| Patent | Date |
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Methods For Detection Using Optical Emission Spectroscopy
App 20220283029 - ZHU; Zuoming ; et al. | 2022-09-08 |
Stacked pixel structure formed using epitaxy
Grant 11,411,039 - Chen , et al. August 9, 2 | 2022-08-09 |
Temperature Profile Measurement And Synchronized Control On Substrate And Susceptor In An Epitaxy Chamber
App 20220155148 - ZHU; Zuoming ; et al. | 2022-05-19 |
Three color light sources integrated on a single wafer
Grant 11,322,649 - Chudzik , et al. May 3, 2 | 2022-05-03 |
Three Color Light Sources Integrated On A Single Wafer
App 20220085238 - Chudzik; Michael ; et al. | 2022-03-17 |
Silicide Film Nucleation
App 20220033970 - LI; Xuebi ; et al. | 2022-02-03 |
Stacked Pixel Structure Formed Using Epitaxy
App 20210366976 - CHEN; Papo ; et al. | 2021-11-25 |
Diode laser for wafer heating for EPI processes
Grant 11,171,023 - Chu , et al. November 9, 2 | 2021-11-09 |
Horizontal gate all around and FinFET device isolation
Grant 11,145,761 - Sun , et al. October 12, 2 | 2021-10-12 |
Multi Zone Spot Heating In Epi
App 20210285105 - LAU; Shu-Kwan ; et al. | 2021-09-16 |
Structure & Material Engineering Methods For Optoelectronic Devices Signal To Noise Ratio Enhancement
App 20210265416 - CHEN; Papo ; et al. | 2021-08-26 |
Silicide film nucleation
Grant 11,081,358 - Li , et al. August 3, 2 | 2021-08-03 |
In-situ integrated chambers
Grant 11,037,838 - Li , et al. June 15, 2 | 2021-06-15 |
Method of growing doped group IV materials
Grant 11,031,241 - Huang , et al. June 8, 2 | 2021-06-08 |
Multi zone spot heating in epi
Grant 11,021,795 - Lau , et al. June 1, 2 | 2021-06-01 |
Method And Apparatus For Semiconductor Processing
App 20210005478 - Sanchez; Errol Antonio C. | 2021-01-07 |
Method For Forming Silicon-phosphorous Materials
App 20200399784 - Sanchez; Errol Antonio C ; et al. | 2020-12-24 |
Susceptor support
Grant 10,837,121 - Collins , et al. November 17, 2 | 2020-11-17 |
Methods For Low Temperature Silicide Formation
App 20200283896 - LI; Xuebin ; et al. | 2020-09-10 |
EPI thickness tuning by pulse or profile spot heating
Grant 10,770,319 - Lau , et al. Sep | 2020-09-08 |
Light pipe window structure for low pressure thermal processes
Grant 10,727,093 - Brillhart , et al. | 2020-07-28 |
Method Of Growing Doped Group Iv Materials
App 20200203149 - HUANG; Yi-Chiau ; et al. | 2020-06-25 |
In-situ Integrated Chambers
App 20200091010 - LI; Xuebin ; et al. | 2020-03-19 |
Multizone Lamp Control And Individual Lamp Control In A Lamphead
App 20200045776 - HUANG; Yi-Chiau ; et al. | 2020-02-06 |
Horizontal Gate All Around And Finfet Device Isolation
App 20200035822 - SUN; Shiyu ; et al. | 2020-01-30 |
Silicide Film Nucleation
App 20200013624 - LI; Xuebin ; et al. | 2020-01-09 |
Susceptor design to eliminate deposition valleys in the wafer
Grant 10,519,547 - Ramanathan , et al. Dec | 2019-12-31 |
Horizontal gate all around and FinFET device isolation
Grant 10,490,666 - Sun , et al. Nov | 2019-11-26 |
Upper dome with injection assembly
Grant 10,458,040 - Brillhart , et al. Oc | 2019-10-29 |
Epi Thickness Tuning By Pulse Or Profile Spot Heating
App 20190267263 - LAU; Shu-Kwan Danny ; et al. | 2019-08-29 |
Multi Zone Spot Heating In Epi
App 20190127851 - LAU; Shu-Kwan ; et al. | 2019-05-02 |
Selective process for source and drain formation
Grant 10,276,688 - Bao , et al. | 2019-04-30 |
Liquid Precursor System
App 20190119814 - YE; Zhiyuan ; et al. | 2019-04-25 |
Method of epitaxial growth shape control for CMOS applications
Grant 10,205,002 - Bao , et al. Feb | 2019-02-12 |
