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Patent applications and USPTO patent grants for Saito; Harumitsu.The latest application filed is for "polishing apparatus".
Patent | Date |
---|---|
Polishing apparatus Grant 7,198,552 - Nishi , et al. April 3, 2 | 2007-04-03 |
Polishing apparatus App 20060084369 - Nishi; Toyomi ;   et al. | 2006-04-20 |
Polishing apparatus and a method of polishing and cleaning and drying a wafer Grant 6,997,782 - Nishi , et al. February 14, 2 | 2006-02-14 |
Polishing apparatus and a method of polishing and cleaning and drying a wafer App 20030040261 - Nishi, Toyomi ;   et al. | 2003-02-27 |
Polishing aparatus and method Grant 5,679,059 - Nishi , et al. October 21, 1 | 1997-10-21 |
Multistage vacuum pump with interstage solid material collector and cooling coils Grant 5,173,041 - Niimura , et al. December 22, 1 | 1992-12-22 |
Method for incinerating material Grant 4,452,155 - Ishihara , et al. June 5, 1 | 1984-06-05 |
Thermal reactor of fluidizing bed type Grant 4,419,330 - Ishihara , et al. December 6, 1 | 1983-12-06 |
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