Sankarakrishnan; Ramprakash
Patent Applications and Registrations
Patent applications and USPTO patent grants for Sankarakrishnan; Ramprakash.The latest application filed is for "pecvd process".
Company Profile
13.35.41
- Sankarakrishnan; Ramprakash - Santa Clara CA
- Sankarakrishnan; Ramprakash - San Jose CA US
Patent Activity
| Patent | Date |
|---|---|
| Multi-zone pedestal for plasma processing Grant 10,971,389 - Lin , et al. April 6, 2 | 2021-04-06 |
| Bottom and side plasma tuning having closed loop control Grant 10,910,227 - Rocha-Alvarez , et al. February 2, 2 | 2021-02-02 |
| Pecvd Process App 20200399756 - RAJAGOPALAN; Nagarajan ; et al. | 2020-12-24 |
| Dual-zone heater for plasma processing Grant 10,811,301 - Lin , et al. October 20, 2 | 2020-10-20 |
| PECVD process Grant 10,793,954 - Rajagopalan , et al. October 6, 2 | 2020-10-06 |
| Dual-zone Heater For Plasma Processing App 20200051848 - LIN; Xing ; et al. | 2020-02-13 |
| Controlling temperature in substrate processing systems Grant 10,544,508 - Rocha-Alvarez , et al. Ja | 2020-01-28 |
| Processing chamber with irradiance curing lens Grant 10,541,159 - Trejo , et al. Ja | 2020-01-21 |
| High Impedance Rf Filter For Heater With Impedance Tuning Device App 20200010957 - CHEN; Jian J. ; et al. | 2020-01-09 |
| Methods of dry stripping boron-carbon films Grant 10,510,518 - Lee , et al. Dec | 2019-12-17 |
| Dual-zone heater for plasma processing Grant 10,497,606 - Lin , et al. De | 2019-12-03 |
| Isolator For A Substrate Processing Chamber App 20190360102 - SANKARAKRISHNAN; Ramprakash | 2019-11-28 |
| High impedance RF filter for heater with impedance tuning device Grant 10,450,653 - Chen , et al. Oc | 2019-10-22 |
| Apparatus and method for purging gaseous compounds Grant 10,385,448 - Rocha-Alvarez , et al. A | 2019-08-20 |
| Isolator for a substrate processing chamber Grant 10,370,764 - Sankarakrishnan | 2019-08-06 |
| High Impedance Rf Filter For Heater With Impedance Tuning Device App 20190177848 - CHEN; Jian J. ; et al. | 2019-06-13 |
| Magnetron having enhanced cooling characteristics Grant 10,290,459 - Raj , et al. | 2019-05-14 |
| Bottom And Side Plasma Tuning Having Closed Loop Control App 20190080916 - ROCHA-ALVAREZ; Juan Carlos ; et al. | 2019-03-14 |
| Magnetron Having Enhanced Cooling Characteristics App 20190051485 - RAJ; Govinda ; et al. | 2019-02-14 |
| Multi-zone Pedestal For Plasma Processing App 20190035665 - LIN; Xing ; et al. | 2019-01-31 |
| Apparatus and method for purging gaseous compounds Grant 10,161,035 - Rocha-Alvarez , et al. Dec | 2018-12-25 |
| Magnetron having enhanced cooling characteristics Grant 10,141,153 - Raj , et al. Nov | 2018-11-27 |
| High impedance RF filter for heater with impedance tuning device Grant 10,125,422 - Chen , et al. November 13, 2 | 2018-11-13 |
| Bottom and side plasma tuning having closed loop control Grant 10,128,118 - Rocha-Alvarez , et al. November 13, 2 | 2018-11-13 |
| Method and system for supplying a cleaning gas into a process chamber Grant 10,094,486 - Sankarakrishnan , et al. October 9, 2 | 2018-10-09 |
| Multi-zone pedestal for plasma processing Grant 10,090,187 - Lin , et al. October 2, 2 | 2018-10-02 |
| Pecvd Process App 20180258535 - RAJAGOPALAN; Nagarajan ; et al. | 2018-09-13 |
| PECVD process Grant 10,060,032 - Rajagopalan , et al. August 28, 2 | 2018-08-28 |
| PECVD apparatus and process Grant 10,030,306 - Rajagopalan , et al. July 24, 2 | 2018-07-24 |
| Wafer rotation in a semiconductor chamber Grant 9,922,819 - Balasubramanian , et al. March 20, 2 | 2018-03-20 |
| Pecvd Process App 20180066364 - RAJAGOPALAN; Nagarajan ; et al. | 2018-03-08 |
| Processing Chamber With Irradiance Curing Lens App 20170345649 - TREJO; Orlando ; et al. | 2017-11-30 |
| PECVD process Grant 9,816,187 - Rajagopalan , et al. November 14, 2 | 2017-11-14 |
| Multi-zone Pedestal For Plasma Processing App 20170263484 - LIN; Xing ; et al. | 2017-09-14 |
| Multi-zone pedestal for plasma processing Grant 9,725,806 - Lin , et al. August 8, 2 | 2017-08-08 |
| Wafer Rotation In A Semiconductor Chamber App 20170162385 - BALASUBRAMANIAN; Ganesh ; et al. | 2017-06-08 |