Heating modulators to improve epi uniformity tuning
Grant 10,132,003 - Lau , et al. November 20, 2 | 2018-11-20 |
Structure for relaxed SiGe buffers including method and apparatus for forming
Grant 10,125,415 - Ye , et al. November 13, 2 | 2018-11-13 |
Selective Process For Source And Drain Formation
App 20180286961 - BAO; Xinyu ; et al. | 2018-10-04 |
Method for inter-chamber process
Grant 10,043,666 - Bao , et al. August 7, 2 | 2018-08-07 |
Method and structure to improve film stack with sensitive and reactive layers
Grant 10,043,870 - Ye , et al. August 7, 2 | 2018-08-07 |
Epitaxial Chamber With Customizable Flow Injection
App 20180209043 - LAU; SHU-KWAN ; et al. | 2018-07-26 |
Utilization of angled trench for effective aspect ratio trapping of defects in strain-relaxed heteroepitaxy of semiconductor films
Grant 10,026,613 - Srinivasan , et al. July 17, 2 | 2018-07-17 |
Method of forming structures with V shaped bottom on silicon substrate
Grant 10,002,759 - Bao , et al. June 19, 2 | 2018-06-19 |
Selective process for source and drain formation
Grant 9,923,081 - Bao , et al. March 20, 2 | 2018-03-20 |
Upper Dome With Injection Assembly
App 20180066382 - BRILLHART; Paul ; et al. | 2018-03-08 |
Horizontal Gate All Around And Finfet Device Isolation
App 20180061978 - SUN; Shiyu ; et al. | 2018-03-01 |
Method Of Epitaxial Growth Shape Control For Cmos Applications
App 20180033872 - BAO; Xinyu ; et al. | 2018-02-01 |
Method Of Forming Structures With V Shaped Bottom On Silicon Substrate
App 20180033621 - BAO; Xinyu ; et al. | 2018-02-01 |
Heating Modulators To Improve Epi Uniformity Tuning
App 20180023214 - LAU; Shu-Kwan ; et al. | 2018-01-25 |
Method And Material For Cmos Contact And Barrier Layer
App 20180019121 - BAO; Xinyu ; et al. | 2018-01-18 |
Horizontal gate all around and FinFET device isolation
Grant 9,865,735 - Sun , et al. January 9, 2 | 2018-01-09 |
Apparatus for impurity layered epitaxy
Grant 9,856,580 - Sanchez , et al. January 2, 2 | 2018-01-02 |
Upper dome with injection assembly
Grant 9,845,550 - Brillhart , et al. December 19, 2 | 2017-12-19 |
Structure For Relaxed Sige Buffers Including Method And Apparatus For Forming
App 20170335444 - YE; Zhiyuan ; et al. | 2017-11-23 |
Utilization Of Angled Trench For Effective Aspect Ratio Trapping Of Defects In Strain-relaxed Heteroepitaxy Of Semiconductor Films
App 20170330750 - SRINIVASAN; Swaminathan T. ; et al. | 2017-11-16 |
Method for forming group III/V conformal layers on silicon substrates
Grant 9,799,737 - Bao , et al. October 24, 2 | 2017-10-24 |
Utilization of angled trench for effective aspect ratio trapping of defects in strain-relaxed heteroepitaxy of semiconductor films
Grant 9,799,531 - Srinivasan , et al. October 24, 2 | 2017-10-24 |
Susceptor Support
App 20170275777 - COLLINS; Richard O. ; et al. | 2017-09-28 |
Structure for relaxed SiGe buffers including method and apparatus for forming
Grant 9,752,224 - Ye , et al. September 5, 2 | 2017-09-05 |
Method For Inter-chamber Process
App 20170250078 - BAO; Xinyu ; et al. | 2017-08-31 |
Materials For Tensile Stress And Low Contact Resistance And Method Of Forming
App 20170148918 - YE; Zhiyuan ; et al. | 2017-05-25 |
Diode Laser For Wafer Heating For Epi Processes
App 20170103907 - CHU; Schubert S. ; et al. | 2017-04-13 |
Structure For Relaxed Sige Buffers Including Method And Apparatus For Forming
App 20170040421 - YE; Zhiyuan ; et al. | 2017-02-09 |
Method And Apparatus For The Selective Deposition Of Epitaxial Germanium Stressor Alloys
App 20170037536 - SANCHEZ; Errol Antonio C. ; et al. | 2017-02-09 |
