Sakata; Kazunari
Patent Applications and Registrations
Patent applications and USPTO patent grants for Sakata; Kazunari.The latest application filed is for "substrate processing apparatus".
- Sakata; Kazunari - Tokyo JP
- Sakata; Kazunari - Shiroyama-Machi JP
- SAKATA; Kazunari - Sendai City JP
- Sakata; Kazunari - Kanagawa-Ken JP
- Sakata; Kazunari - Sagamihara JP
| Patent | Date |
|---|---|
| Substrate processing apparatus Grant 10,679,878 - Sakata | 2020-06-09 |
| Substrate Processing Apparatus App 20180286716 - SAKATA; Kazunari | 2018-10-04 |
| Heat treatment system and method therefore Grant 7,819,658 - Sakata , et al. October 26, 2 | 2010-10-26 |
| Microwave Plasma Processing Apparatus App 20090301656 - NISHIMOTO; Shinya ; et al. | 2009-12-10 |
| Heat treatment system and method therefore App 20070166657 - Sakata; Kazunari ; et al. | 2007-07-19 |
| Heat treatment system and a method for cooling a loading chamber Grant 7,059,849 - Sakata , et al. June 13, 2 | 2006-06-13 |
| Processing system for object to be processed Grant 6,729,823 - Sakata , et al. May 4, 2 | 2004-05-04 |
| Processing system for object to be processed App 20020048509 - Sakata, Kazunari ; et al. | 2002-04-25 |
| Vertical heat treatment system, method for controlling vertical heat treatment system, and method for transferring object to be treated App 20020023458 - Sakata, Kazunari ; et al. | 2002-02-28 |
| Vertical heat treatment apparatus Grant 5,951,282 - Sakata , et al. September 14, 1 | 1999-09-14 |
| Heat treatment apparatus Grant 5,556,275 - Sakata , et al. September 17, 1 | 1996-09-17 |
| Vertical type heat treatment system Grant 5,447,294 - Sakata , et al. September 5, 1 | 1995-09-05 |
| Vertical heat treating apparatus Grant 5,261,167 - Sakata November 16, 1 | 1993-11-16 |
| Clean air apparatus Grant 5,261,935 - Ishii , et al. November 16, 1 | 1993-11-16 |
| Heat processing apparatus of vertical type Grant 5,207,578 - Sakata May 4, 1 | 1993-05-04 |
| Apparatus for processing semiconductors Grant 5,181,819 - Sakata , et al. January 26, 1 | 1993-01-26 |
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