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Method of simultaneous lithography and etch correction flow Grant 9,910,348 - Han , et al. March 6, 2 | 2018-03-06 |
Method Of Simultaneous Lithography And Etch Correction Flow App 20170004233 - Han; Geng ;   et al. | 2017-01-05 |
Methods and systems to meet technology pattern density requirements of semiconductor fabrication processes Grant 8,423,945 - Bickford , et al. April 16, 2 | 2013-04-16 |
Methods and Systems to Meet Technology Pattern Density Requirements of Semiconductor Fabrication Processes App 20110289470 - BICKFORD; Jeanne P. ;   et al. | 2011-11-24 |
Line ends forming Grant 7,993,815 - Colburn , et al. August 9, 2 | 2011-08-09 |
Polyconductor line end formation and related mask Grant 7,727,825 - Butt , et al. June 1, 2 | 2010-06-01 |
Facsimile system, method and program product with junk fax disposal Grant 7,715,059 - Advocate , et al. May 11, 2 | 2010-05-11 |
Polyconductor Line End Formation And Related Mask App 20090117737 - Butt; Shahid A. ;   et al. | 2009-05-07 |
Memory Cell App 20090065956 - Colburn; Matthew E. ;   et al. | 2009-03-12 |
Line Ends Forming App 20090068837 - Colburn; Matthew E. ;   et al. | 2009-03-12 |
Alternating Phase Shift Mask Optimization For Improved Process Window App 20090037866 - Graur; Ioana C. ;   et al. | 2009-02-05 |
Polyconductor line end formation and related mask Grant 7,465,615 - Butt , et al. December 16, 2 | 2008-12-16 |
Method for adaptive segment refinement in optical proximity correction Grant 7,043,712 - Mukherjee , et al. May 9, 2 | 2006-05-09 |
Facsimile system, method and program product with junk fax disposal App 20050088702 - Advocate, William H. ;   et al. | 2005-04-28 |
Method For Adaptive Segment Refinement In Optical Proximity Correction App 20050055658 - Mukherjee, Maharaj ;   et al. | 2005-03-10 |
Method Of Optical Proximity Correction With Sub-resolution Assists App 20040166418 - Samuels, Donald J. | 2004-08-26 |
Method of optical proximity correction with sub-resolution assists Grant 6,777,146 - Samuels August 17, 2 | 2004-08-17 |
Process for inspecting an object Grant 6,483,937 - Samuels November 19, 2 | 2002-11-19 |
Optical proximity correction (OPC) using automated shape and edge pre-sorting App 20020138810 - Lavin, Mark A. ;   et al. | 2002-09-26 |
Method to overcome image shortening by use of sub-resolution reticle features Grant 6,451,490 - Advocate , et al. September 17, 2 | 2002-09-17 |
Dummy feature reduction using optical proximity effect correction Grant 6,426,269 - Haffner , et al. July 30, 2 | 2002-07-30 |
Method of modifying a microchip layout data set to generate a predicted mask printed data set Grant 6,261,724 - Bula , et al. July 17, 2 | 2001-07-17 |
Split and cover technique for phase shifting photolithography Grant 5,523,186 - Lin , et al. June 4, 1 | 1996-06-04 |
Method of optimizing exposure of photoresist by patterning as a function of thermal modeling Grant 5,304,441 - Samuels , et al. April 19, 1 | 1994-04-19 |