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Method And Apparatus For Substrate Transfer And Radical Confinement App 20200066563 - LEE; Jared Ahmad ;   et al. | 2020-02-27 |
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Method And Apparatus For Substrate Transfer And Radical Confinement App 20180247850 - LEE; Jared Ahmad ;   et al. | 2018-08-30 |
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Particle Reduction Via Throttle Gate Valve Purge App 20140366953 - LEE; JARED AHMAD ;   et al. | 2014-12-18 |
Method And Apparatus For Substrate Transfer And Radical Confinement App 20140087561 - Lee; Jared Ahmad ;   et al. | 2014-03-27 |
Methods and apparatus for providing a gas mixture to a pair of process chambers Grant 8,616,224 - Lee , et al. December 31, 2 | 2013-12-31 |
Methods and apparatus for providing a gas mixture to a pair of process chambers Grant 08616224 - | 2013-12-31 |
Apparatus for radial delivery of gas to a chamber and methods of use thereof Grant 8,562,742 - Lee , et al. October 22, 2 | 2013-10-22 |
Inductively Coupled Plasma Apparatus App 20130134129 - TODOROW; VALENTIN N. ;   et al. | 2013-05-30 |
Process Chambers Having Shared Resources And Methods Of Use Thereof App 20110269314 - LEE; JARED AHMAD ;   et al. | 2011-11-03 |
Apparatus For Radial Delivery Of Gas To A Chamber And Methods Of Use Thereof App 20110265887 - LEE; JARED AHMAD ;   et al. | 2011-11-03 |
Methods And Apparatus For Providing A Gas Mixture To A Pair Of Process Chambers App 20110265831 - LEE; JARED AHMAD ;   et al. | 2011-11-03 |
Twin Chamber Processing System App 20110265951 - XU; MING ;   et al. | 2011-11-03 |
Plasma processing apparatus Grant 7,972,469 - Hanawa , et al. July 5, 2 | 2011-07-05 |
Inductively Coupled Plasma Apparatus App 20110094994 - TODOROW; VALENTIN N. ;   et al. | 2011-04-28 |
Rf Feed Structure For Plasma Processing App 20110094683 - CHEN; ZHIGANG ;   et al. | 2011-04-28 |
Dual Mode Inductively Coupled Plasma Reactor With Adjustable Phase Coil Assembly App 20110097901 - BANNA; SAMER ;   et al. | 2011-04-28 |
Integrated thermal unit having a shuttle with two-axis movement Grant 7,741,585 - Quach , et al. June 22, 2 | 2010-06-22 |
Integrated thermal unit having a shuttle with a temperature controlled surface Grant 7,601,934 - Quach , et al. October 13, 2 | 2009-10-13 |
Zone Control Heater Plate For Track Lithography Systems App 20090032522 - Salinas; Martin Jeff ;   et al. | 2009-02-05 |
Plasma Processing Method App 20080260966 - Hanawa; Hiroji ;   et al. | 2008-10-23 |
Plasma Processing Apparatus App 20080257261 - Hanawa; Hiroji ;   et al. | 2008-10-23 |
Zone control heater plate for track lithography systems Grant 7,427,728 - Salinas , et al. September 23, 2 | 2008-09-23 |
Actively Chilled Substrate Transport Module App 20080145191 - Salinas; Martin Jeff ;   et al. | 2008-06-19 |
Integrated Thermal Unit Having A Shuttle With Two-axis Movement App 20080047950 - Quach; David H. ;   et al. | 2008-02-28 |
Integrated Thermal Unit Having A Shuttle With A Temperature Controlled Surface App 20080023656 - Quach; David H. ;   et al. | 2008-01-31 |
Zone control heater plate for track lithography systems App 20080006619 - Salinas; Martin Jeff ;   et al. | 2008-01-10 |
Integrated thermal unit having a shuttle with two-axis movement Grant 7,297,906 - Quach , et al. November 20, 2 | 2007-11-20 |
Integrated thermal unit having vertically arranged bake and chill plates App 20070254493 - Salinas; Martin Jeff ;   et al. | 2007-11-01 |
Integrated thermal unit having a shuttle with a temperature controlled surface Grant 7,282,675 - Quach , et al. October 16, 2 | 2007-10-16 |
Integrated thermal unit having a shuttle with two-axis movement App 20060237431 - Quach; David H. ;   et al. | 2006-10-26 |
Integrated thermal unit having a shuttle with a temperature controlled surface App 20060237433 - Quach; David H. ;   et al. | 2006-10-26 |