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Charged particle beam exposure method and apparatus and device manufacturing method using the apparatus App 20050029473 - Muraki, Masato ;   et al. | 2005-02-10 |
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Electron beam monitoring sensor and electron beam monitoring method App 20040026627 - Nakayama, Yoshinori ;   et al. | 2004-02-12 |
Electron beam exposure method, electron beam exposure apparatus and device manufacturing method using the same Grant 6,667,486 - Ohta , et al. December 23, 2 | 2003-12-23 |
Electron Beam Exposure Method, Electron Beam Exposure Apparatus And Device Manufacturing Method Using The Same App 20030189181 - Ohta, Hiroya ;   et al. | 2003-10-09 |
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