Sangplung; Saangrut

Patent Applications and Registrations

Patent applications and USPTO patent grants for Sangplung; Saangrut.The latest application filed is for "systems and methods enabling low defect processing via controlled separation and delivery of chemicals during atomic layer deposition".

Company Profile

3.8.9

Sangplung; Saangrut - Sherwood OR

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Chemical deposition chamber having gas seal Grant 10,781,516 - Chandrasekharan , et al. Sept	2020-09-22
Low volume showerhead with porous baffle Grant 10,741,365 - Chandrasekharan , et al. A	2020-08-11
Low volume showerhead with faceplate holes for improved flow uniformity Grant 10,378,107 - Chandrasekharan , et al. A	2019-08-13
Systems and methods enabling low defect processing via controlled separation and delivery of chemicals during atomic layer deposition Grant 10,323,323 - Chandrasekharan , et al.	2019-06-18
Valve manifold deadleg elimination via reentrant flow path Grant 9,920,844 - Leeser , et al. March 20, 2	2018-03-20
Systems and methods for reducing backside deposition and mitigating thickness changes at substrate edges Grant 9,852,901 - Varadarajan , et al. December 26, 2	2017-12-26
Systems And Methods Enabling Low Defect Processing Via Controlled Separation And Delivery Of Chemicals During Atomic Layer Deposition App 20170175269 - Chandrasekharan; Ramesh ; et al.	2017-06-22
Systems and methods enabling low defect processing via controlled separation and delivery of chemicals during atomic layer deposition Grant 9,631,276 - Chandrasekharan , et al. April 25, 2	2017-04-25
Chemical Deposition Chamber Having Gas Seal App 20170101710 - Chandrasekharan; Ramesh ; et al.	2017-04-13
Systems And Methods Enabling Low Defect Processing Via Controlled Separation And Delivery Of Chemicals During Atomic Layer Deposition App 20170016115 - Chandrasekharan; Ramesh ; et al.	2017-01-19
Systems And Methods For Reducing Backside Deposition And Mitigating Thickness Changes At Substrate Edges App 20160372318 - VARADARAJAN; Sesha ; et al.	2016-12-22
Low Volume Showerhead With Faceplate Holes For Improved Flow Uniformity App 20160340782 - Chandrasekharan; Ramesh ; et al.	2016-11-24
Systems and methods for reducing backside deposition and mitigating thickness changes at substrate edges Grant 9,460,915 - Varadarajan , et al. October 4, 2	2016-10-04
Valve Manifold Deadleg Elimination Via Reentrant Flow Path App 20160147234 - Leeser; Karl ; et al.	2016-05-26
Systems And Methods For Reducing Backside Deposition And Mitigatingthickness Changes At Substrate Edges App 20160079057 - Varadarajan; Sesha ; et al.	2016-03-17
Low Volume Showerhead With Porous Baffle App 20150315706 - Chandrasekharan; Ramesh ; et al.	2015-11-05
Chemical Deposition Chamber Having Gas Seal App 20150004798 - Chandrasekharan; Ramesh ; et al.	2015-01-01

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