Saly; Mark J.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Saly; Mark J..The latest application filed is for "methods for selective dry etching gallium oxide".
- Saly; Mark J. - Santa Clara CA
- Saly; Mark J. - North Andover MA
| Patent | Date |
|---|---|
| Methods For Selective Dry Etching Gallium Oxide App 20220301883 - Liu; Feng Q. ; et al. | 2022-09-22 |
| Methods for selective dry etching gallium oxide Grant 11,398,388 - Liu , et al. July 26, 2 | 2022-07-26 |
| Methods For Selective Dry Etching Gallium Oxide App 20220076960 - Liu; Feng Q. ; et al. | 2022-03-10 |
| Methods for depositing silicon nitride Grant 11,107,674 - Kalutarage , et al. August 31, 2 | 2021-08-31 |
| Methods To Fabricate Dual Pore Devices App 20210215664 - SALY; Mark J. ; et al. | 2021-07-15 |
| Corrosion Resistant Film On A Chamber Component And Methods Of Depositing Thereof App 20210032745 - Enman; Lisa J. ; et al. | 2021-02-04 |
| Method For Forming Silicon-phosphorous Materials App 20200399784 - Sanchez; Errol Antonio C ; et al. | 2020-12-24 |
| Methods For Depositing Silicon Nitride App 20200243323 - KALUTARAGE; Lakmal C. ; et al. | 2020-07-30 |
| Plasma Activated Deposition Of A Conformal Film On A Substrate Surface App 20140209026 - LaVoie; Adrien ; et al. | 2014-07-31 |
| Method of plasma activated deposition of a conformal film on a substrate surface Grant 8,728,955 - LaVoie , et al. May 20, 2 | 2014-05-20 |
| Precursors for Plasma Activated Conformal Film Deposition App 20130210241 - LaVoie; Adrien ; et al. | 2013-08-15 |
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