MOCVD growth of highly mismatched III-V CMOS channel materials on silicon substrates
Grant 9,530,888 - Ban , et al. December 27, 2 | 2016-12-27 |
Injector For Semiconductor Epitaxy Growth
App 20160362813 - BAO; Xinyu ; et al. | 2016-12-15 |
Semiconductor substrate processing system
Grant 9,512,520 - Sanchez , et al. December 6, 2 | 2016-12-06 |
Method For Forming Group Iii/v Conformal Layers On Silicon Substrates
App 20160343811 - BAO; Xinyu ; et al. | 2016-11-24 |
Horizontal Gate All Around And Finfet Device Isolation
App 20160336405 - SUN; Shiyu ; et al. | 2016-11-17 |
Method and apparatus for the selective deposition of epitaxial germanium stressor alloys
Grant 9,476,144 - Sanchez , et al. October 25, 2 | 2016-10-25 |
Utlization Of Angled Trench For Effective Aspect Ratio Trapping Of Defects In Strain-relaxed Heteroepitaxy Of Semiconductor Films
App 20160307774 - SRINIVASAN; Swaminathan T. ; et al. | 2016-10-20 |
Mocvd Growth Of Highly Mismatched Iii-v Cmos Channel Materials On Silicon Substrates
App 20160293764 - BAN; Keun-Yong ; et al. | 2016-10-06 |
Utilization of angled trench for effective aspect ratio trapping of defects in strain relaxed heteroepitaxy of semiconductor films
Grant 9,406,507 - Srinivasan , et al. August 2, 2 | 2016-08-02 |
Susceptor Design To Eliminate Deposition Valleys In The Wafer
App 20160215393 - RAMANATHAN; Karthik ; et al. | 2016-07-28 |
Structure for III-V devices on silicon
Grant 9,373,502 - Bao , et al. June 21, 2 | 2016-06-21 |
Compact ampoule thermal management system
Grant 9,347,696 - Carlson , et al. May 24, 2 | 2016-05-24 |
Method And Structure To Improve Film Stack With Sensitive And Reactive Layers
App 20160126322 - YE; Zhiyuan ; et al. | 2016-05-05 |
Methods for depositing group III-V layers on substrates
Grant 9,299,560 - Sanchez , et al. March 29, 2 | 2016-03-29 |
Method of forming III-V channel
Grant 9,293,523 - Bao , et al. March 22, 2 | 2016-03-22 |
Honeycomb Multi-zone Gas Distribution Plate
App 20160068955 - BRILLHART; Paul ; et al. | 2016-03-10 |
Atmospheric Epitaxial Deposition Chamber
App 20160068959 - LAU; Shu-Kwan ; et al. | 2016-03-10 |
Compact ampoule thermal management system
Grant 9,279,604 - Carlson , et al. March 8, 2 | 2016-03-08 |
Recursive Pumping Member
App 20160033070 - BRILLHART; Paul ; et al. | 2016-02-04 |
Method Of Forming Iii-v Channel
App 20150372097 - BAO; Xinyu ; et al. | 2015-12-24 |
Light Pipe Window Structure For Low Pressure Thermal Processes
App 20150340257 - BRILLHART; PAUL ; et al. | 2015-11-26 |
Methods for chemical mechanical planarization of patterned wafers
Grant 9,177,815 - Huang , et al. November 3, 2 | 2015-11-03 |
Utilization Of Angled Trench For Effective Aspect Ratio Trapping Of Defects In Strain-relaxed Heteroepitaxy Of Semiconductor Films
App 20150311292 - SRINIVASAN; Swaminathan T. ; et al. | 2015-10-29 |
Method of epitaxial germanium tin alloy surface preparation
Grant 9,171,718 - Sanchez , et al. October 27, 2 | 2015-10-27 |
Structure and method of forming metamorphic heteroepi materials and III-V channel structures on si
Grant 9,159,554 - Sanchez , et al. October 13, 2 | 2015-10-13 |
Epitaxial chamber with cross flow
Grant 9,127,360 - Ramachandran , et al. September 8, 2 | 2015-09-08 |
Upper Dome With Injection Assembly
App 20150233016 - BRILLHART; Paul ; et al. | 2015-08-20 |
Method of epitaxial doped germanium tin alloy formation
Grant 9,082,684 - Sanchez , et al. July 14, 2 | 2015-07-14 |
Chemical delivery system
Grant 9,032,990 - Josephson , et al. May 19, 2 | 2015-05-19 |
Methods for depositing a tin-containing layer on a substrate
