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Patent applications and USPTO patent grants for Saleh; Nedal R..The latest application filed is for "spectrometry employing extinction coefficient modulation".
Patent | Date |
---|---|
Scatterometry measurement of line edge roughness in the bright field Grant 9,091,942 - Saleh July 28, 2 | 2015-07-28 |
Spectrometry employing extinction coefficient modulation Grant 8,860,956 - Saleh , et al. October 14, 2 | 2014-10-14 |
Spectrometry Employing Extinction Coefficient Modulation App 20140268181 - Saleh; Nedal R. ;   et al. | 2014-09-18 |
In-situ Active Wafer Charge Screening By Conformal Grounding App 20140073114 - Cen; Cheng ;   et al. | 2014-03-13 |
In-situ Active Wafer Charge Screening By Conformal Grounding App 20130200501 - Cen; Cheng ;   et al. | 2013-08-08 |
Scatterometry Measurement Of Line Edge Roughness In The Bright Field App 20130132036 - Saleh; Nedal R. | 2013-05-23 |
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