| Patent | Date |
|---|
Method of evaluating silicon layer and a method of manufacturing silicon epitaxial wafer
Grant 11,183,433 - Makise , et al. November 23, 2 | 2021-11-23 |
Method of evaluating carbon concentration of silicon sample, method of evaluating silicon wafer manufacturing process, method of manufacturing silicon wafer, method of manufacturing silicon single crystal ingot, silicon single crystal ingot and silicon wafer
Grant 11,047,800 - Eriguchi , et al. June 29, 2 | 2021-06-29 |
Method of measuring carbon concentration of silicon sample, method of manufacturing silicon single crystal ingot, silicon single crystal ingot and silicon wafer
Grant 10,935,510 - Eriguchi , et al. March 2, 2 | 2021-03-02 |
Method Of Evaluating Silicon Layer And A Method Of Manufacturing Silicon Epitaxial Wafer
App 20200343149 - MAKISE; Sayaka ; et al. | 2020-10-29 |
Method of evaluating manufacturing process of silicon material and manufacturing method of silicon material
Grant 10,676,840 - Mitsugi , et al. | 2020-06-09 |
Method Of Evaluating Carbon Concentration Of Silicon Sample, Method Of Evaluating Silicon Wafer Manufacturing Process, Method Of
App 20190162668 - ERIGUCHI; Kazutaka ; et al. | 2019-05-30 |
Method Of Measuring Carbon Concentration Of Silicon Sample, Method Of Manufacturing Silicon Single Crystal Ingot, Silicon Single Crystal Ingot And Silicon Wafer
App 20190064098 - ERIGUCHI; Kazutaka ; et al. | 2019-02-28 |
Method Of Evaluating Manufacturing Process Of Silicon Material And Manufacturing Method Of Silicon Material
App 20180179661 - MITSUGI; Noritomo ; et al. | 2018-06-28 |
Method of removing heavy metal in semiconductor substrate
Grant 8,173,523 - Mitsugi , et al. May 8, 2 | 2012-05-08 |
Method Of Removing Heavy Metal In Semiconductor Substrate
App 20110086494 - Mitsugi; Noritomo ; et al. | 2011-04-14 |
System, method and program for designing a utility facility and method for manufacturing a product by the utility facility
Grant 7,844,433 - Masuda , et al. November 30, 2 | 2010-11-30 |
System, method and program for designing a utility facility and method for manufacturing a product by the utility facility
App 20070061049 - Masuda; Toshikatsu ; et al. | 2007-03-15 |
Manufacturing apparatus and method for predicting life of a manufacturing apparatus which uses a rotary machine
Grant 7,065,469 - Samata , et al. June 20, 2 | 2006-06-20 |
Apparatus for predicting life of rotary machine and equipment using the same
Grant 6,944,572 - Ushiku , et al. September 13, 2 | 2005-09-13 |
Method for avoiding irregular shutoff of production equipment and system for avoiding irregular shutoff
Grant 6,937,963 - Ishii , et al. August 30, 2 | 2005-08-30 |
Method for diagnosing failure of a manufacturing apparatus and a failure diagnosis system
Grant 6,909,993 - Nakao , et al. June 21, 2 | 2005-06-21 |
System for predicting life of a rotary machine, method for predicting life of a manufacturing apparatus which uses a rotary machine and a manufacturing apparatus
Grant 6,898,551 - Samata , et al. May 24, 2 | 2005-05-24 |
Manufacturing apparatus and method for predicting life of rotary machine used in the same
App 20050107984 - Samata, Shuichi ; et al. | 2005-05-19 |
Method for predicting life span of rotary machine used in manufacturing apparatus and life predicting system
Grant 6,885,972 - Samata , et al. April 26, 2 | 2005-04-26 |
Method for predicting life of rotary machine and determining repair timing of rotary machine
Grant 6,865,513 - Ushiku , et al. March 8, 2 | 2005-03-08 |
Apparatus for predicting life of rotary machine and equipment using the same
App 20040143418 - Ushiku, Yukihiro ; et al. | 2004-07-22 |
Method for diagnosing life of manufacturing equipment using rotary machine
Grant 6,766,275 - Samata , et al. July 20, 2 | 2004-07-20 |
Manufacturing apparatus and method for predicting life of rotary machine used in the same
App 20040064212 - Samata, Shuichi ; et al. | 2004-04-01 |
Manufacturing apparatus and method for predicting life of a manufacturing apparatus which uses a rotary machine
App 20040064277 - Samata, Shuichi ; et al. | 2004-04-01 |
System for predicting life of a rotary machine, method for predicting life of a manufacturing apparatus which uses a rotary machine and a manufacturing apparatus
App 20040064291 - Samata, Shuichi ; et al. | 2004-04-01 |
Method for avoiding irregular shutoff of production equipment and system for avoiding irregular shutoff
App 20030158705 - Ishii, Ken ; et al. | 2003-08-21 |
Method for predicting life span of rotary machine used in manufacturing apparatus and life predicting system
App 20030153997 - Samata, Shuichi ; et al. | 2003-08-14 |
Method for diagnosing life of manufacturing equipment using rotary machine
App 20030154052 - Samata, Shuichi ; et al. | 2003-08-14 |
Method for diagnosing failure of a manufacturing apparatus and a failure diagnosis system
App 20030149547 - Nakao, Takashi ; et al. | 2003-08-07 |
Apparatus for predicting life of rotary machine, equipment using the same, method for predicting life and determining repair timing of the same
App 20030009311 - Ushiku, Yukihiro ; et al. | 2003-01-09 |
Thin film thickness monitoring method and substrate temperature measuring method
App 20020141477 - Akahori, Hiroshi ; et al. | 2002-10-03 |
Manufacturing method of semiconductor substrate and inspection method therefor
Grant 5,951,755 - Miyashita , et al. September 14, 1 | 1999-09-14 |
Semiconductor silicon wafer and process for producing it
Grant 5,738,942 - Kubota , et al. April 14, 1 | 1998-04-14 |
Process for producing Semiconductor silicon wafer
Grant 5,534,294 - Kubota , et al. July 9, 1 | 1996-07-09 |
Semiconductor substrate containing bulk micro-defect
Grant 5,502,331 - Inoue , et al. March 26, 1 | 1996-03-26 |
Method of making a through hole in multi-layer insulating films
Grant 5,378,652 - Samata , et al. January 3, 1 | 1995-01-03 |
Semiconductor device and its manufacturing method
Grant 5,356,830 - Yoshikawa , et al. October 18, 1 | 1994-10-18 |
Semiconductor device silicon via fill formed in multiple dielectric layers
Grant 5,291,058 - Samata , et al. March 1, 1 | 1994-03-01 |
Vapor phase epitaxial growth apparatus
Grant 5,246,500 - Samata , et al. September 21, 1 | 1993-09-21 |
Filling contact hole with selectively deposited EPI and poly silicon
Grant 5,124,276 - Samata , et al. June 23, 1 | 1992-06-23 |
Method of manufacturing a semiconductor device having improved contact resistance characteristics
Grant 5,116,780 - Samata , et al. May 26, 1 | 1992-05-26 |
Semiconductor device with improved wiring contact portion
Grant 5,057,899 - Samata , et al. October 15, 1 | 1991-10-15 |
Preparation method of selective growth silicon layer doped with impurities
Grant 5,004,702 - Samata , et al. April 2, 1 | 1991-04-02 |
| 