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Patent applications and USPTO patent grants for Sanbei, Tetsuhiko.The latest application filed is for "method for manufacturing optical bench, optical bench, optical module, silicon wafer substrate in which wiring and groove are formed, and wafer".
Patent | Date |
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Method for manufacturing optical bench, optical bench, optical module, silicon wafer substrate in which wiring and groove are formed, and wafer App 20040266093 - Fukao, Ryuzou ;   et al. | 2004-12-30 |
Dry etching process for semiconductor Grant 5,522,966 - Komura , et al. June 4, 1 | 1996-06-04 |
Dry etching process for semiconductor Grant 5,423,941 - Komura , et al. June 13, 1 | 1995-06-13 |
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