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Methods For Depositing Coatings On Aerospace Components App 20220298920 - MELNIK; Yuriy ;   et al. | 2022-09-22 |
Selective aluminum oxide film deposition Grant 11,450,525 - Wu , et al. September 20, 2 | 2022-09-20 |
Deposition of low-.kappa. films Grant 11,447,865 - Zhang , et al. September 20, 2 | 2022-09-20 |
Reducing Agents for Atomic Layer Deposition App 20220259734 - Bhuyan; Bhaskar Jyoti ;   et al. | 2022-08-18 |
Methods for depositing blocking layers on metal surfaces Grant 11,417,515 - Bhuyan , et al. August 16, 2 | 2022-08-16 |
Preclean And Encapsultaion Of Microled Features App 20220254953 - Knisley; Thomas ;   et al. | 2022-08-11 |
Deposition of tellurium-containing thin films Grant 11,408,068 - Knisley , et al. August 9, 2 | 2022-08-09 |
Low-k dielectric films Grant 11,393,678 - Durand , et al. July 19, 2 | 2022-07-19 |
Molybdenum(VI) precursors for deposition of molybdenum films Grant 11,390,638 - Leoncini , et al. July 19, 2 | 2022-07-19 |
Molybdenum(vi) Precursors For Deposition Of Molybdenum Films App 20220220137 - Leoncini; Andrea ;   et al. | 2022-07-14 |
Molybdenum (0) Precursors For Deposition Of Molybdenum Films App 20220220139 - Leoncini; Andrea ;   et al. | 2022-07-14 |
Methods for depositing coatings on aerospace components Grant 11,384,648 - Melnik , et al. July 12, 2 | 2022-07-12 |
Methods for selective deposition of dielectric on silicon oxide Grant 11,371,136 - Bhuyan , et al. June 28, 2 | 2022-06-28 |
Photoresists By Physical Vapor Deposition App 20220197146 - Bagby; Lauren ;   et al. | 2022-06-23 |
Preclean and encapsulation of microLED features Grant 11,342,481 - Knisley , et al. May 24, 2 | 2022-05-24 |
Deposition Of Low-k Films App 20220154337 - Zhang; Shuaidi ;   et al. | 2022-05-19 |
Etching of Metal Oxides Using Fluorine and Metal Halides App 20220139720 - Woods; Keenan N. ;   et al. | 2022-05-05 |
Tin-containing precursors and methods of depositing tin-containing films Grant 11,286,564 - Knisley , et al. March 29, 2 | 2022-03-29 |
Deposition and etch processes of chromium-containing thin films for semiconductor manufacturing Grant 11,289,328 - Knisley , et al. March 29, 2 | 2022-03-29 |
Etching of metal oxides using fluorine and metal halides Grant 11,239,091 - Woods , et al. February 1, 2 | 2022-02-01 |
Molecular Layer Deposition Method And System App 20220028686 - Bhuyan; Bhaskar ;   et al. | 2022-01-27 |
Preclean And Encapsultaion Of Microled Features App 20210376187 - Knisley; Thomas ;   et al. | 2021-12-02 |
Methods of depositing low-K films Grant 11,186,909 - Bhuyan , et al. November 30, 2 | 2021-11-30 |
Method of enhancing selective deposition by cross-linking of blocking molecules Grant 11,164,745 - Saly , et al. November 2, 2 | 2021-11-02 |
Methods Of Protecting Metallic Components Against Corrosion Using Chromium-containing Thin Films App 20210292901 - KNISLEY; Thomas ;   et al. | 2021-09-23 |
Molecular Layer Deposition of Amorphous Carbon Films App 20210277516 - Bhuyan; Bhaskar Jyoti ;   et al. | 2021-09-09 |
Deposition Of Tellurium-containing Thin Films App 20210262084 - Knisley; Thomas ;   et al. | 2021-08-26 |
Methods for ALD of Metal Oxides on Metal Surfaces App 20210217610 - Bhuyan; Bhaskar Jyoti ;   et al. | 2021-07-15 |
Methods Of Selective Atomic Layer Deposition App 20210189562 - Bhuyan; Bhaskar Jyoti ;   et al. | 2021-06-24 |
Methods of protecting metallic components against corrosion using chromium-containing thin films Grant 11,028,480 - Knisley , et al. June 8, 2 | 2021-06-08 |
Bottom-up gap-fill by surface poisoning treatment Grant 11,028,477 - Saly , et al. June 8, 2 | 2021-06-08 |
Atomic layer deposition of films comprising silicon, carbon and nitrogen using halogenated silicon precursors Grant 11,028,478 - Nguyen , et al. June 8, 2 | 2021-06-08 |
Rhenium Complexes and Methods of Use App 20210155646 - Knisley; Thomas ;   et al. | 2021-05-27 |
