Patent | Date |
---|
Semiconductor device and method for manufacturing the same Grant 9,799,608 - Suzuki , et al. October 24, 2 | 2017-10-24 |
Semiconductor Device And Method For Manufacturing The Same App 20160268212 - SUZUKI; Takuma ;   et al. | 2016-09-15 |
Semiconductor device and method for manufacturing semiconductor device Grant 8,916,881 - Yanase , et al. December 23, 2 | 2014-12-23 |
Semiconductor device Grant 8,866,151 - Noda , et al. October 21, 2 | 2014-10-21 |
Semiconductor Device And Strain Monitor App 20140283618 - Yasumoto; Takaaki ;   et al. | 2014-09-25 |
Semiconductor Device And Method For Manufacturing Semiconductor Device App 20140014971 - YANASE; Naoko ;   et al. | 2014-01-16 |
Semiconductor device and method for manufacturing semiconductor device Grant 8,558,244 - Yanase , et al. October 15, 2 | 2013-10-15 |
Semiconductor Device App 20120241762 - NODA; Takao ;   et al. | 2012-09-27 |
Semiconductor Device And Method For Manufacturing Semiconductor Device App 20110193101 - YANASE; Naoko ;   et al. | 2011-08-11 |
Piezoelectric thin film device and method for manufacturing the same Grant 7,770,274 - Sano , et al. August 10, 2 | 2010-08-10 |
Thin film piezoelectric resonator and method of manufacturing the same Grant 7,709,999 - Itaya , et al. May 4, 2 | 2010-05-04 |
Thin film piezoelectric actuator Grant 7,675,222 - Kawakubo , et al. March 9, 2 | 2010-03-09 |
Piezoelectric Device App 20090302716 - OHARA; Ryoichi ;   et al. | 2009-12-10 |
Thin film piezoelectric resonator, method of manufacturing the same, and filter including the same Grant 7,560,853 - Sano , et al. July 14, 2 | 2009-07-14 |
Thin-film piezoelectric resonator, filter and voltage-controlled oscillator Grant 7,525,399 - Yanase , et al. April 28, 2 | 2009-04-28 |
Thin film piezoelectric resonator and manufacturing process thereof Grant 7,501,739 - Itaya , et al. March 10, 2 | 2009-03-10 |
Piezoelectric thin film resonator and devices provided with the same Grant 7,498,904 - Ohara , et al. March 3, 2 | 2009-03-03 |
Thin Film Piezoelectric Resonator And Method Of Manufacturing The Same App 20090033177 - Itaya; Kazuhiko ;   et al. | 2009-02-05 |
Film bulk acoustic-wave resonator (FBAR), filter implemented by FBARs and method for manufacturing FBAR Grant 7,463,117 - Ohara , et al. December 9, 2 | 2008-12-09 |
Thin film piezoelectric actuator Grant 7,459,833 - Kawakubo , et al. December 2, 2 | 2008-12-02 |
Film Bulk Acoustic Resonator App 20080284542 - Sano; Kenya ;   et al. | 2008-11-20 |
Piezoelectric thin film device and method for manufacturing the same Grant 7,420,320 - Sano , et al. September 2, 2 | 2008-09-02 |
Piezoelectric Thin Film Device And Method For Manufacturing The Same App 20080074005 - SANO; Kenya ;   et al. | 2008-03-27 |
Piezoelectric Thin Film Device And Method For Manufacturing The Same App 20080072408 - SANO; Kenya ;   et al. | 2008-03-27 |
Piezoelectric thin film device and method for manufacturing the same Grant 7,323,805 - Sano , et al. January 29, 2 | 2008-01-29 |
Film bulk acoustic resonator and method for manufacturing the same Grant 7,321,183 - Ebuchi , et al. January 22, 2 | 2008-01-22 |
Electronic Device App 20070284971 - SANO; Kenya ;   et al. | 2007-12-13 |
