Patent | Date |
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Method For Evaluating Edge Shape Of Silicon Wafer, Apparatus For Evaluating Thereof, Silicon Wafer, Method For Selecting And Met App 20200240929 - SAKURADA; Masahiro ;   et al. | 2020-07-30 |
Silicon epitaxial wafer and method of producing silicon epitaxial wafer Grant 10,355,092 - Sakurada July 16, 2 | 2019-07-16 |
Method of producing silicon single crystal Grant 9,938,634 - Sakurada , et al. April 10, 2 | 2018-04-10 |
Method For Heat-treating Silicon Single Crystal Wafer App 20170253995 - QU; Wei Feng ;   et al. | 2017-09-07 |
Epitaxial wafer and manufacturing method thereof Grant 9,425,345 - Hoshi , et al. August 23, 2 | 2016-08-23 |
Silicon Epitaxial Wafer And Method Of Producing Silicon Epitaxial Wafer App 20160126318 - SAKURADA; Masahiro | 2016-05-05 |
Method Of Producing Silicon Single Crystal App 20160068992 - SAKURADA; Masahiro ;   et al. | 2016-03-10 |
Epitaxial Wafer And Manufacturing Method Thereof App 20140374861 - Hoshi; Ryoji ;   et al. | 2014-12-25 |
Method of manufacturing single crystal Grant 8,147,611 - Sakurada , et al. April 3, 2 | 2012-04-03 |
Quartz Glass Crucible for Pulling Silicon Single Crystal and Method of Manufacturing Quartz Glass Crucible for Pulling Silicon Single Crystal App 20100139549 - Sakurada; Masahiro ;   et al. | 2010-06-10 |
Method of Manufacturing Single Crystal App 20100126409 - Sakurada; Masahiro ;   et al. | 2010-05-27 |
Soi wafer and a method for producing the same Grant 7,518,187 - Sakurada April 14, 2 | 2009-04-14 |
Soi wafer and a method for producing the same Grant 7,407,866 - Sakurada , et al. August 5, 2 | 2008-08-05 |
Method for producing a single crystal and a single crystal Grant 7,384,477 - Sakurada , et al. June 10, 2 | 2008-06-10 |
An Apparatus for Producing a Single Crystal App 20080035050 - Sakurada; Masahiro | 2008-02-14 |
Method for producing a single crystal and a single crystal Grant 7,323,048 - Sakurada , et al. January 29, 2 | 2008-01-29 |
Annealed wafer and method for manufacturing the same Grant 7,311,888 - Takeno , et al. December 25, 2 | 2007-12-25 |
Silicon single crystal wafer, an epitaxial wafer and a method for producing a silicon single crystal Grant 7,294,196 - Sakurada , et al. November 13, 2 | 2007-11-13 |
Graphite heater for producing single crystal, apparatus for producing single crystal, and method for producing single crystal Grant 7,258,744 - Sakurada , et al. August 21, 2 | 2007-08-21 |
Method for producing single crystal and single crystal Grant 7,226,507 - Mitamura , et al. June 5, 2 | 2007-06-05 |
Method of producing P-doped silicon single crystal and P-doped N-type silicon single crystal wafer Grant 7,214,268 - Sakurada , et al. May 8, 2 | 2007-05-08 |
Process for producing single crystal and single crystal App 20070017433 - Sakurada; Masahiro ;   et al. | 2007-01-25 |
SOI wafer and a method for producing an SOI wafer Grant 7,129,123 - Sakurada , et al. October 31, 2 | 2006-10-31 |
Method for producing single crystal and single crystal App 20060174819 - Mitamura; Nobuaki ;   et al. | 2006-08-10 |
Process for producing single crystal and single crystal App 20060130740 - Sakurada; Masahiro | 2006-06-22 |
Soi wafer and production method therefor App 20060113594 - Sakurada; Masahiro ;   et al. | 2006-06-01 |
Soi wafer and method for manufacturing same App 20060086313 - Sakurada; Masahiro | 2006-04-27 |
Annealed wafer and anneald wafer manufacturing method App 20060075957 - Takeno; Hiroshi ;   et al. | 2006-04-13 |
Process for producing p doped silicon single crystal and p doped n type silicon single crystal wafer App 20060065184 - Sakurada; Masahiro ;   et al. | 2006-03-30 |
Silicon single crystal wafer and epitaxial wafer, and method for producing silicon single crystal App 20050252441 - Sakurada, Masahiro ;   et al. | 2005-11-17 |
Graphite heater for producing single crystal, single crystal productin system and single crystal productin method App 20050205004 - Sakurada, Masahiro ;   et al. | 2005-09-22 |
Silicon single crystal wafer and method for producing silicon single crystal Grant 6,913,646 - Sakurada , et al. July 5, 2 | 2005-07-05 |
Silicon single crystal wafer and method for manufacturing the same Grant 6,893,499 - Fusegawa , et al. May 17, 2 | 2005-05-17 |
Soi wafer and method for manufacturing soi wafer App 20050064632 - Sakurada, Masahiro ;   et al. | 2005-03-24 |
Silicon single crystal wafer and method for producing silicon single crystal App 20030116082 - Sakurada, Masahiro ;   et al. | 2003-06-26 |
Silicon single crystal wafer and method for manufacturing the same App 20030106484 - Fusegawa, Izumi ;   et al. | 2003-06-12 |
Silicon single crystal wafer and a method for producing it App 20010000093 - Sakurada, Masahiro ;   et al. | 2001-04-05 |
Method for producing silicon monocrystal and silicon monocrystal wafer Grant 6,174,364 - Yamanaka , et al. January 16, 2 | 2001-01-16 |
Apparatus for manufacturing crystals according to the Czochralski method, and crystals manufactured by the manufacturing method Grant 5,948,163 - Sakurada , et al. September 7, 1 | 1999-09-07 |
Apparatus and method for the uniform distribution of crystal defects upon a silicon single crystal Grant 5,704,973 - Sakurada , et al. January 6, 1 | 1998-01-06 |