| Patent | Date |
|---|
Planar substrate edge contact with open volume equalization pathways and side containment
Grant 11,443,975 - Breiling , et al. September 13, 2 | 2022-09-13 |
Processing Tool Capable For Forming Carbon Layers On Substrates
App 20220246428 - LEESER; Karl Frederick ; et al. | 2022-08-04 |
Systems and methods for controlling plasma instability in semiconductor fabrication
Grant 11,393,729 - Sakiyama , et al. July 19, 2 | 2022-07-19 |
Substrate Processing Tool Capable Of Modulating One Or More Plasma Temporally And/or Spatially
App 20220119954 - CHEN; Lee ; et al. | 2022-04-21 |
Control Of Wafer Bow In Multiple Stations
App 20220051919 - Augustyniak; Edward ; et al. | 2022-02-17 |
Anomalous Plasma Event Detection And Mitigation In Semiconductor Processing
App 20220037135 - Kapoor; Sunil ; et al. | 2022-02-03 |
Control of wafer bow in multiple stations
Grant 11,183,406 - Augustyniak , et al. November 23, 2 | 2021-11-23 |
Planar Substrate Edge Contact With Open Volume Equalization Pathways And Side Containment
App 20200227304 - Breiling; Patrick ; et al. | 2020-07-16 |
Integrated Showerhead With Thermal Control For Delivering Radical And Precursor Gas To A Downstream Chamber To Enable Remote Pla
App 20200219757 - BREILING; Patrick ; et al. | 2020-07-09 |
Control Of Wafer Bow In Multiple Stations
App 20200118856 - Augustyniak; Edward ; et al. | 2020-04-16 |
Planar substrate edge contact with open volume equalization pathways and side containment
Grant 10,622,243 - Breiling , et al. | 2020-04-14 |
Systems and Methods for Controlling Plasma Instability in Semiconductor Fabrication
App 20200098651 - Sakiyama; Yukinori ; et al. | 2020-03-26 |
Chemical Vapor Deposition Tool For Preventing Or Suppressing Arcing
App 20200048770 - SAKIYAMA; Yukinori ; et al. | 2020-02-13 |
Control of water bow in multiple stations
Grant 10,553,465 - Augustyniak , et al. Fe | 2020-02-04 |
Systems and methods for controlling plasma instability in semiconductor fabrication
Grant 10,510,625 - Sakiyama , et al. Dec | 2019-12-17 |
Carrier ring wall for reduction of back-diffusion of reactive species and suppression of local parasitic plasma ignition
Grant 10,475,627 - Qi , et al. Nov | 2019-11-12 |
Low volume showerhead with faceplate holes for improved flow uniformity
Grant 10,378,107 - Chandrasekharan , et al. A | 2019-08-13 |
Asymmetric pedestal/carrier ring arrangement for edge impedance modulation
Grant 10,301,718 - Blaquiere , et al. | 2019-05-28 |
Systems and methods for detection of plasma instability by electrical measurement
Grant 10,128,160 - Sakiyama , et al. November 13, 2 | 2018-11-13 |
Systems and methods for detection of plasma instability by optical diagnosis
Grant 10,121,708 - Sakiyama , et al. November 6, 2 | 2018-11-06 |
Systems And Methods For Providing Shunt Cancellation Of Parasitic Components In A Plasma Reactor
App 20180175819 - Rangineni; Yaswanth ; et al. | 2018-06-21 |
Systems and methods for frequency modulation of radiofrequency power supply for controlling plasma instability
Grant 9,997,422 - Karim , et al. June 12, 2 | 2018-06-12 |
Planar Substrate Edge Contact With Open Volume Equalization Pathways And Side Containment
App 20180122685 - Breiling; Patrick ; et al. | 2018-05-03 |
Systems and methods for using electrical asymmetry effect to control plasma process space in semiconductor fabrication
Grant 9,941,113 - Keil , et al. April 10, 2 | 2018-04-10 |
Systems and Methods for Detection of Plasma Instability by Electrical Measurement
App 20180076100 - Sakiyama; Yukinori ; et al. | 2018-03-15 |
Control Of Wafer Bow In Multiple Stations
App 20180025930 - Augustyniak; Edward ; et al. | 2018-01-25 |
Metrology methods to detect plasma in wafer cavity and use of the metrology for station-to-station and tool-to-tool matching
Grant 9,875,883 - Sakiyama , et al. January 23, 2 | 2018-01-23 |
Metrology Methods to Detect Plasma in Wafer Cavity and Use of the Metrology for Station-to-Station and Tool-to-Tool Matching
App 20170338085 - Sakiyama; Yukinori ; et al. | 2017-11-23 |
Systems and methods for detection of plasma instability by electrical measurement
Grant 9,824,941 - Sakiyama , et al. November 21, 2 | 2017-11-21 |
Systems and Methods for Using Electrical Asymmetry Effect to Control Plasma Process Space in Semiconductor Fabrication
App 20170330744 - Keil; Douglas ; et al. | 2017-11-16 |
Asymmetric Pedestal/carrier Ring Arrangement For Edge Impedance Modulation
App 20170275756 - Blaquiere; Ryan ; et al. | 2017-09-28 |
Carrier Ring Wall For Reduction Of Back-diffusion Of Reactive Species And Suppression Of Local Parasitic Plasma Ignition
App 20170278681 - Qi; Chengzhu ; et al. | 2017-09-28 |
Metrology methods to detect plasma in wafer cavity and use of the metrology for station-to-station and tool-to-tool matching
Grant 9,754,769 - Sakiyama , et al. September 5, 2 | 2017-09-05 |
Systems and Methods for Detection of Plasma Instability by Electrical Measurement
App 20170141000 - Sakiyama; Yukinori ; et al. | 2017-05-18 |
Systems and Methods for Detection of Plasma Instability by Optical Diagnosis
App 20170141001 - Sakiyama; Yukinori ; et al. | 2017-05-18 |
Systems and Methods for Controlling Plasma Instability in Semiconductor Fabrication
App 20170140968 - Sakiyama; Yukinori ; et al. | 2017-05-18 |
Systems and Methods for Frequency Modulation of Radiofrequency Power Supply for Controlling Plasma Instability
App 20170141002 - Karim; Ishtak ; et al. | 2017-05-18 |
Systems and methods for using electrical asymmetry effect to control plasma process space in semiconductor fabrication
Grant 9,644,271 - Keil , et al. May 9, 2 | 2017-05-09 |
Metrology Methods to Detect Plasma in Wafer Cavity and Use of the Metrology for Station-to-Station and Tool-to-Tool Matching
App 20170076921 - Sakiyama; Yukinori ; et al. | 2017-03-16 |
Composition-matched curtain gas mixtures for edge uniformity modulation in large-volume ALD reactors
Grant 9,508,547 - Pasquale , et al. November 29, 2 | 2016-11-29 |
Low Volume Showerhead With Faceplate Holes For Improved Flow Uniformity
App 20160340782 - Chandrasekharan; Ramesh ; et al. | 2016-11-24 |
Method And Device For Generating A Non-thermal Plasma Having A Predetermined Ozone Concentration
App 20150004248 - Morfill; Gregor ; et al. | 2015-01-01 |
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