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Semiconductor Device App 20180261454 - BAO; Xinyu ;   et al. | 2018-09-13 |
Substrate support for use with multi-zonal heating sources Grant 9,570,328 - Patalay , et al. February 14, 2 | 2017-02-14 |
Semiconductor Device App 20170004968 - BAO; Xinyu ;   et al. | 2017-01-05 |
Methods for depositing layers having reduced interfacial contamination Grant 9,058,988 - Vatus , et al. June 16, 2 | 2015-06-16 |
Fin formation by epitaxial deposition Grant 8,999,821 - Brand , et al. April 7, 2 | 2015-04-07 |
Apparatus to control semiconductor film deposition characteristics Grant 8,991,332 - Kuppurao , et al. March 31, 2 | 2015-03-31 |
Fin Formation By Epitaxial Deposition App 20150050800 - Brand; Adam ;   et al. | 2015-02-19 |
Susceptor with backside area of constant emissivity Grant 8,524,555 - Sanchez , et al. September 3, 2 | 2013-09-03 |
Methods for forming silicon germanium layers Grant 8,501,594 - Huang , et al. August 6, 2 | 2013-08-06 |
Methods for depositing germanium-containing layers Grant 8,501,600 - Sanchez , et al. August 6, 2 | 2013-08-06 |
Apparatus and methods for chemical vapor deposition Grant 8,313,804 - Carlson , et al. November 20, 2 | 2012-11-20 |
Susceptor With Backside Area Of Constant Emissivity App 20120282714 - Sanchez; Errol ;   et al. | 2012-11-08 |
Susceptor with backside area of constant emissivity Grant 8,226,770 - Sanchez , et al. July 24, 2 | 2012-07-24 |
Methods For Depositing Germanium-containing Layers App 20120077335 - SANCHEZ; ERROL ;   et al. | 2012-03-29 |
Substrate Support For Use With Multi-zonal Heating Sources App 20120003599 - PATALAY; KAILASH ;   et al. | 2012-01-05 |
Substrate Processing Apparatus Having A Radiant Cavity App 20110155058 - Carlson; David K. ;   et al. | 2011-06-30 |
Methods For Forming Silicon Germanium Layers App 20100317177 - HUANG; YI-CHIAU ;   et al. | 2010-12-16 |
Method for surface treatment of semiconductor substrates Grant 7,838,431 - Sanchez November 23, 2 | 2010-11-23 |
Methods For Depositing Layers Having Reduced Interfacial Contamination App 20100255661 - VATUS; JEAN R. ;   et al. | 2010-10-07 |
Methods to fabricate MOSFET devices using a selective deposition process Grant 7,737,007 - Samoilov , et al. June 15, 2 | 2010-06-15 |
Method of ultra-shallow junction formation using Si film alloyed with carbon Grant 7,732,269 - Kim , et al. June 8, 2 | 2010-06-08 |
Method to control semiconductor film deposition characteristics Grant 7,718,225 - Kuppurao , et al. May 18, 2 | 2010-05-18 |
Methods For Forming Silicon Germanium Layers App 20100120235 - HUANG; Yi-Chiau ;   et al. | 2010-05-13 |
Methods for in-situ generation of reactive etch and growth specie in film formation processes Grant 7,709,391 - Kuppurao , et al. May 4, 2 | 2010-05-04 |
Method For Surface Treatment Of Semiconductor Substrates App 20090311850 - Sanchez; Errol | 2009-12-17 |
Apparatus to Control Semiconductor Film Deposition Characteristics App 20090211523 - Kuppurao; Satheesh ;   et al. | 2009-08-27 |
Methods To Fabricate Mosfet Devices Using A Selective Deposition Process App 20090011578 - SAMOILOV; ARKADII V. ;   et al. | 2009-01-08 |
Susceptor With Backside Area Of Constant Emissivity App 20080274604 - Sanchez; Errol ;   et al. | 2008-11-06 |
Methods to fabricate MOSFET devices using a selective deposition process Grant 7,439,142 - Samoilov , et al. October 21, 2 | 2008-10-21 |
Method Of Ultra-shallow Junction Formation Using Si Film Alloyed With Carbon App 20070256627 - KIM; YIHWAN ;   et al. | 2007-11-08 |
Methods for in-situ generation of reactive etch and growth specie in film formation processes App 20070170148 - Kuppurao; Satheesh ;   et al. | 2007-07-26 |
Methods To Fabricate Mosfet Devices Using A Selective Deposition Process App 20070082451 - SAMOILOV; ARKADII V. ;   et al. | 2007-04-12 |
Method and apparatus to control semiconductor film deposition characteristics App 20070042117 - Kuppurao; Satheesh ;   et al. | 2007-02-22 |
Methods to fabricate MOSFET devices using selective deposition process Grant 7,132,338 - Samoilov , et al. November 7, 2 | 2006-11-07 |
Bi-layer silicon film and method of fabrication Grant 6,991,999 - Fu , et al. January 31, 2 | 2006-01-31 |
Methods to fabricate MOSFET devices using selective deposition process App 20050079692 - Samoilov, Arkadii V. ;   et al. | 2005-04-14 |
Method of controlling the crystal structure of polycrystalline silicon Grant 6,726,955 - Wang , et al. April 27, 2 | 2004-04-27 |
Silicon deposition process in resistively heated single wafer chamber App 20030207547 - Wang, Shulin ;   et al. | 2003-11-06 |
Bi-layer silicon film and method of fabrication App 20030047734 - Fu, Li ;   et al. | 2003-03-13 |
Doped Silicon Deposition Process In Resistively Heated Single Wafer Chamber App 20020173127 - Wang, Shulin ;   et al. | 2002-11-21 |