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Patent applications and USPTO patent grants for Sakai; Junro.The latest application filed is for "thin film processing system and method".
Patent | Date |
---|---|
Thin film processing system and method App 20060130761 - Sakai; Junro | 2006-06-22 |
Substrate processing device and method Grant 6,616,816 - Sakai September 9, 2 | 2003-09-09 |
Substrate processing device and method Grant 6,610,180 - Sakai , et al. August 26, 2 | 2003-08-26 |
Substrate processing device and method App 20020017910 - Sakai, Junro | 2002-02-14 |
Substrate processing device and method App 20020017247 - Sakai, Junro ;   et al. | 2002-02-14 |
Substrate processing apparatus App 20010025604 - Sakai, Junro | 2001-10-04 |
Semiconductor memory device and electrode therefor App 20010026482 - Sakai, Junro | 2001-10-04 |
Thin film deposition method for wafer Grant 5,441,012 - Aketagawa , et al. August 15, 1 | 1995-08-15 |
Thin film deposition method Grant 5,234,862 - Aketagawa , et al. August 10, 1 | 1993-08-10 |
Vacuum deposition apparatus with dust collector electrode Grant 4,987,857 - Aketagawa , et al. January 29, 1 | 1991-01-29 |
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