SAITO; Miki
Patent Applications and Registrations
Patent applications and USPTO patent grants for SAITO; Miki.The latest application filed is for "substrate fixing device".
- SAITO; Miki - Nagano JP
- Saito; Miki - Nagano-shi JP
| Patent | Date |
|---|---|
| Substrate Fixing Device App 20200294838 - YOSHIKAWA; Tadayoshi ; et al. | 2020-09-17 |
| Tray and wafer holding apparatus Grant 9,837,297 - Tamagawa , et al. December 5, 2 | 2017-12-05 |
| Tray And Wafer Holding Apparatus App 20150371885 - TAMAGAWA; Koki ; et al. | 2015-12-24 |
| Dielectric layer for electrostatic chuck and electrostatic chuck Grant 9,120,704 - Tsutsumi , et al. September 1, 2 | 2015-09-01 |
| Dielectric Layer For Electrostatic Chuck And Electrostatic Chuck App 20140103612 - Tsutsumi; Kouta ; et al. | 2014-04-17 |
| Substrate temperature regulation fixed apparatus Grant 8,641,825 - Yonekura , et al. February 4, 2 | 2014-02-04 |
| Substrate temperature control fixing apparatus Grant 8,505,928 - Saito , et al. August 13, 2 | 2013-08-13 |
| Substrate Temperature Control Fixing Apparatus App 20100156055 - Saito; Miki ; et al. | 2010-06-24 |
| Substrate Temperature Regulation Fixed Apparatus App 20090308538 - YONEKURA; Hiroshi ; et al. | 2009-12-17 |
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