Patent | Date |
---|
Substrate cleaning method, substrate cleaning apparatus and vacuum processing system Grant 9,960,056 - Dobashi , et al. May 1, 2 | 2018-05-01 |
Substrate cleaning method, substrate cleaning device, and vacuum processing device Grant 9,881,815 - Matsuo , et al. January 30, 2 | 2018-01-30 |
Method for removing metal contamination and apparatus for removing metal contamination Grant 9,875,915 - Ito , et al. January 23, 2 | 2018-01-23 |
Liquid Processing Method And Liquid Processing Apparatus App 20170032984 - ITO; Yudai ;   et al. | 2017-02-02 |
Method For Removing Metal Contamination And Apparatus For Removing Metal Contamination App 20160175898 - Ito; Yudai ;   et al. | 2016-06-23 |
Substrate Cleaning Method, Substrate Cleaning Apparatus And Vacuum Processing System App 20150255316 - Dobashi; Kazuya ;   et al. | 2015-09-10 |
Substrate Cleaning Method, Substrate Cleaning Device, And Vacuum Processing Device App 20150007858 - Matsuo; Jiro ;   et al. | 2015-01-08 |
Virus detection device and virus detection method Grant 8,911,955 - Tamura , et al. December 16, 2 | 2014-12-16 |
Organic Transistor And Method For Manufacturing Same App 20140299870 - Fuse; Takashi ;   et al. | 2014-10-09 |
Virus Detection Device And Virus Detection Method App 20130244226 - Tamura; Akitake ;   et al. | 2013-09-19 |
Evaporating Apparatus And Evaporating Method App 20130209666 - Kamada; Tomiko ;   et al. | 2013-08-15 |
Method for analyzing quartz member Grant 8,268,185 - Dobashi , et al. September 18, 2 | 2012-09-18 |
Vapor Deposition Apparatus And Vapor Deposition Method App 20120094014 - Ono; Yuji ;   et al. | 2012-04-19 |
Deposition Head And Film Forming Apparatus App 20120031339 - Ono; Yuji ;   et al. | 2012-02-09 |
Defect inspecting method and defect inspecting apparatus Grant 8,040,504 - Saito , et al. October 18, 2 | 2011-10-18 |
Vacuum processing apparatus and method Grant 7,993,458 - Kondo , et al. August 9, 2 | 2011-08-09 |
Apparatus and method for measuring the concentration of organic gas Grant 7,946,152 - Saito , et al. May 24, 2 | 2011-05-24 |
Defect Inspecting Method And Defect Inspecting Apparatus App 20100245812 - Saito; Misako ;   et al. | 2010-09-30 |
Substrate Inspection Method, Substrate Inspection Apparatus And Storage Medium App 20090206253 - SAITO; Misako ;   et al. | 2009-08-20 |
Substrate Inspection Device And Substrate Inspection Method App 20090206255 - Saito; Misako ;   et al. | 2009-08-20 |
Apparatus And Method For Measuring The Concentration Of Organic Gas App 20090113991 - Saito; Misako ;   et al. | 2009-05-07 |
Method for Analyzing Quartz Member App 20080302762 - Dobashi; Kazuya ;   et al. | 2008-12-11 |
Vacuum Processing Apparatus And Method App 20080274288 - KONDO; Masaki ;   et al. | 2008-11-06 |
Electric wire and cable with coating/covering of polyvinyl chloride family resin composition Grant 7,420,118 - Watanabe , et al. September 2, 2 | 2008-09-02 |
Method and apparatus for treating article to be treated Grant 7,208,428 - Hishiya , et al. April 24, 2 | 2007-04-24 |
Vacuum processing apparatus and method of using the same App 20060174835 - Saito; Misako ;   et al. | 2006-08-10 |
Electric wire and cable with coating/covering of polyvinyl chloride family resin composition App 20050215682 - Watanabe, Kiyoshi ;   et al. | 2005-09-29 |
Electric wire coated with polyvinyl chloride resin composition and cable Grant 6,903,264 - Watanabe , et al. June 7, 2 | 2005-06-07 |
Method and apparatus for treating article to be treated App 20040219793 - Hishiya, Shingo ;   et al. | 2004-11-04 |
Electric wire coated with polyvinyl chloride resin compostion and cable App 20040149482 - Watanabe, Kiyoshi ;   et al. | 2004-08-05 |
Method for deciding on the timing of replacing a chemical filter, filter life detection sensor, chemical filter unit, and semiconductor manufacturing apparatus Grant 6,537,347 - Motouji , et al. March 25, 2 | 2003-03-25 |
Method for deciding on the timing of replacing a chemical filter, filter life detection sensor, chemical filter unit, and semiconductor manufacturing apparatus App 20020112605 - Motouji, Satoshi ;   et al. | 2002-08-22 |