Sakuma; Harunobu

Patent Applications and Registrations

Patent applications and USPTO patent grants for Sakuma; Harunobu.The latest application filed is for "method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium".

Company Profile

0.6.10

Sakuma; Harunobu - Toyama JP
SAKUMA; Harunobu - Toyama-shi JP
Sakuma; Harunobu - Tokyo JP
Sakuma; Harunobu - Hamura-machi JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Substrate processing apparatus, method of manufacturing semiconductor device, and non-transitory computer-readable recording medium Grant 9,587,313 - Wada , et al. March 7, 2	2017-03-07
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Non-Transitory Computer-Readable Recording Medium App 20160013053 - ASHIHARA; Hiroshi ; et al.	2016-01-14
Apparatus for manufacturing semiconductor device, method of manufacturing semiconductor device, and recording medium Grant 9,190,299 - Wada , et al. November 17, 2	2015-11-17
Substrate Processing Apparatus, Method Of Manufacturing Semiconductor Device, And Non-transitory Computer-readable Recording Medium App 20150132972 - WADA; Yuichi ; et al.	2015-05-14
Substrate Processing Device, Method for Manufacturing Semiconductor Device, and Vaporizer App 20140302687 - ASHIHARA; Hiroshi ; et al.	2014-10-09
Apparatus for Manufacturing Semiconductor Device, Method of Manufacturing Semiconductor Device, and Recording Medium App 20140256160 - Wada; Yuichi ; et al.	2014-09-11
Method Of Manufacturing Semiconductor Device, Apparatus For Manufacturing Semiconductor Device, And Non-transitory Computer-readable Recording Medium App 20140235068 - ASHIHARA; Hiroshi ; et al.	2014-08-21
Substrate processing apparatus and semiconductor devices manufacturing method Grant 8,222,161 - Yanagisawa , et al. July 17, 2	2012-07-17
Substrate Processing Apparatus And Semiconductor Devices Manufacturing Method App 20110192347 - YANAGISAWA; Yoshihiko ; et al.	2011-08-11
Substrate processing apparatus and semiconductor devices manufacturing method Grant 7,943,528 - Yanagisawa , et al. May 17, 2	2011-05-17
Substrate Processing Apparatus And Semiconductor Devices Manufacturing Method App 20110053382 - YANAGISAWA; Yoshihiko ; et al.	2011-03-03
Substrate processing apparatus and substrate processing method Grant 6,875,280 - Ikeda , et al. April 5, 2	2005-04-05
Substrate processing apparatus App 20030140853 - Wada, Tetsuya ; et al.	2003-07-31
Semiconductor treating apparatus and cleaning method of the same App 20030037802 - Nakahara, Miwako ; et al.	2003-02-27
Substrate processing apparatus and substrate processing method App 20010025600 - Ikeda, Kazuhito ; et al.	2001-10-04
Dry process system Grant 5,795,452 - Kinoshita , et al. August 18, 1	1998-08-18

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