Sakino; Shigeo

Patent Applications and Registrations

Patent applications and USPTO patent grants for Sakino; Shigeo.The latest application filed is for "optical element holding apparatus, exposure apparatus and device manufacturing method".

Company Profile

0.9.6

Sakino; Shigeo - Higashimurayama JP
Sakino; Shigeo - Kanagawa JP
Sakino; Shigeo - Tokyo JP
Sakino; Shigeo - Higashimurayama-shi JP
Sakino; Shigeo - Yokohama JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Optical unit and exposure apparatus having the same Grant 7,771,065 - Sai , et al. August 10, 2	2010-08-10
Moving/guiding apparatus and exposure apparatus using the same Grant 7,535,552 - Sakino May 19, 2	2009-05-19
Reflecting mirror and exposure apparatus using the same Grant 7,453,623 - Uchida , et al. November 18, 2	2008-11-18
Optical element holding apparatus, exposure apparatus and device manufacturing method Grant 7,443,619 - Sakino , et al. October 28, 2	2008-10-28
Optical Element Holding Apparatus, Exposure Apparatus And Device Manufacturing Method App 20070076310 - Sakino; Shigeo ; et al.	2007-04-05
Reflecting mirror and exposure apparatus using the same App 20060245035 - Uchida; Shinji ; et al.	2006-11-02
Optical unit and exposure apparatus having the same App 20060232866 - Sai; Choshoku ; et al.	2006-10-19
Stage apparatus, static pressure bearing apparatus, positioning method, exposure apparatus and method for manufacturing device App 20050002012 - Sakino, Shigeo ; et al.	2005-01-06
Stage device, exposure apparatus, device manufacturing method and movement guidance method Grant 6,644,855 - Sakino , et al. November 11, 2	2003-11-11
Moving/guiding apparatus and exposure apparatus using the same App 20020128733 - Sakino, Shigeo	2002-09-12
Stage device, exposure apparatus, device manufacturing method and movement guidance method App 20020118897 - Sakino, Shigeo ; et al.	2002-08-29
Apparatus for producing color filter with alignment error detection Grant 5,984,470 - Sakino , et al. November 16, 1	1999-11-16
Motion guiding device Grant 5,228,358 - Sakino , et al. July 20, 1	1993-07-20
Movement guiding mechanism Grant 5,040,431 - Sakino , et al. August 20, 1	1991-08-20
Moving mechanism Grant 4,744,675 - Sakino , et al. May 17, 1	1988-05-17

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