Sams; Benjamin
Patent Applications and Registrations
Patent applications and USPTO patent grants for Sams; Benjamin.The latest application filed is for "method and apparatus for purifying target material for euv light source".
- Sams; Benjamin - San Diego CA
- Sams; Benjamin - La Jolla CA
| Patent | Date |
|---|---|
| Method of purifying target material for an EUV light source Grant 11,317,501 - Vaschenko , et al. April 26, 2 | 2022-04-26 |
| Method And Apparatus For Purifying Target Material For Euv Light Source App 20200015343 - VASCHENKO; Georgiy ; et al. | 2020-01-09 |
| Method and apparatus for purifying target material for EUV light source Grant 10,455,680 - Vaschenko , et al. Oc | 2019-10-22 |
| Method And Apparatus For Purifying Target Material For Euv Light Source App 20170247778 - Vaschenko; Georgiy ; et al. | 2017-08-31 |
| Multimodal Dynamic Robotic Systems App 20120215355 - Bewley; Thomas R. ; et al. | 2012-08-23 |
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