Patent | Date |
---|
Piezoelectric resonator, filter and electronic component using the same Grant 7,348,714 - Inoue , et al. March 25, 2 | 2008-03-25 |
Method of manufacturing a piezoelectric thin film resonator, manufacturing apparatus for a piezoelectric thin film resonator, piezoelectric thin film resonator, and electronic component Grant 7,239,067 - Komuro , et al. July 3, 2 | 2007-07-03 |
Substrate for electronic device, electronic device and methods of manufacturing same Grant 7,220,995 - Noguchi , et al. May 22, 2 | 2007-05-22 |
Filter device utilizing stacked resonators and acoustic coupling and branching filter using same Grant 7,212,083 - Inoue , et al. May 1, 2 | 2007-05-01 |
Filter device capable of obtaining attenuation characteristic of sharpness in narrow band width and branching filter using the same Grant 7,170,370 - Inoue , et al. January 30, 2 | 2007-01-30 |
Thin-film bulk acoustic oscillator and method of manufacturing same Grant 7,109,637 - Komuro , et al. September 19, 2 | 2006-09-19 |
Method for manufacturing piezo-resonator Grant 7,003,875 - Imura , et al. February 28, 2 | 2006-02-28 |
Piezoelectric resonant filter and duplexer Grant 6,989,723 - Komuro , et al. January 24, 2 | 2006-01-24 |
Method for manufacturing piezo-resonator App 20050090033 - Imuri, Masaaki ;   et al. | 2005-04-28 |
Electronic device substrate structure and electronic device Grant 6,855,996 - Noguchi , et al. February 15, 2 | 2005-02-15 |
Substrate for electronic device, electronic device and methods of manufacturing same App 20050029629 - Noguchi, Takao ;   et al. | 2005-02-10 |
Filter device and branching filter using same App 20050030126 - Inoue, Kenji ;   et al. | 2005-02-10 |
Piezoelectric resonator, filter and electronic component using the same App 20050023932 - Inoue, Kenji ;   et al. | 2005-02-03 |
Thin-film bulk acoustic oscillator and method of manufacturing same App 20050006984 - Komuro, Eiju ;   et al. | 2005-01-13 |
Filter device capable of obtaining attenuation characteristic of sharpness in narrow band width and branching filter using the same App 20040227587 - Inoue, Kenji ;   et al. | 2004-11-18 |
Method of manufacturing a piezoelectric thin film resonator, manufacturing apparatus for a piezoelectric thin film resonator, piezoelectric thin film resonator, and electronic component App 20040191947 - Komuro, Eiju ;   et al. | 2004-09-30 |
Piezoelectric resonant filter and duplexer App 20040113720 - Komuro, Eiju ;   et al. | 2004-06-17 |
Electronic device substrate structure and electronic device App 20040099918 - Noguchi, Takao ;   et al. | 2004-05-27 |
Multilayer thin film and its fabrication process as well as electron device Grant 6,709,776 - Noguchi , et al. March 23, 2 | 2004-03-23 |
Multilayer thin film and its fabrication process as well as electron device App 20020015852 - Noguchi, Takao ;   et al. | 2002-02-07 |
Multilayer thin film and its fabrication process as well as electron device App 20020006733 - Noguchi, Takao ;   et al. | 2002-01-17 |
Thin film piezoelectric device Grant 6,198,208 - Yano , et al. March 6, 2 | 2001-03-06 |