| Patent | Date |
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Photoactive polymer brush materials and EUV patterning using the same
Grant 10,831,102 - De Silva , et al. November 10, 2 | 2020-11-10 |
Multifunctional Polymers
App 20200278607 - Bozano; Luisa D. ; et al. | 2020-09-03 |
Photoactive Polymer Brush Materials And Euv Patterning Using The Same
App 20190271913 - De Silva; Ekmini A. ; et al. | 2019-09-05 |
Negative-tone resist compositions and multifunctional polymers therein
Grant 10,345,700 - Bozano , et al. July 9, 2 | 2019-07-09 |
Methods of forming block polymers for directed self-assembly
Grant 10,118,989 - Chunder , et al. November 6, 2 | 2018-11-06 |
Additives for orientation control of block copolymers
Grant 10,066,040 - Cheng , et al. September 4, 2 | 2018-09-04 |
Hybrid topographical and chemical pre-patterns for directed self-assembly of block copolymers
Grant 10,059,820 - Brink , et al. August 28, 2 | 2018-08-28 |
Fluorinated sulfonate esters of aryl ketones for non-ionic photo-acid generators
Grant 9,983,475 - Ishimaru , et al. May 29, 2 | 2018-05-29 |
Thin film self assembly of topcoat-free silicon-containing diblock copolymers
Grant 9,982,097 - Arellano , et al. May 29, 2 | 2018-05-29 |
Non-ionic low diffusing photo-acid generators
Grant 9,950,999 - Ishimaru , et al. April 24, 2 | 2018-04-24 |
Non-ionic aryl ketone based polymeric photo-acid generators
Grant 9,951,164 - Ishimaru , et al. April 24, 2 | 2018-04-24 |
Non-ionic Low Diffusing Photo-acid Generators
App 20180044284 - Ishimaru; Takehisa ; et al. | 2018-02-15 |
Non-ionic Aryl Ketone Based Polymeric Photo-acid Generators
App 20180044459 - Ishimaru; Takehisa ; et al. | 2018-02-15 |
Fluorinated Sulfonate Esters Of Aryl Ketones For Non-ionic Photo-acid Generators
App 20180046077 - Ishimaru; Takehisa ; et al. | 2018-02-15 |
Block copolymers for directed self-assembly applications
Grant 9,879,152 - Arellano , et al. January 30, 2 | 2018-01-30 |
Hybrid Topographical And Chemical Pre-patterns For Directed Self-assembly Of Block Copolymers
App 20170321025 - Brink; Markus ; et al. | 2017-11-09 |
High-chi Block Copolymers For Interconnect Structures By Directed Self-assembly
App 20170294341 - Liu; Chi-Chun ; et al. | 2017-10-12 |
High-chi block copolymers for interconnect structures by directed self-assembly
Grant 9,768,059 - Liu , et al. September 19, 2 | 2017-09-19 |
Hybrid topographical and chemical pre-patterns for directed self-assembly of block copolymers
Grant 9,738,765 - Brink , et al. August 22, 2 | 2017-08-22 |
Thin Film Self Assembly Of Topcoat-free Silicon-containing Diblock Copolymers
App 20170233532 - Arellano; Noel ; et al. | 2017-08-17 |
Block Copolymers For Directed Self-assembly Applications
App 20170114246 - Arellano; Noel ; et al. | 2017-04-27 |
Methods Of Forming Block Polymers For Directed Self-assembly
App 20170114183 - Chunder; Anindarupa ; et al. | 2017-04-27 |
Fluoro-alcohol additives for orientation control of block copolymers
Grant 9,574,107 - Cheng , et al. February 21, 2 | 2017-02-21 |
Methods of forming block polymers for directed self-assembly
Grant 9,562,127 - Cheng , et al. February 7, 2 | 2017-02-07 |
Additives For Orientation Control Of Block Copolymers
App 20160362513 - Cheng; Joy ; et al. | 2016-12-15 |
Additives For Orientation Control Of Block Copolymers
App 20160304740 - Cheng; Joy ; et al. | 2016-10-20 |