| 3d Printed Magnetron Having Enhanced Cooling Characteristics App 20170084418 - RAJ; Govinda ; et al. | 2017-03-23 |
| Wafer rotation in a semiconductor chamber Grant 9,593,419 - Balasubramanian , et al. March 14, 2 | 2017-03-14 |
| Pecvd Process App 20170016118 - RAJAGOPALAN; Nagarajan ; et al. | 2017-01-19 |
| PECVD process Grant 9,458,537 - Rajagopalan , et al. October 4, 2 | 2016-10-04 |
| Critical chamber component surface improvement to reduce chamber particles Grant 9,428,424 - Duan , et al. August 30, 2 | 2016-08-30 |
| Dual-zone Heater For Plasma Processing App 20160230281 - LIN; Xing ; et al. | 2016-08-11 |
| Apparatus And Method For Purging Gaseous Compounds App 20160222507 - ROCHA-ALVAREZ; Juan Carlos ; et al. | 2016-08-04 |
| Methods Of Dry Stripping Boron-carbon Films App 20160133443 - LEE; Kwangduk Douglas ; et al. | 2016-05-12 |
| Methods of dry stripping boron-carbon films Grant 9,299,581 - Lee , et al. March 29, 2 | 2016-03-29 |
| Method And System For Supplying A Cleaning Gas Into A Process Chamber App 20160084400 - SANKARAKRISHNAN; Ramprakash ; et al. | 2016-03-24 |
| Methods Of Dry Stripping Boron-carbon Films App 20160064209 - LEE; Kwangduk Douglas ; et al. | 2016-03-03 |
| Pecvd Process App 20160017497 - RAJAGOPALAN; NAGARAJAN ; et al. | 2016-01-21 |
| Multi-zone Pedestal For Plasma Processing App 20160002779 - LIN; XING ; et al. | 2016-01-07 |
| Method and system for supplying a cleaning gas into a process chamber Grant 9,206,511 - Sankarakrishnan , et al. December 8, 2 | 2015-12-08 |
| PECVD process Grant 9,157,730 - Rajagopalan , et al. October 13, 2 | 2015-10-13 |
| Wafer Rotation In A Semiconductor Chamber App 20150262859 - BALASUBRAMANIAN; Ganesh ; et al. | 2015-09-17 |
| Critical Chamber Component Surface Improvement To Reduce Chamber Particles App 20150251961 - DUAN; Ren-Guan ; et al. | 2015-09-10 |
| Pecvd Apparatus And Process App 20150226540 - Rajagopalan; Nagarajan ; et al. | 2015-08-13 |
| Isolator For A Substrate Processing Chamber App 20150122775 - SANKARAKRISHNAN; Ramprakash | 2015-05-07 |
| High Impedance Rf Filter For Heater With Impedance Tuning Device App 20140302256 - CHEN; Jian J. ; et al. | 2014-10-09 |
| High Throughput Multi-layer Stack Deposition App 20140287593 - HAN; Xinhai ; et al. | 2014-09-25 |
| Methods Of Dry Stripping Boron-carbon Films App 20140216498 - LEE; Kwangduk Douglas ; et al. | 2014-08-07 |
| Confined process volume PECVD chamber Grant 8,778,813 - Sankarakrishnan , et al. July 15, 2 | 2014-07-15 |
| Pecvd Process App 20140118751 - RAJAGOPALAN; Nagarajan ; et al. | 2014-05-01 |
| Controlling Temperature In Substrate Processing Systems App 20140083361 - ROCHA-ALVAREZ; Juan Carlos ; et al. | 2014-03-27 |
| Bottom And Side Plasma Tuning Having Closed Loop Control App 20140087489 - ROCHA-ALVAREZ; Juan Carlos ; et al. | 2014-03-27 |
| Apparatus And Method For Purging Gaseous Compounds App 20140083523 - ROCHA-ALVAREZ; Juan Carlos ; et al. | 2014-03-27 |
| Method And System For Supplying A Cleaning Gas Into A Process Chamber App 20140076236 - SANKARAKRISHNAN; Ramprakash ; et al. | 2014-03-20 |
| Method and system for supplying a cleaning gas into a process chamber Grant 8,591,699 - Sankarakrishnan , et al. November 26, 2 | 2013-11-26 |
| Method And System For Supplying A Cleaning Gas Into A Process Chamber App 20130213574 - Sankarakrishnan; Ramprakash ; et al. | 2013-08-22 |
| Methods Of Dry Stripping Boron-carbon Films App 20120285492 - Lee; Kwangduk Douglas ; et al. | 2012-11-15 |
| Confined Process Volume Pecvd Chamber App 20110294303 - Sankarakrishnan; Ramprakash ; et al. | 2011-12-01 |
| Method and system for supplying a cleaning gas into a process chamber Grant 7,699,935 - Sankarakrishnan , et al. April 20, 2 | 2010-04-20 |
| Method and System for Supplying a Cleaning Gas Into a Process Chamber App 20100012273 - Sankarakrishnan; Ramprakash ; et al. | 2010-01-21 |
| Method And System For Supplying A Cleaning Gas Into A Process Chamber App 20090314309 - Sankarakrishnan; Ramprakash ; et al. | 2009-12-24 |
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