Patent | Date |
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Electrostatic chuck having reduced arcing Grant 9,218,997 - Jun , et al. December 22, 2 | 2015-12-22 |
Electrostatic Chuck Having Reduced Arcing App 20100109263 - Jun; Seok Yul ;   et al. | 2010-05-06 |
Universal mid-frequency matching network Grant 7,094,313 - Juco , et al. August 22, 2 | 2006-08-22 |
Universal mid-frquency matching network App 20050235916 - Juco, Eller Y. ;   et al. | 2005-10-27 |
High temperature ceramic heater assembly with RF capability Grant 6,616,767 - Zhao , et al. September 9, 2 | 2003-09-09 |
High Temperature Ceramic Heater Assembly With Rf Capability App 20030051665 - ZHAO, JUN ;   et al. | 2003-03-20 |
Temperature controlled gas feedthrough Grant 6,527,865 - Sajoto , et al. March 4, 2 | 2003-03-04 |
Substrate support member for a processing chamber Grant 6,464,795 - Sherstinsky , et al. October 15, 2 | 2002-10-15 |
Iridium and iridium oxide electrodes used in ferroelectric capacitors App 20020075631 - Singh, Kaushal Kishore ;   et al. | 2002-06-20 |
System and method for depositing high dielectric constant materials and compatible conductive materials App 20020015855 - Sajoto, Talex ;   et al. | 2002-02-07 |
Plasma treatment of titanium nitride formed by chemical vapor deposition Grant 6,270,859 - Zhao , et al. August 7, 2 | 2001-08-07 |
Vaporization and deposition apparatus Grant 6,258,170 - Somekh , et al. July 10, 2 | 2001-07-10 |
Plasma Treatment Of Titanium Nitride Formed By Chemical Vapor Deposition App 20010004478 - ZHAO, JUN ;   et al. | 2001-06-21 |
High temperature, high flow rate chemical vapor deposition apparatus and related methods Grant 6,189,482 - Zhao , et al. February 20, 2 | 2001-02-20 |
Heater for use in substrate processing apparatus to deposit tungsten Grant 6,179,924 - Zhao , et al. January 30, 2 | 2001-01-30 |
Apparatus for substrate processing with improved throughput and yield Grant 6,129,044 - Zhao , et al. October 10, 2 | 2000-10-10 |
Self-aligning lift mechanism Grant 6,120,609 - Selyutin , et al. September 19, 2 | 2000-09-19 |
Vaporization apparatus and process Grant 6,082,714 - Dornfest , et al. July 4, 2 | 2000-07-04 |
Method for depositing barium strontium titanate Grant 6,077,562 - Dornfest , et al. June 20, 2 | 2000-06-20 |
Cold trap Grant 6,066,209 - Sajoto , et al. May 23, 2 | 2000-05-23 |
Temperature controlled liner Grant 6,063,199 - Sajoto , et al. May 16, 2 | 2000-05-16 |
Temperature controlled gas feedthrough Grant 6,056,823 - Sajoto , et al. May 2, 2 | 2000-05-02 |
High temperature, high deposition rate process and apparatus for depositing titanium layers Grant 6,051,286 - Zhao , et al. April 18, 2 | 2000-04-18 |
High temperature multi-layered alloy heater assembly and related methods Grant 6,035,101 - Sajoto , et al. March 7, 2 | 2000-03-07 |
Apparatus for ceramic pedestal and metal shaft assembly Grant 5,994,678 - Zhao , et al. November 30, 1 | 1999-11-30 |
Methods and apparatus for a cleaning process in a high temperature, corrosive, plasma environment Grant 5,983,906 - Zhao , et al. November 16, 1 | 1999-11-16 |
High temperature ceramic heater assembly with RF capability and related methods Grant 5,968,379 - Zhao , et al. October 19, 1 | 1999-10-19 |
Removable pumping channel liners within a chemical vapor deposition chamber Grant 5,964,947 - Zhao , et al. October 12, 1 | 1999-10-12 |
Thermally floating pedestal collar in a chemical vapor deposition chamber Grant 5,846,332 - Zhao , et al. December 8, 1 | 1998-12-08 |