Silyl Pseudohalides For Silicon Containing Films App 20210140046 - Woods; Keenan N. ;   et al. | 2021-05-13 |
Methods For Depositing Blocking Layers On Conductive Surfaces App 20210134593 - Bhuyan; Bhaskar Jyoti ;   et al. | 2021-05-06 |
Methods To Grow Low Resistivity Metal Containing Films App 20210123136 - Kalutarage; Lakmal C. ;   et al. | 2021-04-29 |
Methods to deposit flowable (gap-fill) carbon containing films using various plasma sources Grant 10,985,009 - Kalutarage , et al. April 20, 2 | 2021-04-20 |
Methods for selective deposition on silicon-based dielectrics Grant 10,985,014 - Saly , et al. April 20, 2 | 2021-04-20 |
Method and apparatus for deposition of low-k films Grant 10,957,532 - Li , et al. March 23, 2 | 2021-03-23 |
Methods for ALD of metal oxides on metal surfaces Grant 10,943,780 - Bhuyan , et al. March 9, 2 | 2021-03-09 |
Low-K Films App 20210062341 - Bhuyan; Bhaskar Jyoti ;   et al. | 2021-03-04 |
Deposition Of Rhenium-containing Thin Films App 20210050211 - Knisley; Thomas ;   et al. | 2021-02-18 |
Molybdenum Thin Films By Oxidation-Reduction App 20210047726 - Liu; Feng Q. ;   et al. | 2021-02-18 |
Low-K Dielectric Films App 20210050212 - Durand; William J. ;   et al. | 2021-02-18 |
Multilayer Encapsulation Stacks By Atomic Layer Deposition App 20210032749 - Trinh; Cong ;   et al. | 2021-02-04 |
Methods of Depositing SiCON with C, O, and N Compositional Control App 20210028004 - Saly; Mark ;   et al. | 2021-01-28 |
Methods for depositing blocking layers on conductive surfaces Grant 10,892,157 - Bhuyan , et al. January 12, 2 | 2021-01-12 |
Methods And Apparatus For Depositing Yttrium-containing Films App 20200392624 - Kalutarage; Lakmal C. ;   et al. | 2020-12-17 |
Etching of Metal Oxides Using Fluorine and Metal Halides App 20200395222 - Woods; Keenan N. ;   et al. | 2020-12-17 |
Methods For Depositing Sacrificial Coatings On Aerospace Components App 20200392626 - CHATTERJEE; Sukti ;   et al. | 2020-12-17 |
Deposition Of Rhenium-containing Thin Films App 20200362458 - Knisley; Thomas ;   et al. | 2020-11-19 |
Reverse Selective Deposition App 20200347493 - LIU; FENG Q. ;   et al. | 2020-11-05 |
Methods And Apparatus For Deposition Of Low-K Films App 20200332415 - Bhuyan; Bhaskar Jyoti ;   et al. | 2020-10-22 |
Methods of depositing SiCON with C, O and N compositional control Grant 10,804,094 - Saly , et al. October 13, 2 | 2020-10-13 |
Methods and apparatus for depositing yttrium-containing films Grant 10,760,159 - Kalutarage , et al. Sep | 2020-09-01 |
Methods For Depositing Coatings On Aerospace Components App 20200240018 - MELNIK; Yuriy ;   et al. | 2020-07-30 |
Homoleptic Lanthanide Deposition Precursors App 20200240017 - Knisley; Thomas ;   et al. | 2020-07-30 |
Methods For Depositing Blocking Layers On Metal Surfaces App 20200234943 - Bhuyan; Bhaskar Jyoti ;   et al. | 2020-07-23 |
Methods For Selective Deposition On Silicon-Based Dielectrics App 20200234950 - Saly; Mark ;   et al. | 2020-07-23 |
Methods For Selective Deposition Of Dielectric On Silicon Oxide App 20200216949 - Bhuyan; Bhaskar Jyoti ;   et al. | 2020-07-09 |
Acetylide-based silicon precursors and their use as ALD/CVD precursors Grant 10,699,897 - Saly , et al. | 2020-06-30 |
Method Of Enhancing Selective Deposition By Cross-Linking Of Blocking Molecules App 20200168453 - Saly; Mark ;   et al. | 2020-05-28 |
Low Temperature Ald Of Metal Oxides App 20200149158 - Kaliappan; Muthukumar ;   et al. | 2020-05-14 |
Methods for depositing coatings on aerospace components Grant 10,633,740 - Melnik , et al. | 2020-04-28 |
Gap-Fill With Aluminum-Containing Films App 20200095674 - Saly; Mark ;   et al. | 2020-03-26 |
Selective Aluminum Oxide Film Deposition App 20200090924 - Wu; Liqi ;   et al. | 2020-03-19 |
Methods Of Depositing Metal Carbide Films App 20200071825 - Kalutarage; Lakmal C. ;   et al. | 2020-03-05 |
