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Reduction of the dynamic deformation of translational mirrors using inertial masses Grant 8,873,128 - Conrad , et al. October 28, 2 | 2014-10-28 |
Micromechanical device with temperature stabilization and method for adjusting a defined temperature or a defined temperature course on a micromechanical device Grant 8,842,356 - Sandner , et al. September 23, 2 | 2014-09-23 |
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Micromechanical Device With Temperature Stabilization And Method For Adjusting A Defined Temperature Or A Defined Temperature Course On A Micromechanical Device App 20120188625 - Sandner; Thilo ;   et al. | 2012-07-26 |
Reduction Of The Dynamic Deformation Of Translational Mirrors Using Inertial Masses App 20120099175 - Conrad; Holger ;   et al. | 2012-04-26 |
Micromechanical device with temperature stabilization and method for adjusting a defined temperature or a defined temperature course on a micromechanical device Grant 8,147,136 - Heber , et al. April 3, 2 | 2012-04-03 |
Method for generating a micromechanical structure Grant 7,940,439 - Jung , et al. May 10, 2 | 2011-05-10 |
Oscillating, deflectable micromechanical element and method for use thereof Grant 7,932,788 - Schenk , et al. April 26, 2 | 2011-04-26 |
Method of fabricating a micromechanical structure out of two-dimensional elements and micromechanical device Grant 7,929,192 - Sandner April 19, 2 | 2011-04-19 |
Apparatus and method for housing micromechanical systems Grant 7,898,071 - Bakke , et al. March 1, 2 | 2011-03-01 |
Projection apparatus for scanningly projection Grant 7,847,997 - Sandner , et al. December 7, 2 | 2010-12-07 |
Deflectable micromechanical system and use thereof Grant 7,841,242 - Conrad , et al. November 30, 2 | 2010-11-30 |
Micromechanical device with adjustable resonant frequency by geometry alteration and method for operating same Grant 7,830,577 - Grasshoff , et al. November 9, 2 | 2010-11-09 |
Optical device comprising a structure for avoiding reflections Grant 7,760,414 - Schenk , et al. July 20, 2 | 2010-07-20 |
Oscillating, deflectable micromechanical element and method for use thereof App 20090302960 - Schenk; Harald ;   et al. | 2009-12-10 |
Deflectable Micromechanical System And Use Thereof App 20090293632 - Conrad; Holger ;   et al. | 2009-12-03 |
Micromechanical mirrors with a high-reflection coating, method for production thereof and use thereof Grant 7,573,634 - Schmidt , et al. August 11, 2 | 2009-08-11 |
Microoptic reflecting component Grant 7,490,947 - Sandner , et al. February 17, 2 | 2009-02-17 |
Micromechanical device with tilted electrodes Grant 7,466,474 - Jung , et al. December 16, 2 | 2008-12-16 |
Method For Generating A Micromechanical Structure App 20080242049 - JUNG; Denis ;   et al. | 2008-10-02 |
Optical Device Comprising A Structure For Avoiding Reflections App 20080239531 - SCHENK; Harald ;   et al. | 2008-10-02 |
Micromechanical Device With Tilted Electrodes App 20080239446 - Jung; Denis ;   et al. | 2008-10-02 |
Method Of Fabricating A Micromechanical Structure Out Of Two-dimensional Elements And Micromechanical Device App 20080239429 - SANDNER; Thilo | 2008-10-02 |
Micromechanical Device With Temperature Stabilization And Method For Adjusting A Defined Temperature Or A Defined Temperature Course On A Micromechanical Device App 20080240202 - HEBER; Jorg ;   et al. | 2008-10-02 |
Projection Apparatus For Scanningly Projection App 20080218835 - SANDNER; Thilo ;   et al. | 2008-09-11 |
Apparatus And Method For Housing Micromechanical Systems App 20080164592 - BAKKE; Thor ;   et al. | 2008-07-10 |
Micromechanical Device With Adjustable Resonant Frequency By Geometry Alteration And Method For Operating Same App 20080165403 - GRASSHOFF; Thomas ;   et al. | 2008-07-10 |
Micromechanical Mirrors with a High-Reflection Coating, Method for Production Thereof and Use Thereof App 20080068704 - Schmidt; Jan-Uwe ;   et al. | 2008-03-20 |
Microoptic reflecting component App 20070165297 - Sandner; Thilo ;   et al. | 2007-07-19 |