Patent | Date |
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Parallel multi wafer axial spin clean processing using spin cassette inside movable process chamber Grant 9,786,486 - Brar , et al. October 10, 2 | 2017-10-10 |
Semiconductor manufacturing equipment with trace elements for improved defect tracing and methods of manufacture Grant 9,385,018 - Winters , et al. July 5, 2 | 2016-07-05 |
Forming vias and trenches for self-aligned contacts in a semiconductor structure Grant 9,287,162 - Lao March 15, 2 | 2016-03-15 |
Multi-level Stack Having Multi-level Contact And Method App 20150357237 - Lao; Keith | 2015-12-10 |
Parallel Multi Wafer Axial Spin Clean Processing Using Spin Cassette Inside Movable Process Chamber App 20150303052 - Brar; Amuldeep S. ;   et al. | 2015-10-22 |
Multi-level stack having multi-level contact and method Grant 9,111,998 - Lao August 18, 2 | 2015-08-18 |
High selectivity slurry delivery system Grant 8,951,095 - Lujan , et al. February 10, 2 | 2015-02-10 |
Method and apparatus for fabrication of carbon nanotubes using an electrostatically charged substrate and liner Grant 8,887,663 - Stebbins , et al. November 18, 2 | 2014-11-18 |
Forming Vias And Trenches For Self-aligned Contacts In A Semiconductor Structure App 20140191409 - Lao; Keith Quoc | 2014-07-10 |
Removable transparent membrane for a pellicle Grant 8,586,267 - Lao November 19, 2 | 2013-11-19 |
Apparatus for agitating and evacuating byproduct dust from a semiconductor processing chamber Grant 8,580,044 - McCormick , et al. November 12, 2 | 2013-11-12 |
Selective imaging through dual photoresist layers Grant 8,383,323 - Morrison , et al. February 26, 2 | 2013-02-26 |
Semiconductor workpiece apparatus Grant 8,323,411 - Loo December 4, 2 | 2012-12-04 |
Parallel Multi Wafer Axial Spin Clean Processing Using Spin Cassette Inside Movable Process Chamber App 20120189421 - Brar; Amuldeep S. ;   et al. | 2012-07-26 |
Apparatus for agitating and evacuating byproduct dust from a semiconductor processing chamber App 20120037188 - McCormick; Eric ;   et al. | 2012-02-16 |
Rupture resistant plasma tube Grant 7,759,600 - Heemstra , et al. July 20, 2 | 2010-07-20 |
Fuzzy logic system for process control in chemical mechanical polishing Grant 7,636,611 - Huandra December 22, 2 | 2009-12-22 |
System and method for haze control in semiconductor processes Grant 7,486,391 - Chen , et al. February 3, 2 | 2009-02-03 |
Hot edge ring apparatus and method for increased etch rate uniformity and reduced polymer buildup App 20080289766 - Heemstra; David ;   et al. | 2008-11-27 |
Apparatus and method for breaking in multiple pad conditioning disks for use in a chemical mechanical polishing system Grant 7,404,757 - Lujan July 29, 2 | 2008-07-29 |
Off-line tool for breaking in multiple pad conditioning disks used in a chemical mechanical polishing system Grant 7,371,156 - Lujan May 13, 2 | 2008-05-13 |
System and method for haze control in semiconductor processes App 20080062414 - Chen; Xiaoming ;   et al. | 2008-03-13 |
Off-line tool for breaking in multiple pad conditioning disks used in a chemical mechanical polishing system Grant 7,094,134 - Lujan August 22, 2 | 2006-08-22 |
Semiconductor workpiece apparatus Grant 6,939,132 - Loo September 6, 2 | 2005-09-06 |
High selectivity slurry delivery system Grant 6,884,145 - Lujan , et al. April 26, 2 | 2005-04-26 |
High selectivity slurry delivery system App 20040106355 - Lujan, Randall ;   et al. | 2004-06-03 |
Semiconductor workpiece apparatus App 20040061210 - Loo, John | 2004-04-01 |
Methods to improve density and uniformity of hemispherical grain silicon layers Grant 6,689,668 - el-Hamdi , et al. February 10, 2 | 2004-02-10 |
Plasma coil App 20030102811 - Leone, Mike ;   et al. | 2003-06-05 |
Retaining ring for chemical mechanical polishing Grant 6,224,472 - Lai , et al. May 1, 2 | 2001-05-01 |