Additives for orientation control of block copolymers
Grant 9,458,353 - Cheng , et al. October 4, 2 | 2016-10-04 |
Hybrid Topographical And Chemical Pre-patterns For Directed Self-assembly Of Block Copolymers
App 20160244581 - Brink; Markus ; et al. | 2016-08-25 |
Fluoro-alcohol Additives For Orientation Control Of Block Copolymers
App 20160237307 - Cheng; Joy ; et al. | 2016-08-18 |
Cross-metathesis reaction of functionalized and substituted olefins using group 8 transition metal carbene complexes as metathesis catalysts
Grant 9,403,854 - Grubbs , et al. August 2, 2 | 2016-08-02 |
Method of ring-opening polymerization, and related compositions and articles
Grant 9,388,275 - Coulembier , et al. July 12, 2 | 2016-07-12 |
Negative-tone Resist Compositions And Multifunctional Polymers Therein
App 20160070169 - Bozano; Luisa D. ; et al. | 2016-03-10 |
Non-ionic photo-acid generating polymers for resist applications
Grant 9,244,345 - Ishimaru , et al. January 26, 2 | 2016-01-26 |
Method for improving self-assembled polymer features
Grant 9,233,840 - Cheng , et al. January 12, 2 | 2016-01-12 |
Methods Of Forming Block Polymers For Directed Self-assembly
App 20150329664 - Cheng; Joy ; et al. | 2015-11-19 |
Method of controlling orientation of domains in block copolymer films
Grant 9,181,426 - Cheng , et al. November 10, 2 | 2015-11-10 |
Methods of reducing defects in directed self-assembled structures
Grant 9,159,558 - Cheng , et al. October 13, 2 | 2015-10-13 |
Formation of a composite pattern including a periodic pattern self-aligned to a prepattern
Grant 9,107,291 - Cheng , et al. August 11, 2 | 2015-08-11 |
Formation Of A Composite Pattern Including A Periodic Pattern Self-aligned To A Prepattern
App 20150195916 - Cheng; Joy ; et al. | 2015-07-09 |
Polymers bearing pendant pentafluorophenyl ester groups, and methods of synthesis and functionalization thereof
Grant 8,940,855 - Hedrick , et al. January 27, 2 | 2015-01-27 |
Cross-metathesis Reaction Of Functionalized And Substituted Olefins Using Group 8 Transition Metal Carbene Complexes As Metathesis Catalysts
App 20140288319 - GRUBBS; Robert H. ; et al. | 2014-09-25 |
Semiconductor interconnect structure having enhanced performance and reliability
Grant 8,841,770 - Cabral, Jr. , et al. September 23, 2 | 2014-09-23 |
Methods Of Reducing Defects In Directed Self-assembled Structures
App 20140273476 - Cheng; Joy ; et al. | 2014-09-18 |
Method of preparing cyclic carbonates, cyclic carbamates, cyclic ureas, cyclic thiocarbonates, cyclic thiocarbamates, and cyclic dithiocarbonates
Grant 8,754,208 - Hedrick , et al. June 17, 2 | 2014-06-17 |
Semiconductor Interconnect Structure Having Enhanced Performance And Reliability
App 20140070418 - Cabral, JR.; Cyril ; et al. | 2014-03-13 |
Organic graded spin on BARC compositions for high NA lithography
Grant 8,652,762 - Goldfarb , et al. February 18, 2 | 2014-02-18 |
Semiconductor interconnect structure having enhanced performance and reliability
Grant 8,648,465 - Cabral, Jr. , et al. February 11, 2 | 2014-02-11 |
Method Of Controlling Orientation Of Domains In Block Copolymer Films
App 20130274380 - Cheng; Joy ; et al. | 2013-10-17 |
Method Of Preparing Cyclic Carbonates, Cyclic Carbamates, Cyclic Ureas, Cyclic Thiocarbonates, Cyclic Thiocarbamates, And Cyclic Dithiocarbonates
App 20130237701 - Hedrick; James L. ; et al. | 2013-09-12 |