Methods For Atomic Layer Deposition Of SiCO(N) Using Halogenated Silylamides App 20200010954 - Bhuyan; Bhaskar Jyoti ;   et al. | 2020-01-09 |
Tin-Containing Precursors and Methods of Depositing Tin-Containing Films App 20200002814 - Knisley; Thomas ;   et al. | 2020-01-02 |
Deposition And Etch Processes Of Chromium-Containing Thin Films For Semiconductor Manufacturing App 20200006056 - Knisley; Thomas ;   et al. | 2020-01-02 |
Method And Apparatus For Deposition Of Low-K Films App 20200006064 - Li; Ning ;   et al. | 2020-01-02 |
Methods To Deposit Flowable (gap-fill) Carbon Containing Films Using Various Plasma Sources App 20190333760 - Kalutarage; Lakmal Charidu ;   et al. | 2019-10-31 |
Method and apparatus for deposition of low-k films Grant 10,453,678 - Li , et al. Oc | 2019-10-22 |
Methods Of Selective Atomic Layer Deposition App 20190316256 - Bhuyan; Bhaskar Jyoti ;   et al. | 2019-10-17 |
Methods For Low Temperature ALD Of Metal Oxides App 20190309412 - Bhuyan; Bhaskar Jyoti ;   et al. | 2019-10-10 |
Methods For Depositing Coatings On Aerospace Components App 20190284686 - MELNIK; Yuriy ;   et al. | 2019-09-19 |
Methods Of Protecting Metallic Components Against Corrosion Using Chromium-containing Thin Films App 20190284694 - KNISLEY; Thomas ;   et al. | 2019-09-19 |
Low temperature molecular layer deposition of SiCON Grant 10,354,861 - Saly , et al. July 16, 2 | 2019-07-16 |
Methods For Depositing Blocking Layers on Conductive Surfaces App 20190198318 - Bhuyan; Bhaskar Jyoti ;   et al. | 2019-06-27 |
Methods For ALD Of Metal Oxides On Metal Surfaces App 20190157067 - Bhuyan; Bhaskar Jyoti ;   et al. | 2019-05-23 |
Selective deposition of thin film dielectrics using surface blocking chemistry Grant 10,219,373 - Thompson , et al. Feb | 2019-02-26 |
Methods and Apparatus for Depositing Yttrium-Containing Films App 20190017171 - Kalutarage; Lakmal C. ;   et al. | 2019-01-17 |
High temperature silicon oxide atomic layer deposition technology Grant 10,170,298 - Yan , et al. J | 2019-01-01 |
Methods for depositing low K and low wet etch rate dielectric thin films Grant 10,147,599 - Li , et al. De | 2018-12-04 |
Method And Apparatus For Deposition Of Low-K Films App 20180301333 - Li; Ning ;   et al. | 2018-10-18 |
Atomic Layer Deposition Of Films Comprising Silicon, Carbon And Nitrogen Using Halogenated Silicon Precursors App 20180291505 - Nguyen; Victor ;   et al. | 2018-10-11 |
Atomic layer deposition of high density silicon dioxide Grant 10,096,464 - Saly October 9, 2 | 2018-10-09 |
Atomic layer deposition of films comprising silicon, carbon and nitrogen using halogenated silicon precursors Grant 10,023,958 - Nguyen , et al. July 17, 2 | 2018-07-17 |
Selective Deposition of Thin Film Dielectrics Using Surface Blocking Chemistry App 20180199432 - Thompson; David ;   et al. | 2018-07-12 |
Precursors suitable for high temperature atomic layer deposition of silicon-containing films Grant 9,957,165 - Saly May 1, 2 | 2018-05-01 |
High Temperature Silicon Oxide Atomic Layer Deposition Technology App 20180076023 - Yan; Wenbo ;   et al. | 2018-03-15 |
Selective deposition of thin film dielectrics using surface blocking chemistry Grant 9,911,591 - Thompson , et al. March 6, 2 | 2018-03-06 |
Low Temperature Molecular Layer Deposition Of SiCON App 20180061629 - Saly; Mark ;   et al. | 2018-03-01 |
Precursors Suitable For High Temperature Atomic Layer Deposition Of Silicon-Containing Films App 20180057362 - Saly; Mark | 2018-03-01 |
Methods For Depositing Low K And Low Wet Etch Rate Dielectric Thin Films App 20180040470 - Li; Ning ;   et al. | 2018-02-08 |
Deposition Of Flowable Silicon-Containing Films App 20180025907 - Kalutarage; Lakmal C. ;   et al. | 2018-01-25 |
High temperature silicon oxide atomic layer deposition technology Grant 9,875,888 - Yan , et al. January 23, 2 | 2018-01-23 |
