Salek; Mohsen
Patent Applications and Registrations
Patent applications and USPTO patent grants for Salek; Mohsen.The latest application filed is for "wafer transfer microclimate techniques and apparatuses, including horizontal slot implementations and/or travelling showerheads".
- Salek; Mohsen - Saratoga CA
- Salek; Mohsen - Cupertino CA
- Salek, Mohsen - Sarajoga CA
| Patent | Date |
|---|---|
| Multi-station tool with wafer transfer microclimate systems Grant 10,515,834 - Salek , et al. Dec | 2019-12-24 |
| Wafer Transfer Microclimate Techniques And Apparatuses, Including Horizontal Slot Implementations And/or Travelling Showerheads App 20170125272 - van Gogh; James Stephen ; et al. | 2017-05-04 |
| Modular System Layout Utilizing Three-dimensions App 20170092516 - van Gogh; James Stephen ; et al. | 2017-03-30 |
| Cartesian cluster tool configuration for lithography type processes Grant 7,819,079 - Englhardt , et al. October 26, 2 | 2010-10-26 |
| Method And Apparatus For Hmds Treatment Of Substrate Edges App 20090023297 - Salek; Mohsen | 2009-01-22 |
| Cartesian Cluster Tool Configuration For Lithography Type Processes App 20070144439 - Englhardt; Eric A. ; et al. | 2007-06-28 |
| Profile control platen Grant 7,115,024 - Chen , et al. October 3, 2 | 2006-10-03 |
| Profile control platen App 20050186892 - Chen, Hung Chih ; et al. | 2005-08-25 |
| Profile control platen Grant 6,913,518 - Chen , et al. July 5, 2 | 2005-07-05 |
| Profile control platen App 20040224615 - Chen, Hung Chih ; et al. | 2004-11-11 |
| Robot blade for semiconductor processing equipment Grant 6,709,218 - Freerks , et al. March 23, 2 | 2004-03-23 |
| N2 splash guard for liquid injection on the rotating substrate App 20030070695 - Emami, Ramin ; et al. | 2003-04-17 |
| Method and apparatus for cleaning edges of contaminated substrates Grant 5,861,066 - Moinpour , et al. January 19, 1 | 1999-01-19 |
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