Patent | Date |
---|
Apparatus For And Method Of Forming Carbon Nanotube App 20090214800 - Saito; Kimitsugu | 2009-08-27 |
High-pressure processing apparatus and high-pressure processing method Grant 7,562,663 - Muraoka , et al. July 21, 2 | 2009-07-21 |
High pressure processing method and apparatus Grant 7,513,265 - Yoshikawa , et al. April 7, 2 | 2009-04-07 |
High-pressure processing apparatus and high-pressure processing method Grant 7,435,396 - Muraoka , et al. October 14, 2 | 2008-10-14 |
Substrate processing method, substrate processing apparatus and substrate processing system Grant 7,384,484 - Muraoka , et al. June 10, 2 | 2008-06-10 |
Substrate Processing Method And Substrate Processing Apparatus App 20070215572 - Saito; Kimitsugu | 2007-09-20 |
High pressure processing method Grant 7,252,719 - Sakashita , et al. August 7, 2 | 2007-08-07 |
High-pressure Processing Apparatus And High-pressure Processing Method App 20070044816 - Saito; Kimitsugu | 2007-03-01 |
High-pressure processing apparatus App 20070022949 - Saito; Kimitsugu | 2007-02-01 |
High pressure processing apparatus and method Grant 7,111,630 - Mizobata , et al. September 26, 2 | 2006-09-26 |
High pressure processing apparatus and method Grant 7,080,651 - Mizobata , et al. July 25, 2 | 2006-07-25 |
High pressure processing apparatus and high pressure processing method Grant 7,000,653 - Sakashita , et al. February 21, 2 | 2006-02-21 |
High Pressure Processing Method App 20060032520 - Sakashita; Yoshihiko ;   et al. | 2006-02-16 |
High-pressure processing apparatus and high-pressure processing method App 20050079107 - Muraoka, Yusuke ;   et al. | 2005-04-14 |
High pressure processing apparatus Grant 6,874,513 - Yamagata , et al. April 5, 2 | 2005-04-05 |
Cleaning apparatus for cleaning objects to be treated with use of cleaning composition App 20050005957 - Yamagata, Masahiro ;   et al. | 2005-01-13 |
Substrate processing apparatus equipping with high-pressure processing unit Grant 6,841,031 - Iwata , et al. January 11, 2 | 2005-01-11 |
High pressure processing apparatus and high pressure processing method Grant 6,823,880 - Sakashita , et al. November 30, 2 | 2004-11-30 |
High pressure processing apparatus and method App 20040231698 - Mizobata, Ikuo ;   et al. | 2004-11-25 |
High pressure processing apparatus and high pressure processing method App 20040194842 - Sakashita, Yoshihiko ;   et al. | 2004-10-07 |
High-pressure processing apparatus and high-pressure processing method App 20040182419 - Muraoka, Yusuke ;   et al. | 2004-09-23 |
High pressure processing method and apparatus App 20040123484 - Yoshikawa, Tetsuya ;   et al. | 2004-07-01 |
Substrate processing method, substrate processing apparatus and substrate processing system App 20040105936 - Muraoka, Yusuke ;   et al. | 2004-06-03 |
Method and system for processing substrate Grant 6,703,316 - Inoue , et al. March 9, 2 | 2004-03-09 |
High-pressure treatment apparatus and high-pressure treatment method App 20040031441 - Muraoka, Yusuke ;   et al. | 2004-02-19 |
High-pressure drying apparatus, high-pressure drying method and substrate processing apparatus Grant 6,691,430 - Saito , et al. February 17, 2 | 2004-02-17 |
High-pressure drying apparatus, high-pressure drying method and substrate processing apparatus App 20030177659 - Saito, Kimitsugu ;   et al. | 2003-09-25 |
Substrate processing apparatus equipping with high-pressure processing unit App 20030019578 - Iwata, Tomomi ;   et al. | 2003-01-30 |
High pressure processing apparatus and high pressure processing method App 20020179114 - Sakashita, Yoshihiko ;   et al. | 2002-12-05 |
High pressure processing apparatus and method App 20020170577 - Mizobata, Ikuo ;   et al. | 2002-11-21 |
Method and system for processing substrate App 20020160625 - Inoue, Yoichi ;   et al. | 2002-10-31 |
High-pressure processing apparatus App 20020148492 - Yamagata, Masahiro ;   et al. | 2002-10-17 |
Highly-oriented diamond film field-effect transistor Grant 5,491,348 - Koyamao , et al. February 13, 1 | 1996-02-13 |
Formation of highly oriented diamond film Grant 5,479,875 - Tachibana , et al. January 2, 1 | 1996-01-02 |
Highly oriented diamond film field-effect transistor Grant 5,371,383 - Miyata , et al. December 6, 1 | 1994-12-06 |
Diamond films with heat-resisting ohmic electrodes Grant 5,309,000 - Saito , et al. May 3, 1 | 1994-05-03 |