Patent | Date |
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Composition For Forming Thin Film For Energy Storage Device Electrode, Composite Current Collector For Energy Storage Device Electrode, Energy Storage Device Electrode, And Energy Storage Device App 20210336271 - YAJIMA; Mari ;   et al. | 2021-10-28 |
Resist underlayer film forming composition which contains compound having glycoluril skeleton as additive Grant 11,131,928 - Usui , et al. September 28, 2 | 2021-09-28 |
Protective film-forming composition Grant 11,112,696 - Hashimoto , et al. September 7, 2 | 2021-09-07 |
Compositions for forming a protective film against basic aqueous hydrogen peroxide solution, and pattern formation method Grant 11,003,078 - Ohashi , et al. May 11, 2 | 2021-05-11 |
Undercoat Layer-forming Composition For Energy Storage Device App 20210028463 - HATANAKA; Tatsuya ;   et al. | 2021-01-28 |
Undercoat Layer-forming Composition For Energy Storage Device App 20210020952 - HATANAKA; Tatsuya ;   et al. | 2021-01-21 |
Composition for forming resist underlayer film Grant 10,684,546 - Sakaida , et al. | 2020-06-16 |
Protective Film-forming Composition App 20200183282 - HASHIMOTO; Yuto ;   et al. | 2020-06-11 |
Underlying coating forming composition for lithography containing compound having protected carboxyl group Grant 10,509,320 - Takei , et al. Dec | 2019-12-17 |
Composition For Forming Protective Film Including Specific Crosslinking Agent, And Pattern Formation Method In Which Same Is Use App 20190163064 - OHASHI; Tomoya ;   et al. | 2019-05-30 |
Composition For Forming Resist Underlayer Film App 20190163063 - SAKAIDA; Yasushi ;   et al. | 2019-05-30 |
Electron beam resist underlayer film-forming composition containing lactone-structure-containing polymer Grant 10,289,002 - Sakaida , et al. | 2019-05-14 |
Resist Underlayer Film Forming Composition Which Contains Compound Having Glycoluril Skeleton As Additive App 20190086806 - USUI; Yuki ;   et al. | 2019-03-21 |
Resist underlayer film-forming composition containing polymer which contains nitrogen-containing ring compound Grant 10,113,083 - Ohnishi , et al. October 30, 2 | 2018-10-30 |
Additive and resist underlayer film-forming composition containing the same Grant 10,067,423 - Hashimoto , et al. September 4, 2 | 2018-09-04 |
Mask blank, method for manufacturing mask blank and transfer mask Grant 10,042,247 - Hiromatsu , et al. August 7, 2 | 2018-08-07 |
Polymer-containing coating liquid applied to resist pattern Grant 10,025,191 - Shigaki , et al. July 17, 2 | 2018-07-17 |
Resist underlayer film-forming composition and method for forming resist pattern using the same Grant 9,910,354 - Sakaida , et al. March 6, 2 | 2018-03-06 |
Mask Blank, Method For Manufacturing Mask Blank And Transfer Mask App 20170285460 - HIROMATSU; Takahiro ;   et al. | 2017-10-05 |
Polymer-containing developer Grant 9,753,369 - Sakamoto , et al. September 5, 2 | 2017-09-05 |
Mask blank and transfer mask Grant 9,746,764 - Hiromatsu , et al. August 29, 2 | 2017-08-29 |
Coating liquid to be applied to resist pattern and method for forming reverse pattern Grant 9,632,414 - Sakaida , et al. April 25, 2 | 2017-04-25 |
Additive And Resist Underlayer Film-forming Composition Containing The Same App 20170108777 - HASHIMOTO; Yuto ;   et al. | 2017-04-20 |
Resist Underlayer Film-forming Composition And Method For Forming Resist Pattern Using The Same App 20170045820 - SAKAIDA; Yasushi ;   et al. | 2017-02-16 |
Electron Beam Resist Underlayer Film-forming Composition Containing Lactone-structure-containing Polymer App 20160363863 - SAKAIDA; Yasushi ;   et al. | 2016-12-15 |
Polymer-containing Coating Liquid Applied To Resist Pattern App 20160363867 - Shigaki; Shuhei ;   et al. | 2016-12-15 |
Mask Blank And Transfer Mask App 20160274457 - HIROMATSU; Takahiro ;   et al. | 2016-09-22 |
