Saiki; Kazuaki

Patent Applications and Registrations

Patent applications and USPTO patent grants for Saiki; Kazuaki.The latest application filed is for "driving system and driving method, exposure apparatus and exposure method, and driving system design method".

Company Profile

0.15.6

Saiki; Kazuaki - Yokohama N/A JP
Saiki; Kazuaki - Yokahama N/A JP
Saiki; Kazuaki - Yokohama-shi JP
Saiki; Kazuaki - Yokohama-city JP
Saiki; Kazuaki - Tokyo JP
Saiki; Kazuaki - Setagaya JP
Saiki; Kazuaki - Kawasaki JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Driving system and driving method, exposure apparatus and exposure method, and driving system design method Grant 9,188,878 - Fujimoto , et al. November 17, 2	2015-11-17
Damping apparatus and exposure apparatus Grant 8,805,556 - Saiki , et al. August 12, 2	2014-08-12
Driving System And Driving Method, Exposure Apparatus And Exposure Method, And Driving System Design Method App 20140028992 - Fujimoto; Hiroshi ; et al.	2014-01-30
Drive Control Method, Drive Control Apparatus, Stage Control Method, Stage Control Apparatus, Exposure Method, Exposure Apparatus And Measuring Apparatus App 20110046795 - Fujimoto; Hiroshi ; et al.	2011-02-24
Drive control method for moving body, exposure method, robot control method, drive control apparatus, exposure apparatus and robot apparatus App 20100302526 - Saiki; Kazuaki	2010-12-02
Damping Apparatus And Exposure Apparatus App 20100001168 - Saiki; Kazuaki ; et al.	2010-01-07
Stage device having drive mechanism for driving a movable stage, and exposure apparatus and method of detecting position of the stage Grant 6,744,511 - Saiki , et al. June 1, 2	2004-06-01
Stage device, exposure apparatus incorporating the stage device, and method of using the same Grant 6,606,146 - Saiki August 12, 2	2003-08-12
Command trajectory for driving a stage with minimal vibration Grant 6,320,345 - Yuan , et al. November 20, 2	2001-11-20
Stage device, exposure apparatus incorporating the stage device, and method of using the same App 20010027595 - Saiki, Kazuaki	2001-10-11
Position control apparatus for fine stages carried by a coarse stage on a high-precision scanning positioning system Grant 6,008,610 - Yuan , et al. December 28, 1	1999-12-28
Projection exposure apparatus Grant 5,920,378 - Murakami , et al. July 6, 1	1999-07-06
Exposure apparatus Grant 5,798,822 - Miyazaki , et al. August 25, 1	1998-08-25
Scanning exposure apparatus and method Grant 5,777,722 - Miyazaki , et al. July 7, 1	1998-07-07
Scanning exposure apparatus Grant 5,715,037 - Saiki , et al. February 3, 1	1998-02-03
Exposure apparatus and method Grant 5,657,130 - Shirasu , et al. August 12, 1	1997-08-12
Exposure apparatus and exposure method for minimizing defocusing of the transferred pattern Grant 5,640,227 - Kato , et al. June 17, 1	1997-06-17
System for driving a movable stage Grant 4,577,141 - Saiki , et al. March 18, 1	1986-03-18

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