Methods of Depositing SiCON with C, O and N Compositional Control App 20170323775 - Saly; Mark ;   et al. | 2017-11-09 |
Low temperature molecular layer deposition of SiCON Grant 9,812,318 - Saly , et al. November 7, 2 | 2017-11-07 |
Precursors suitable for high temperature atomic layer deposition of silicon-containing films Grant 9,802,828 - Saly October 31, 2 | 2017-10-31 |
Methods for depositing low k and low wet etch rate dielectric thin films Grant 9,799,511 - Li , et al. October 24, 2 | 2017-10-24 |
Acetylide-Based Silicon Precursors And Their Use As ALD/CVD Precursors App 20170213726 - Saly; Mark ;   et al. | 2017-07-27 |
Carbon and/or nitrogen incorporation in silicon based films using silicon precursors with organic co-reactants by PE-ALD Grant 9,685,325 - Saly , et al. June 20, 2 | 2017-06-20 |
Chemical Infiltration into Porous Dielectric Films App 20170117144 - Kalutarage; Lakmal ;   et al. | 2017-04-27 |
Methods Of Depositing Flowable Films Comprising SiO and SiN App 20170114465 - Kalutarage; Lakmal ;   et al. | 2017-04-27 |
Bottom-Up Gap-Fill by Surface Poisoning Treatment App 20170114459 - Saly; Mark ;   et al. | 2017-04-27 |
Selective Silicon Dioxide Deposition Using Phosphonic Acid Self Assembled Monolayers As Nucleation Inhibitor App 20170092533 - Chakraborty; Tapash ;   et al. | 2017-03-30 |
Ion beam activated directional deposition Grant 9,520,284 - Chen , et al. December 13, 2 | 2016-12-13 |
Methods For Depositing Low K And Low Wet Etch Rate Dielectric Thin Films App 20160322214 - Li; Ning ;   et al. | 2016-11-03 |
Selective Deposition Of Thin Film Dielectrics Using Surface Blocking Chemistry App 20160322213 - Thompson; David ;   et al. | 2016-11-03 |
Deposition Of Si-H Free Silicon Nitride App 20160307748 - Saly; Mark | 2016-10-20 |
Substituted silacyclopropane precursors and their use for the deposition of silicon-containing films Grant 9,382,270 - Saly , et al. July 5, 2 | 2016-07-05 |
Precursors Suitable For High Temperature Atomic Layer Deposition Of Silicon-Containing Films App 20160099146 - Saly; Mark | 2016-04-07 |
Atomic Layer Deposition Of High Density Silicon Dioxide App 20160099144 - Saly; Mark | 2016-04-07 |
High Temperature Silicon Oxide Atomic Layer Deposition Technology App 20160099143 - Yan; Wenbo ;   et al. | 2016-04-07 |
Substituted Silacyclopropane Precursors And Their Use For The Deposition Of Silicon-Containing Films App 20160031916 - Saly; Mark ;   et al. | 2016-02-04 |
Low Temperature Molecular Layer Deposition Of SiCON App 20160024647 - Saly; Mark ;   et al. | 2016-01-28 |
Carbon and/or Nitrogen Incorporation in Silicon Based Films Using Silicon Precursors With Organic Co-Reactants by PE-ALD App 20160020091 - Saly; Mark ;   et al. | 2016-01-21 |
Substituted silacyclopropane precursors and their use for the deposition of silicon-containing films Grant 9,177,783 - Saly , et al. November 3, 2 | 2015-11-03 |
Molybdenum allyl complexes and use thereof in thin film deposition Grant 9,175,023 - Odedra , et al. November 3, 2 | 2015-11-03 |
In-situ Carbon And Oxide Doping Of Atomic Layer Deposition Silicon Nitride Films App 20150252477 - NGUYEN; Victor ;   et al. | 2015-09-10 |
Substituted Silacyclopropane Precursors And Their Use For The Deposition Of Silicon-Containing Films App 20150162191 - Saly; Mark ;   et al. | 2015-06-11 |
Atomic Layer Deposition Of Films Comprising Silicon, Carbon And Nitrogen Using Halogenated Silicon Precursors App 20150147484 - Nguyen; Victor ;   et al. | 2015-05-28 |
Alkyl-substituted allyl carbonyl metal complexes and use thereof for preparing dielectric thin films Grant 8,927,748 - Odedra , et al. January 6, 2 | 2015-01-06 |
Molybdenum Allyl Complexes And Use Thereof In Thin Film Deposition App 20140370192 - Odedra; Rajesh ;   et al. | 2014-12-18 |
Alkyl-substituted Allyl Carbonyl Metal Complexes And Use Thereof For Preparing Dielectric Thin Films App 20130041170 - Odedra; Rajesh ;   et al. | 2013-02-14 |