Polymers Bearing Pendant Pentafluorophenyl Ester Groups, And Methods Of Synthesis And Functionalization Thereof
App 20130217853 - Hedrick; James L. ; et al. | 2013-08-22 |
Method of controlling orientation of domains in block copolymer films
Grant 8,491,965 - Cheng , et al. July 23, 2 | 2013-07-23 |
Methods for aligning polymer films and related structures
Grant 8,486,489 - Cheng , et al. July 16, 2 | 2013-07-16 |
Graded topcoat materials for immersion lithography
Grant 8,440,387 - Allen , et al. May 14, 2 | 2013-05-14 |
Semiconductor Interconnect Structure Having Enhanced Performance And Reliability
App 20130075908 - Cabral, JR.; Cyril ; et al. | 2013-03-28 |
Directed self-assembly of block copolymers using segmented prepatterns
Grant 8,398,868 - Cheng , et al. March 19, 2 | 2013-03-19 |
Functionalized carbosilane polymers and photoresist compositions containing the same
Grant 8,334,088 - Allen , et al. December 18, 2 | 2012-12-18 |
Cyclic Carbonyl Compounds With Pendant Carbonate Groups, Preparations Thereof, And Polymers Therefrom
App 20120252983 - Fujiwara; Masaki ; et al. | 2012-10-04 |
Cyclic Carbonyl Compounds With Pendant Carbonate Groups, Preparations Thereof, And Polymers Therefrom
App 20120245304 - Fujiwara; Masaki ; et al. | 2012-09-27 |
Surface Modified Nanoparticles, Methods Of Their Preparation, And Uses Thereof For Gene And Drug Delivery
App 20120245218 - Fukushima; Kazuki ; et al. | 2012-09-27 |
Organic Graded Spin On Barc Compositions For High Na Lithography
App 20120205787 - Goldfarb; Dario L. ; et al. | 2012-08-16 |
Method of forming polymer features by directed self-assembly of block copolymers
Grant 8,226,838 - Cheng , et al. July 24, 2 | 2012-07-24 |
Polymers Bearing Pendant Pentafluorophenyl Ester Groups, And Methods Of Synthesis And Functionalization Thereof
App 20120178925 - Hedrick; James L. ; et al. | 2012-07-12 |
Polymers Bearing Pendant Pentafluorophenyl Ester Groups, And Methods Of Synthesis And Functionalization Thereof
App 20120178891 - Fujiwara; Masaki ; et al. | 2012-07-12 |
Polymers Bearing Pendant Pentafluorophenyl Ester Groups, And Methods Of Synthesis And Functionalization Thereof
App 20120172602 - Hedrick; James L. ; et al. | 2012-07-05 |
Polymers Bearing Pendant Pentafluorophenyl Ester Groups, And Methods Of Synthesis And Functionalization Thereof
App 20120172559 - Hedrick; James L. ; et al. | 2012-07-05 |
Methods Of Forming Topographical Features Using Segregating Polymer Mixtures
App 20120135146 - Cheng; Joy ; et al. | 2012-05-31 |
Method of preparing cyclic carbonates, cyclic carbamates, cyclic ureas, cyclic thiocarbonates, cyclic thiocarbamates, and cyclic dithiocarbonates
Grant 8,178,700 - Hedrick , et al. May 15, 2 | 2012-05-15 |
Method For Improving Self-assembled Polymer Features
App 20120103935 - Cheng; Joy ; et al. | 2012-05-03 |
Organic graded spin on BARC compositions for high NA lithography
Grant 8,137,874 - Goldfarb , et al. March 20, 2 | 2012-03-20 |
Method of forming sub-lithographic features using directed self-assembly of polymers
Grant 8,114,306 - Cheng , et al. February 14, 2 | 2012-02-14 |
Self-segregating multilayer imaging stack with built-in antireflective properties
Grant 8,084,193 - Cheng , et al. December 27, 2 | 2011-12-27 |
Self-Segregating Multilayer Imaging Stack With Built-In Antireflective Properties
App 20110300483 - Cheng; Joy ; et al. | 2011-12-08 |
Self-Segregating Multilayer Imaging Stack With Built-In Antireflective Properties