Grant 9,029,264 - Sanchez , et al. May 12, 2 | 2015-05-12 |
Apparatus For Impurity Layered Epitaxy
App 20150047566 - SANCHEZ; Errol Antonio C. ; et al. | 2015-02-19 |
Structure For Iii-v Devices On Silicon
App 20140357057 - BAO; Xinyu ; et al. | 2014-12-04 |
Structure And Method Of Forming Metamorphic Heteroepi Materials And Iii-v Channel Structures On Si
App 20140329376 - SANCHEZ; Errol Antonio C. ; et al. | 2014-11-06 |
Method of forming high growth rate, low resistivity germanium film on silicon substrate
Grant 8,822,312 - Huang , et al. September 2, 2 | 2014-09-02 |
Method of forming high growth rate, low resistivity germanium film on silicon substrate
Grant 8,759,201 - Huang , et al. June 24, 2 | 2014-06-24 |
Method For Forming Group Iii/v Conformal Layers On Silicon Substrates
App 20140159112 - BAO; Xinyu ; et al. | 2014-06-12 |
Method Of Epitaxial Germanium Tin Alloy Surface Preparation
App 20140154875 - SANCHEZ; Errol Antonio C. ; et al. | 2014-06-05 |
Epitaxial Chamber With Customizable Flow Injection
App 20140137801 - LAU; SHU-KWAN ; et al. | 2014-05-22 |
Methods and apparatus for forming silicon germanium-carbon semiconductor structures
Grant 8,669,590 - Sanchez , et al. March 11, 2 | 2014-03-11 |
Methods for low temperature conditioning of process chambers
Grant 8,658,540 - Huang , et al. February 25, 2 | 2014-02-25 |
Selective epitaxial germanium growth on silicon-trench fill and in situ doping
Grant 8,652,951 - Huang , et al. February 18, 2 | 2014-02-18 |
Method of epitaxial germanium tin alloy surface preparation
Grant 8,647,439 - Sanchez , et al. February 11, 2 | 2014-02-11 |
Method Of Semiconductor Film Stabilization
App 20130330911 - HUANG; Yi-Chiau ; et al. | 2013-12-12 |
Method for forming group III/V conformal layers on silicon substrates
Grant 8,603,898 - Bao , et al. December 10, 2 | 2013-12-10 |
Compact Ampoule Thermal Management System
App 20130319015 - CARLSON; DAVID K. ; et al. | 2013-12-05 |
Compact Ampoule Thermal Management System
App 20130319013 - CARLSON; DAVID K. ; et al. | 2013-12-05 |
Methods For Chemical Mechanical Planarization Of Patterned Wafers
App 20130295752 - HUANG; YI-CHIAU ; et al. | 2013-11-07 |
Method Of Epitaxial Germanium Tin Alloy Surface Preparation
App 20130288480 - SANCHEZ; ERROL ANTONIO C. ; et al. | 2013-10-31 |
Method And Apparatus For Germanium Tin Alloy Formation By Thermal Cvd
App 20130280891 - KIM; YIHWAN ; et al. | 2013-10-24 |
Methods And Apparatus For Generating And Delivering A Process Gas For Processing A Substrate
App 20130269613 - SANCHEZ; ERROL ANTONIO C. ; et al. | 2013-10-17 |
Method For Forming Group Iii/v Conformal Layers On Silicon Substrates
App 20130256760 - Bao; Xinyu ; et al. | 2013-10-03 |
Method Of Epitaxial Doped Germanium Tin Alloy Formation
App 20130256838 - SANCHEZ; ERROL ANTONIO C. ; et al. | 2013-10-03 |
METHODS FOR DEPOSITING A TiN-CONTAINING LAYER ON A SUBSTRATE
App 20130240478 - SANCHEZ; ERROL ANTONIO C. ; et al. | 2013-09-19 |
Method And Apparatus For Precursor Delivery
App 20130220221 - SANCHEZ; ERROL ANTONIO C. ; et al. | 2013-08-29 |
Selective Epitaxial Germanium Growth On Silicon-trench Fill And In Situ Doping
App 20130210221 - HUANG; YI-CHIAU ; et al. | 2013-08-15 |
Methods For Depositing Group Iii-v Layers On Substrates
App 20130183815 - SANCHEZ; ERROL ANTONIO C. ; et al. | 2013-07-18 |
Method Of Depositing A Silicon Germanium Tin Layer On A Substrate
App 20130183814 - HUANG; YI-CHIAU ; et al. | 2013-07-18 |
Apparatus For Sublimating Solid State Precursors
App 20130105483 - CARLSON; David K. ; et al. | 2013-05-02 |
