| Patent | Date |
|---|
Three-dimensional shape measuring apparatus, three-dimensional shape measuring method, program, and storage medium
Grant 9,389,067 - Sonoda , et al. July 12, 2 | 2016-07-12 |
Three-dimensional Shape Measuring Apparatus, Three-dimensional Shape Measuring Method, Program, And Storage Medium
App 20140063192 - Sonoda; Tetsuri ; et al. | 2014-03-06 |
Measurement apparatus and method for measuring surface shape and roughness
Grant 8,497,995 - Ota , et al. July 30, 2 | 2013-07-30 |
Measurement system and measurement processing method
Grant 8,456,621 - Ota , et al. June 4, 2 | 2013-06-04 |
Information processing apparatus and method
Grant 8,437,003 - Yoshikawa , et al. May 7, 2 | 2013-05-07 |
Measurement System And Measurement Processing Method
App 20120327400 - Ota; Kazuyuki ; et al. | 2012-12-27 |
Measurement system and measurement processing method
Grant 8,274,646 - Ota , et al. September 25, 2 | 2012-09-25 |
Corner cube member illumination device and inspection system having the same
Grant 7,988,309 - Saitoh , et al. August 2, 2 | 2011-08-02 |
Illuminating apparatus and surface inspection system using illuminating apparatus
Grant 7,965,917 - Yoshikawa , et al. June 21, 2 | 2011-06-21 |
Illumination apparatus and appearance inspection apparatus including the same
Grant 7,957,636 - Saitoh , et al. June 7, 2 | 2011-06-07 |
Inspection apparatus and method
Grant 7,924,418 - Yoshikawa , et al. April 12, 2 | 2011-04-12 |
Illuminating apparatus and image sensing system including illuminating apparatus
Grant 7,901,098 - Saitoh , et al. March 8, 2 | 2011-03-08 |
Information Processing Apparatus And Method
App 20110037984 - Yoshikawa; Hiroshi ; et al. | 2011-02-17 |
Measurement System And Measurement Processing Method
App 20100328649 - Ota; Kazuyuki ; et al. | 2010-12-30 |
Measurement Apparatus And Method For Measuring Surface Shape And Roughness
App 20100220338 - Ota; Kazuyuki ; et al. | 2010-09-02 |
Illumination Apparatus And Appearance Inspection Apparatus Including The Same
App 20100111515 - Saitoh; Kenji ; et al. | 2010-05-06 |
Image pickup optical system
Grant 7,605,860 - Saitoh , et al. October 20, 2 | 2009-10-20 |
Wireless imaging apparatus and its control method
Grant 7,508,417 - Nishimura , et al. March 24, 2 | 2009-03-24 |
Inspection Apparatus And Method
App 20090015823 - Yoshikawa; Hiroshi ; et al. | 2009-01-15 |
Exposure method and apparatus
Grant 7,402,378 - Saitoh , et al. July 22, 2 | 2008-07-22 |
Mask and manufacturing method thereof and exposure method
Grant 7,399,558 - Yamazoe , et al. July 15, 2 | 2008-07-15 |
Illumination Device And Inspection System Having Same
App 20080080161 - SAITOH; Kenji ; et al. | 2008-04-03 |
Illuminating Apparatus And Surface Inspection System Using Illuminating Apparatus
App 20070292100 - Yoshikawa; Hiroshi ; et al. | 2007-12-20 |
Illuminating Apparatus And Image Sensing System Including Illuminating Apparatus
App 20070292088 - Saitoh; Kenji ; et al. | 2007-12-20 |
Image Pickup Optical System
App 20070273782 - Saitoh; Kenji ; et al. | 2007-11-29 |
Image processing system, method and program for image sensing using plural image sensing devices, wirelessly transmitting plural image data and processing the image data
Grant 7,277,125 - Nishimura , et al. October 2, 2 | 2007-10-02 |
Exposure method and apparatus
Grant 7,217,503 - Saitoh , et al. May 15, 2 | 2007-05-15 |
Mask and its manufacturing method, exposure, and device fabrication method