App 20110294068 - Cheng; Joy ; et al. | 2011-12-01 |
Cyclic Carbonyl Compounds With Pendant Carbonate Groups, Preparations Thereof, And Polymers Therefrom
App 20110269917 - Fujiwara; Masaki ; et al. | 2011-11-03 |
Method of use of epoxy-containing cycloaliphatic acrylic polymers as orientation control layers for block copolymer thin films
Grant 7,989,026 - Cheng , et al. August 2, 2 | 2011-08-02 |
Surface Modified Nanoparticles, Methods Of Their Preparation, And Uses Thereof For Gene And Drug Delivery
App 20110182996 - Fukushima; Kazuki ; et al. | 2011-07-28 |
Methods Of Directed Self-assembly And Layered Structures Formed Therefrom
App 20110147985 - CHENG; Joy ; et al. | 2011-06-23 |
Methods Of Directed Self-assembly And Layered Structures Formed Therefrom
App 20110147983 - CHENG; Joy ; et al. | 2011-06-23 |
Self-topcoating photoresist for photolithography
Grant 7,951,524 - Allen , et al. May 31, 2 | 2011-05-31 |
Aligning polymer films
Grant 7,906,031 - Cheng , et al. March 15, 2 | 2011-03-15 |
Functionalized Carbosilane Polymers and Photoresist Compositions Containing the Same
App 20110045407 - Allen; Robert D. ; et al. | 2011-02-24 |
Functionalized carbosilane polymers and photoresist compositions containing the same
Grant 7,883,828 - Allen , et al. February 8, 2 | 2011-02-08 |
Polymers Bearing Pendant Pentafluorophenyl Ester Groups, And Methods Of Synthesis And Functionalization Thereof
App 20100305281 - Fujiwara; Masaki ; et al. | 2010-12-02 |
Method of Ring-Opening Polymerization, and Related Compositions and Articles
App 20100305300 - Coulembier; Olivier ; et al. | 2010-12-02 |
Directed self-assembly of block copolymers using segmented prepatterns
App 20100294740 - Cheng; Joy ; et al. | 2010-11-25 |
Method of forming sub-lithographic features using directed self-assembly of polymers
App 20100297847 - Cheng; Joy ; et al. | 2010-11-25 |
Method of Preparing Cyclic Carbonates, Cyclic Carbamates, Cyclic Ureas, Cyclic Thiocarbonates, Cyclic Thiocarbamates, and Cyclic Dithiocarbonates
App 20100280242 - Hedrick; James L. ; et al. | 2010-11-04 |
Functionalized carbosilane polymers and photoresist compositions containing the same
Grant 7,824,845 - Allen , et al. November 2, 2 | 2010-11-02 |
Graded spin-on organic antireflective coating for photolithography
Grant 7,816,069 - Brodsky , et al. October 19, 2 | 2010-10-19 |
Method of controlling orientation of domains in block copolymer films
Grant 7,763,319 - Cheng , et al. July 27, 2 | 2010-07-27 |
Graded Topcoat Materials For Immersion Lithography
App 20100168337 - Allen; Robert D. ; et al. | 2010-07-01 |
Graded topcoat materials for immersion lithography
Grant 7,678,537 - Allen , et al. March 16, 2 | 2010-03-16 |
Self-segregating Multilayer Imaging Stack With Built-in Antireflective Properties
App 20100009132 - Cheng; Joy ; et al. | 2010-01-14 |
Graded spin-on organic antireflective coating for photolithography
Grant 7,588,879 - Brodsky , et al. September 15, 2 | 2009-09-15 |
Methods For Aligning Polymer Films And Related Structures
App 20090214823 - Cheng; Joy ; et al. | 2009-08-27 |
Aligning polymer films
App 20090212016 - Cheng; Joy ; et al. | 2009-08-27 |
Organic Graded Spin On Barc Compositions For High Na Lithography
App 20090186294 - Goldfarb; Dario L. ; et al. | 2009-07-23 |
Photoresist Compositions and Methods of Use in High Index Immersion Lithography
App 20090181321 - Ito; Hiroshi ; et al. | 2009-07-16 |
