Sanganeria; Mahesh K

Patent Applications and Registrations

Patent applications and USPTO patent grants for Sanganeria; Mahesh K.The latest application filed is for "protection of cu damascene interconnects by formation of a self-aligned buffer layer".

Company Profile

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Sanganeria; Mahesh K - Sunnyvale CA
Sanganeria; Mahesh K. - Sunnyvale CA
Sanganeria; Mahesh K. - Raleigh NC

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Protection of Cu damascene interconnects by formation of a self-aligned buffer layer Grant 8,030,777 - van Schravendijk , et al. October 4, 2	2011-10-04
Protection of Cu damascene interconnects by formation of a self-aligned buffer layer Grant 7,396,759 - van Schravendijk , et al. July 8, 2	2008-07-08
Method of controlling FSG deposition rate in an HDP reactor Grant 6,403,501 - Hander , et al. June 11, 2	2002-06-11
Susceptor hold-down mechanism Grant 6,118,100 - Mailho , et al. September 12, 2	2000-09-12
Gas injection system for CVD reactors Grant 6,113,984 - MacLeish , et al. September 5, 2	2000-09-05
Method of cleaning wafer substrates Grant 5,968,279 - MacLeish , et al. October 19, 1	1999-10-19
Gas injection system for CVD reactors Grant 5,653,808 - MacLeish , et al. August 5, 1	1997-08-05
Method for forming a layer of uniform thickness on a semiconductor wafer during rapid thermal processing Grant 5,439,850 - Ozturk , et al. August 8, 1	1995-08-08
Selective deposition of doped silicon-germanium alloy on semiconductor substrate, and resulting structures Grant 5,336,903 - Ozturk , et al. August 9, 1	1994-08-09
Selective deposition of doped silion-germanium alloy on semiconductor substrate Grant 5,242,847 - Ozturk , et al. September 7, 1	1993-09-07

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