Grant 7,214,453 - Yamazoe , et al. May 8, 2 | 2007-05-08 |
Method for setting mask pattern and illumination condition
Grant 7,107,573 - Yamazoe , et al. September 12, 2 | 2006-09-12 |
Wireless communication apparatus and method
Grant 7,075,455 - Nishimura , et al. July 11, 2 | 2006-07-11 |
Exposure method and apparatus
App 20060033900 - Saitoh; Kenji ; et al. | 2006-02-16 |
Exposure method and apparatus
Grant 6,991,877 - Saitoh , et al. January 31, 2 | 2006-01-31 |
Mask and manufacturing method thereof and exposure method
App 20050037267 - Yamazoe, Kenji ; et al. | 2005-02-17 |
Interferometer and interferance measurement method
Grant 6,842,255 - Ohsaki , et al. January 11, 2 | 2005-01-11 |
Mask manufacturing method
Grant 6,839,890 - Sugita , et al. January 4, 2 | 2005-01-04 |
Optical system and optical instrument with diffractive optical element
Grant 6,829,091 - Kato , et al. December 7, 2 | 2004-12-07 |
Exposure method and device manufacturing method using the same
Grant 6,828,085 - Kochi , et al. December 7, 2 | 2004-12-07 |
Mask and its manufacturing method, exposure, and device fabrication method
App 20040166422 - Yamazoe, Kenji ; et al. | 2004-08-26 |
Image processing system, method and program
App 20040165076 - Nishimura, Naoki ; et al. | 2004-08-26 |
Wireless imaging apparatus and its control method
App 20040071460 - Nishimura, Naoki ; et al. | 2004-04-15 |
Wireless communication apparatus and method
App 20040005889 - Nishimura, Naoki ; et al. | 2004-01-08 |
Mask manufacturing method
App 20030233629 - Sugita, Mitsuro ; et al. | 2003-12-18 |
Method for setting mask pattern and illumination condition
App 20030198872 - Yamazoe, Kenji ; et al. | 2003-10-23 |
Multiple exposure device formation
Grant 6,534,242 - Sugita , et al. March 18, 2 | 2003-03-18 |
Optical System And Optical Instrument With Diffractive Optical Element
App 20030016447 - KATO, TAKASHI ; et al. | 2003-01-23 |
Exposure Method And Device Manufacturing Method Using The Same
App 20020187440 - KOCHI, TETSUNOBU ; et al. | 2002-12-12 |
Interferometer and interferance measurement method
App 20020176090 - Ohsaki, Yumiko ; et al. | 2002-11-28 |
Exposure method and apparatus
App 20020177054 - Saitoh, Kenji ; et al. | 2002-11-28 |
Exposure method and apparatus
App 20020177048 - Saitoh, Kenji ; et al. | 2002-11-28 |
Multiple exposure method
Grant 6,403,291 - Kawashima , et al. June 11, 2 | 2002-06-11 |
Exposure method, exposure apparatus, and device manufacturing method
App 20020031725 - Sugita, Mitsuro ; et al. | 2002-03-14 |
Position detecting apparatus
Grant 6,157,452 - Hasegawa , et al. December 5, 2 | 2000-12-05 |
Position detecting system and device manufacturing method using the same
Grant 6,154,281 - Sentoku , et al. November 28, 2 | 2000-11-28 |
Non-volatile semiconductor memory device having a floating gate inside a grove
Grant 6,060,739 - Saitoh May 9, 2 | 2000-05-09 |
Method of making non-volatile semiconductor memory device with the floating gate having upper and lower impurity concentrations
Grant 5,985,720 - Saitoh November 16, 1 | 1999-11-16 |
Semiconductor device manufacturing method
Grant 5,946,593 - Saitoh August 31, 1 | 1999-08-31 |
Non-volatile semiconductor storage apparatus and production thereof
Grant 5,891,773 - Saitoh April 6, 1 | 1999-04-06 |
Alignment apparatus and SOR X-ray exposure apparatus having same
Grant 5,822,389 - Uzawa , et al. October 13, 1 | 1998-10-13 |
