Method and apparatus for predicting failure of an eletrostatic chuck Grant 5,886,865 - Parkhe , et al. March 23, 1 | 1999-03-23 |
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