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Patent applications and USPTO patent grants for Sakamura; Masaji.The latest application filed is for "device for cleaning cvd device and method of cleaning cvd device".
Patent | Date |
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CVD apparatus and method of cleaning the CVD apparatus Grant 8,277,560 - Sakai , et al. October 2, 2 | 2012-10-02 |
Device for cleaning CVD device and method of cleaning CVD device Grant 8,043,438 - Sakai , et al. October 25, 2 | 2011-10-25 |
Device for cleaning cvd device and method of cleaning cvd device App 20060207630 - Sakai; Katsuo ;   et al. | 2006-09-21 |
Cvd apparatus and method for cleaning cvd apparatus App 20060201533 - Wani; Etsuo ;   et al. | 2006-09-14 |
Cvd apparatus having means for cleaning with fluorine gas and method of cleaning cvd apparatus with fluorine gas App 20050252451 - Beppu, Tatsuro ;   et al. | 2005-11-17 |
Cvd apparatus and method of cleaning the cvd apparatus App 20040250775 - Sakai, Katsuo ;   et al. | 2004-12-16 |
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