Positional deviation measuring device and method for measuring the positional deviation between a plurality of diffraction gratings formed on the same object
Grant 5,751,426 - Nose , et al. May 12, 1 | 1998-05-12 |
Two scanning probes information recording/reproducing system with one probe to detect atomic reference location on a recording medium
Grant 5,721,721 - Yanagisawa , et al. February 24, 1 | 1998-02-24 |
Position detecting apparatus and a method for manufacturing semiconductor devices using the apparatus
Grant 5,717,492 - Sentoku , et al. February 10, 1 | 1998-02-10 |
Apparatus for detecting positional deviation of diffraction gratings on a substrate by utilizing optical heterodyne interference of light beams incident on the gratings from first and second light emitters
Grant 5,682,239 - Matsumoto , et al. October 28, 1 | 1997-10-28 |
Non-volatile semiconductor memory device
Grant 5,670,809 - Saitoh September 23, 1 | 1997-09-23 |
System and method for detecting the relative positional deviation between diffraction gratings and for measuring the width of a line constituting a diffraction grating
Grant 5,625,453 - Matsumoto , et al. April 29, 1 | 1997-04-29 |
Method and apparatus for measuring positional deviation while correcting an error on the basis of the error detection by an error detecting means
Grant 5,585,923 - Nose , et al. December 17, 1 | 1996-12-17 |
Encoder for controlling measurements in the range of a few angstroms
Grant 5,519,686 - Yanagisawa , et al. May 21, 1 | 1996-05-21 |
Wavelength compensator in a helium ambience
Grant 5,483,343 - Iwamoto , et al. January 9, 1 | 1996-01-09 |
Position detecting method
Grant 5,396,335 - Hasegawa , et al. March 7, 1 | 1995-03-07 |
Method and apparatus for measuring an interval between two objects
Grant 5,343,291 - Ohwada , et al. August 30, 1 | 1994-08-30 |
Measuring method and apparatus for meausring the positional relationship of first and second gratings
Grant 5,333,050 - Nose , et al. July 26, 1 | 1994-07-26 |
Device for detecting positional relationship between two objects
Grant 5,327,221 - Saitoh , et al. July 5, 1 | 1994-07-05 |
Position detecting method
Grant 5,285,259 - Saitoh February 8, 1 | 1994-02-08 |
Position detecting method and apparatus
Grant 5,235,408 - Matsugu , et al. August 10, 1 | 1993-08-10 |
Position detecting method having reflectively scattered light prevented from impinging on a detector
Grant 5,229,617 - Saitoh , et al. July 20, 1 | 1993-07-20 |
Position detecting method and apparatus
Grant 5,200,800 - Suda , et al. April 6, 1 | 1993-04-06 |
Deviation measuring device including a mask having a grating pattern and a zone plate pattern
Grant 5,196,711 - Matsugu , et al. March 23, 1 | 1993-03-23 |
Multi-axis wafer position detecting system using a mark having optical power
Grant 5,148,036 - Matsugu , et al. September 15, 1 | 1992-09-15 |
Position detection method and apparatus
Grant 5,114,236 - Matsugu , et al. May 19, 1 | 1992-05-19 |
Semiconductor device and method of manufacturing thereof
Grant 4,896,204 - Hirata , et al. January 23, 1 | 1990-01-23 |
Surface treated polymethylsilsesquioxane powder
Grant 4,895,914 - Saitoh , et al. January 23, 1 | 1990-01-23 |
Method for patterning electroconductive film and patterned electroconductive film
Grant 4,835,083 - Sakai , et al. May 30, 1 | 1989-05-30 |
Polymerizable film and pattern forming method by use thereof
Grant 4,798,740 - Tomida , et al. January 17, 1 | 1989-01-17 |
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