Photoresist Compositions and Methods of Use in High Index Immersion Lithography
App 20090181322 - Ito; Hiroshi ; et al. | 2009-07-16 |
Method of Controlling Orientation of Domains in Block Copolymer Films
App 20090181171 - Cheng; Joy ; et al. | 2009-07-16 |
Method Of Forming Polymer Features By Directed Self-assembly Of Block Copolymers
App 20090179002 - Cheng; Joy ; et al. | 2009-07-16 |
Method Of Use Of Epoxy-containing Cycloaliphatic Acrylic Polymers As Orientation Control Layers For Block Copolymer Thin Films
App 20090179001 - Cheng; Joy ; et al. | 2009-07-16 |
Method of Controlling Orientation of Domains in Block Copolymer Films
App 20090182093 - Cheng; Joy ; et al. | 2009-07-16 |
Method of forming polymer features by directed self-assembly of block copolymers
Grant 7,521,094 - Cheng , et al. April 21, 2 | 2009-04-21 |
Method of use of epoxy-containing cycloaliphatic acrylic polymers as orientation control layers for block copolymer thin films
Grant 7,521,090 - Cheng , et al. April 21, 2 | 2009-04-21 |
Method for the purification of semiconducting single walled carbon nanotubes
Grant 7,514,063 - Tulevski , et al. April 7, 2 | 2009-04-07 |
Functionalized Carbosilane Polymers And Photoresist Compositions Containing The Same
App 20090081585 - Allen; Robert D. ; et al. | 2009-03-26 |
Functionalized Carbosilane Polymers And Photoresist Compositions Containing The Same
App 20090081597 - Allen; Robert D. ; et al. | 2009-03-26 |
Functionalized Carbosilane Polymers And Photoresist Compositions Containing The Same
App 20090081579 - Allen; Robert D. ; et al. | 2009-03-26 |
Functionalized Carbosilane Polymers And Photoresist Compositions Containing The Same
App 20090081598 - Allen; Robert D. ; et al. | 2009-03-26 |
Impurity reduction in Olefin metathesis reactions
Grant 7,507,854 - Lee , et al. March 24, 2 | 2009-03-24 |
Multi-board presentation system
Grant 7,508,354 - Sanders , et al. March 24, 2 | 2009-03-24 |
Graded Topcoat Materials For Immersion Lithography
App 20080311506 - Allen; Robert D. ; et al. | 2008-12-18 |
Graded Topcoat Materials For Immersion Lithography
App 20080311530 - Allen; Robert D. ; et al. | 2008-12-18 |
Graded Spin-on Organic Antireflective Coating for Photolithography
App 20080213707 - Brodsky; Colin J. ; et al. | 2008-09-04 |
Self-topcoating Photoresist For Photolithography
App 20080193879 - Allen; Robert ; et al. | 2008-08-14 |
Graded spin-on organic antireflective coating for photolithography
App 20080008955 - Brodsky; Colin J. ; et al. | 2008-01-10 |
Cross-metathesis reaction of functionalized and substituted olefins using group 8 transition metal carbene complexes as metathesis catalysts
App 20070155975 - Grubbs; Robert H. ; et al. | 2007-07-05 |
System for knowledge transfer in a group setting
Grant 7,213,211 - Sanders , et al. May 1, 2 | 2007-05-01 |
Impurity reduction in Olefin metathesis reactions
App 20050203324 - Lee, Choon Woo ; et al. | 2005-09-15 |
Cross-metathesis reaction of functionalized and substituted olefins using group 8 transition metal carbene complexes as metathesis catalysts
App 20040097745 - Grubbs, Robert H. ; et al. | 2004-05-20 |
Cross-metathesis reaction of functionalized and substituted olefins using group 8 transition metal carbene complexes as metathesis catalysts
App 20030100776 - Grubbs, Robert H. ; et al. | 2003-05-29 |
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