Sai; Choshoku

Patent Applications and Registrations

Patent applications and USPTO patent grants for Sai; Choshoku.The latest application filed is for "optical device, projection optical system, exposure apparatus using the same, and method for manufacturing article".

Company Profile

1.10.11

Sai; Choshoku - Utsunomiya JP
Sai; Choshoku - Utsunomiya-shi JP
Sai; Choshoku - Kanagawa JP
Sai; Choshoku - Tokyo JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Optical device, projection optical system, exposure apparatus using the same, and method for manufacturing article Grant 10,884,236 - Sai January 5, 2	2021-01-05
Optical Device, Projection Optical System, Exposure Apparatus Using The Same, And Method For Manufacturing Article App 20190041631 - Sai; Choshoku	2019-02-07
Optical apparatus, projection optical system, exposure apparatus, and method of manufacturing article Grant 9,568,729 - Sai , et al. February 14, 2	2017-02-14
Mirror unit and exposure apparatus Grant 9,557,560 - Sai January 31, 2	2017-01-31
Optical apparatus, projection optical system, exposure apparatus, and method of manufacturing article Grant 9,465,294 - Sai October 11, 2	2016-10-11
Optical Apparatus, Projection Optical System, Exposure Apparatus, And Method Of Manufacturing Article App 20150177481 - Sai; Choshoku	2015-06-25
Optical Apparatus, Projection Optical System, Exposure Apparatus, And Method Of Manufacturing Article App 20150092172 - Sai; Choshoku ; et al.	2015-04-02
Mirror Unit And Exposure Apparatus App 20140307243 - SAI; Choshoku	2014-10-16
Optical unit and exposure apparatus having the same Grant 7,771,065 - Sai , et al. August 10, 2	2010-08-10
Reflecting mirror and exposure apparatus using the same Grant 7,453,623 - Uchida , et al. November 18, 2	2008-11-18
Optical element holding apparatus, exposure apparatus and device manufacturing method Grant 7,443,619 - Sakino , et al. October 28, 2	2008-10-28
Hydrostatic bearing and stage apparatus using same Grant 7,232,257 - Sai June 19, 2	2007-06-19
Static gas bearing system, stage mechanism, exposure apparatus, and device manufacturing method Grant 7,207,720 - Sai , et al. April 24, 2	2007-04-24
Optical Element Holding Apparatus, Exposure Apparatus And Device Manufacturing Method App 20070076310 - Sakino; Shigeo ; et al.	2007-04-05
Reflecting mirror and exposure apparatus using the same App 20060245035 - Uchida; Shinji ; et al.	2006-11-02
Optical unit and exposure apparatus having the same App 20060232866 - Sai; Choshoku ; et al.	2006-10-19
Static gas bearing system, stage mechanism, exposure apparatus, and device manufacturing method App 20050129339 - Sai, Choshoku ; et al.	2005-06-16
Hydrostatic bearing, alignment apparatus, exposure apparatus, and device manufacturing method App 20050008269 - Akutsu, Kotaro ; et al.	2005-01-13
Weight compensation apparatus, stage apparatus using the same, and exposure apparatus Grant 6,658,083 - Sai December 2, 2	2003-12-02
Hydrostatic bearing and stage apparatus using same App 20020176061 - Sai, Choshoku	2002-11-28
Weight compensation apparatus, stage apparatus using the same, and exposure apparatus App 20010053196 - Sai, Choshoku	2001-12-20

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