Resist Underlayer Film-forming Composition Containing Polymer Which Contains Nitrogen-containing Ring Compound App 20160186006 - OHNISHI; Ryuji ;   et al. | 2016-06-30 |
Coating Liquid To Be Applied To Resist Pattern And Method For Forming Reverse Pattern App 20160179010 - SAKAIDA; Yasushi ;   et al. | 2016-06-23 |
Composition for forming pattern reversal film and method for forming reversal pattern Grant 9,165,781 - Sakaida , et al. October 20, 2 | 2015-10-20 |
Thin film forming composition for lithography containing titanium and silicon Grant 9,093,279 - Nakajima , et al. July 28, 2 | 2015-07-28 |
Underlayer coating forming composition containing dextrin ester compound Grant 8,916,327 - Takei , et al. December 23, 2 | 2014-12-23 |
Composition for forming resist underlayer film for lithography including resin containing alicyclic ring and aromatic ring Grant 8,822,138 - Shinjo , et al. September 2, 2 | 2014-09-02 |
Thin Film Forming Composition For Lithography Containing Titanium And Silicon App 20140120730 - Nakajima; Makoto ;   et al. | 2014-05-01 |
Pattern reversal film forming composition and method of forming reversed pattern Grant 8,658,341 - Maruyama , et al. February 25, 2 | 2014-02-25 |
Polymer-containing Developer App 20140038415 - Sakamoto; Rikimaru ;   et al. | 2014-02-06 |
Composition For Forming Pattern Reversal Film And Method For Forming Reversal Pattern App 20140017896 - Sakaida; Yasushi ;   et al. | 2014-01-16 |
Composition for forming resist underlayer film for lithography and production method of semiconductor device Grant 8,283,103 - Imamura , et al. October 9, 2 | 2012-10-09 |
Composition For Forming Resist Underlayer Film For Lithography Including Resin Containing Alicyclic Ring And Aromatic Ring App 20120142195 - Shinjo; Tetsuya ;   et al. | 2012-06-07 |
Pattern Reversal Film Forming Composition And Method Of Forming Reversed Pattern App 20120045899 - Maruyama; Daisuke ;   et al. | 2012-02-23 |
Acrylic polymer-containing gap fill material forming composition for lithography Grant 8,007,979 - Takei , et al. August 30, 2 | 2011-08-30 |
Coating Composition And Pattern Forming Method App 20110117746 - Maruyama; Daisuke ;   et al. | 2011-05-19 |
Composition For Forming Resist Underlayer Film For Lithography And Production Method Of Semiconductor Device App 20110045404 - Imamura; Hikaru ;   et al. | 2011-02-24 |
Method for manufacturing semiconductor device using quadruple-layer laminate Grant 7,842,620 - Takei , et al. November 30, 2 | 2010-11-30 |
Composition for forming nitride coating film for hard mask Grant 7,727,902 - Takei , et al. June 1, 2 | 2010-06-01 |
Method for manufacturing semiconductor device using quadruple-layer laminate App 20100022089 - Takei; Satoshi ;   et al. | 2010-01-28 |
Underlayer Coating Forming Composition For Lythography Containing Compound Having Protected Carboxyl Group App 20080102649 - Takei; Satoshi ;   et al. | 2008-05-01 |
Porous underlayer coating and underlayer coating forming composition for forming porous underlayer coating Grant 7,365,023 - Takei , et al. April 29, 2 | 2008-04-29 |
Composition for forming nitride coating film for hard mask App 20070148557 - Takei; Satoshi ;   et al. | 2007-06-28 |
Underlayer coating forming composition containing dextrin ester compound App 20070135581 - Takei; Satoshi ;   et al. | 2007-06-14 |
Underlayer coating forming composition for lithography containing compound having protected carboxyl group Grant 7,226,721 - Takei , et al. June 5, 2 | 2007-06-05 |
Composition for forming lower layer film for lithography comprising compound having protected carboxyl group App 20060210915 - Takei; Satoshi ;   et al. | 2006-09-21 |
Porous underlayer film and underlayer film forming composition used for forming the same App 20060211256 - Takei; Satoshi ;   et al. | 2006-09-21 |
Acrylic polymer-containing gap filler forming composition for lithography App 20060068526 - Takei; Satoshi ;   et al. | 2006-03-30 |