Method And Apparatus For Cleaning A Substrate Surface
App 20130068390 - SANCHEZ; Errol Antonio C. ; et al. | 2013-03-21 |
Methods And Apparatus For Forming Semiconductor Structures
App 20130026540 - SANCHEZ; ERROL ANTONIO C. ; et al. | 2013-01-31 |
Method Of Forming High Growth Rate, Low Resistivity Germanium Film On Silicon Substrate
App 20120306055 - Huang; Yi-Chiau ; et al. | 2012-12-06 |
Method Of Forming High Growth Rate, Low Resistivity Germanium Film On Silicon Substrate
App 20120306054 - Huang; Yi-Chiau ; et al. | 2012-12-06 |
Method and apparatus for cleaning a substrate surface
Grant 8,309,440 - Sanchez , et al. November 13, 2 | 2012-11-13 |
Semiconductor Substrate Processing System
App 20120266819 - SANCHEZ; ERROL ANTONIO C. ; et al. | 2012-10-25 |
Apparatus For Deposition Of Materials On A Substrate
App 20120270384 - SANCHEZ; ERROL ANTONIO C. ; et al. | 2012-10-25 |
Chemical Delivery System
App 20120266984 - JOSEPHSON; MARCEL E. ; et al. | 2012-10-25 |
Method And Apparatus For The Selective Deposition Of Epitaxial Germanium Stressor Alloys
App 20120247386 - Sanchez; Errol Antonio C. ; et al. | 2012-10-04 |
Methods For Low Temperature Conditioning Of Process Chambers
App 20110306186 - HUANG; YI-CHIAU ; et al. | 2011-12-15 |
Method And Apparatus For Cleaning A Substrate Surface
App 20110263103 - SANCHEZ; Errol Antonio C. ; et al. | 2011-10-27 |
Apparatus And Methods For Chemical Vapor Deposition
App 20110217466 - Carlson; David K. ; et al. | 2011-09-08 |
Method and apparatus for cleaning a substrate surface
Grant 8,008,166 - Sanchez , et al. August 30, 2 | 2011-08-30 |
Epitaxial Chamber With Cross Flow
App 20110174212 - RAMACHANDRAN; BALASUBRAMANIAN ; et al. | 2011-07-21 |
Method and apparatus for forming a high quality low temperature silicon nitride layer
Grant 7,972,663 - Wang , et al. July 5, 2 | 2011-07-05 |
Apparatus and methods for chemical vapor deposition
Grant 7,967,911 - Carlson , et al. June 28, 2 | 2011-06-28 |
Parallel System For Epitaxial Chemical Vapor Deposition
App 20110100554 - CARLSON; DAVID K. ; et al. | 2011-05-05 |
Selective deposition
Grant 7,560,352 - Carlson , et al. July 14, 2 | 2009-07-14 |
Method And Apparatus For Cleaning A Substrate Surface
App 20090029528 - SANCHEZ; Errol Antonio C. ; et al. | 2009-01-29 |
Method for silicon nitride chemical vapor deposition
Grant 7,365,029 - Iyer , et al. April 29, 2 | 2008-04-29 |
Apparatus and Methods for Chemical Vapor Deposition
App 20080014350 - Carlson; David K. ; et al. | 2008-01-17 |
Method for forming a high quality low temperature silicon nitride film
Grant 7,172,792 - Wang , et al. February 6, 2 | 2007-02-06 |
Selective deposition
App 20060166414 - Carlson; David K. ; et al. | 2006-07-27 |
Method for silicon nitride chemical vapor deposition
App 20050255714 - Iyer, R. Suryanarayanan ; et al. | 2005-11-17 |
Methods for forming silicon comprising films using hexachlorodisilane in a single-wafer deposion chamber
Grant 6,884,464 - Luo , et al. April 26, 2 | 2005-04-26 |
Method and apparatus for forming a high quality low temperature silicon nitride layer
App 20040194706 - Wang, Shulin ; et al. | 2004-10-07 |
Method and apparatus for forming a high quality low temperature silicon nitride film
App 20040121085 - Wang, Shulin ; et al. | 2004-06-24 |
Methods for forming silicon comprising films using hexachlorodisilane in a single-wafer deposion chamber
App 20040086640 - Luo, Lee ; et al. | 2004-05-06 |
Deposition of silicon nitride
App 20030215570 - Seutter, Sean M. ; et al. | 2003-11-20 |
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