Thin Film Piezoelectric Actuator App 20070278900 - KAWAKUBO; Takashi ;   et al. | 2007-12-06 |
Electronic Device App 20070247260 - YANASE; Naoko ;   et al. | 2007-10-25 |
Film bulk acoustic-wave resonator and method for manufacturing the same Grant 7,268,647 - Sano , et al. September 11, 2 | 2007-09-11 |
Thin Film Piezoelectric Resonator, Method Of Manufacturing The Same, And Filter Including The Same App 20070194662 - Sano; Kenya ;   et al. | 2007-08-23 |
Film Bulk Acoustic Resonator And Film Bulk Acoustic Resonator Filter App 20070188270 - Ohara; Ryoichi ;   et al. | 2007-08-16 |
Thin-film piezoelectric resonator and filter circuit App 20070176513 - Ohara; Ryoichi ;   et al. | 2007-08-02 |
Film Bulk Acoustic-wave Resonator And Method For Manufacturing The Same App 20070115078 - Sano; Kenya ;   et al. | 2007-05-24 |
Voltage controlled oscillator, frequency synthesizer and communication apparatus Grant 7,221,920 - Abe , et al. May 22, 2 | 2007-05-22 |
Film bulk acoustic-wave resonator and method for manufacturing the same Grant 7,187,253 - Sano , et al. March 6, 2 | 2007-03-06 |
Piezoelectric thin film resonator and devices provided with the same App 20060279382 - Ohara; Ryoichi ;   et al. | 2006-12-14 |
Thin-film piezoelectric resonator, filter and voltage-controlled oscillator App 20060267711 - Yanase; Naoko ;   et al. | 2006-11-30 |
Film bulk acoustic-wave resonator (FBAR), filter implemented by FBARs and method for manufacturing FBAR App 20060001508 - Ohara; Ryoichi ;   et al. | 2006-01-05 |
Thin film piezoelectric resonator and manufacturing process thereof App 20050248232 - Itaya, Kazuhiko ;   et al. | 2005-11-10 |
Film bulk acoustic-wave resonator and method for manufacturing the same App 20050237132 - Sano, Kenya ;   et al. | 2005-10-27 |
Thin film piezoelectric actuator App 20050194867 - Kawakubo, Takashi ;   et al. | 2005-09-08 |
Piezoelectric thin film device and method for manufacturing the same App 20050184627 - Sano, Kenya ;   et al. | 2005-08-25 |
Thin film bulk acoustic wave resonator Grant 6,870,445 - Kawakubo , et al. March 22, 2 | 2005-03-22 |
Voltage controlled oscillator, frequency synthesizer and communication apparatus App 20050059375 - Abe, Kazuhide ;   et al. | 2005-03-17 |
Method for manufacturing an infrared detection element App 20050006584 - Kawakubo, Takashi ;   et al. | 2005-01-13 |
Infrared detection element and infrared detector Grant 6,797,957 - Kawakubo , et al. September 28, 2 | 2004-09-28 |
Sputter target, barrier film and electronic component Grant 6,750,542 - Suzuki , et al. June 15, 2 | 2004-06-15 |
Thin film bulk acoustic wave resonator App 20040012463 - Kawakubo, Takashi ;   et al. | 2004-01-22 |
Sputter target, barrier film and electronic component App 20030116849 - Suzuki, Yukinobu ;   et al. | 2003-06-26 |
Infrared detection element and infrared detector App 20020130263 - Kawakubo, Takashi ;   et al. | 2002-09-19 |
Ferroelectric capacitor and semiconductor device App 20010015448 - Kawakubo, Takashi ;   et al. | 2001-08-23 |
Thin film capacitor Grant 5,889,299 - Abe , et al. March 30, 1 | 1999-03-30 |
Ferroelectric type semiconductor device having a barium titanate type dielectric film and method for manufacturing the same Grant 5,739,563 - Kawakubo , et al. April 14, 1 | 1998-04-14 |