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Patent applications and USPTO patent grants for SAIKI; Kenta.The latest application filed is for "method of detecting foreign object on stage and detection apparatus".
Patent | Date |
---|---|
Method Of Detecting Foreign Object On Stage And Detection Apparatus App 20210215742 - SAIKI; Kenta ;   et al. | 2021-07-15 |
Probe apparatus and probe method Grant 10,310,010 - Tamura , et al. | 2019-06-04 |
Substrate inspection apparatus and control method thereof Grant 10,074,192 - Saiki , et al. September 11, 2 | 2018-09-11 |
Position accuracy inspecting method, position accuracy inspecting apparatus, and position inspecting unit Grant 10,006,941 - Saiki , et al. June 26, 2 | 2018-06-26 |
Position Accuracy Inspecting Method, Position Accuracy Inspecting Apparatus, And Position Inspecting Unit App 20170219625 - Saiki; Kenta ;   et al. | 2017-08-03 |
Probe Apparatus And Probe Method App 20160161553 - TAMURA; Muneaki ;   et al. | 2016-06-09 |
Substrate Inspection Apparatus and Control Method Thereof App 20160098837 - SAIKI; Kenta ;   et al. | 2016-04-07 |
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